Ms. Qinghua Zhang Profile

Qinghua Zhang

at China Academy of Engineering Physics

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Author

Publications (13)

Proceedings Article | 16 December 2022 Presentation + Paper

Properties of femtosecond laser modified atomic layer deposition SiO2 films and their resistance to nanosecond ultraviolet lasers

Kaixin Yuan, Feng Geng, Qinghua Zhang, Yaguo Li

Proceedings Volume 12312, 1231208 (2022) https://doi.org/10.1117/12.2646242

KEYWORDS: Thin films, Femtosecond phenomena, Atomic layer deposition, Laser induced damage, Silica, Resistance, Absorption, Silicon, Ultraviolet radiation, Luminescence

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Proceedings Article | 5 November 2020 Paper

Laser damage and evolution law of scratches on fused silica in etching

Xiangyang Lei, Nan Zheng, Xianhua Chen, Lian Zhou, Xi Xu, Qinghua Zhang, Jian Wang, Zhigang Yuan

Proceedings Volume 11568, 115680D (2020) https://doi.org/10.1117/12.2575700

KEYWORDS: Etching, Laser damage threshold, Laser induced damage, Wet etching, Polishing, High power lasers, Surface finishing

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Proceedings Article | 31 January 2020 Paper

Propagation regularity of sub-surface crack in static indentation of fused silica by single abrasive

Lian Zhou, Jie Li, Shijie Zhao, Xianhua Chen, Qinghua Zhang, Jian Wang

Proceedings Volume 11427, 1142706 (2020) https://doi.org/10.1117/12.2548567

KEYWORDS: Silica, Abrasives, Microscopes, Optical components, Microscopy, Diamond, Optics manufacturing

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Proceedings Article | 18 December 2019 Paper

The effect of grinding processing parameters on aspheric small-scale waviness

Qiancai Wei, Lian Zhou, Xianhua Chen, Jie Li, Qinghua Zhang, Jian Wang

Proceedings Volume 11342, 113420C (2019) https://doi.org/10.1117/12.2543501

KEYWORDS: Aspheric lenses, Surface finishing, Polishing, Safety, Manufacturing, Lithium, Analytical research, Aspheric optics, Mirrors, Monochromatic aberrations

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Proceedings Article | 18 December 2019 Paper

Key technologies in high efficiency and ultra precision grinding of large aperture and complex aspheric lens

Lian Zhou, Qiancai Wei, Xianhua Chen, Qinghua Zhang, Jian Wang

Proceedings Volume 11342, 1134209 (2019) https://doi.org/10.1117/12.2543178

KEYWORDS: Aspheric lenses, Computer programming, Lens grinding, Raster graphics, Diamond wheels, 3D metrology

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Proceedings Article | 18 November 2019 Paper

In-situ detection and evaluation of wear state of micro-powder diamond wheel in optics grinding

Lian Zhou, Qiancai Wei, Xianhua Chen, Qinghua Zhang, Jian Wang, Qiao Xu

Proceedings Volume 11189, 1118904 (2019) https://doi.org/10.1117/12.2536347

KEYWORDS: Diamond wheels, Particles, Image processing, Abrasives, Surface finishing, Diamond machining, Optical components, Binary data, Edge detection, Diamond

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Proceedings Article | 15 November 2019 Presentation + Paper

Particle distribution characterization on material removal uniformity in chemical mechanical polishing

Shijie Zhao, Ruiqing Xie, Defeng Liao, Xianhua Chen, Qinghua Zhang, Jian Wang, Qiao Xu

Proceedings Volume 11175, 111750A (2019) https://doi.org/10.1117/12.2536289

KEYWORDS: Particles, Chemical mechanical planarization, Polishing, Surface finishing, Kinematics, Tin, Abrasives

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Proceedings Article | 13 August 2019 Open Access

Study on IR laser smoothing of ground surface on fused silica (Erratum)

Zhigang Yuan, Yaguo Li, Du Wang, Ting Tan, Huiliang Jin, Qinghua Zhang, Jian Wang, Qiao Xu

Proceedings Volume 11063, 110631J (2019) https://doi.org/10.1117/12.2550474

KEYWORDS: Infrared lasers, Silica, Physics, Laser induced damage, Lithium, Optical engineering, High power lasers, Thin films

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Proceedings Article | 8 July 2019 Paper

Study on IR laser smoothing of ground surface on fused silica

Zhigang Yuan, Yaguo Li, Du Wang, Ting Tan, Huiliang Jin, Qinghua Zhang, Jian Wang, Qiao Xu

Proceedings Volume 11063, 1106316 (2019) https://doi.org/10.1117/12.2539935

KEYWORDS: Silica, Laser applications, Laser ablation, Surface finishing, Surface roughness, Glasses

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Proceedings Article | 10 May 2019 Paper

Crack depth uniformity control techniques for large scale fused silica optics in grinding process

Lian Zhou, Nan Zheng, Xianhua Chen, Mincai Liu, Qinghua Zhang, Jian Wang, Jie Li

Proceedings Volume 11068, 1106815 (2019) https://doi.org/10.1117/12.2524151

KEYWORDS: Optical components, Particles, Diamond wheels, Glasses

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In order to improve the overall efficiency of machining and the defect quality of large aperture fused silica optics, it’s necessary to strictly control the crack defects and their depth uniformity in the first grinding process. Firstly, the morphology of three typical defects affecting the uniformity of crack depth was analyzed, which were scattered superficial sand holes, continuous linear defects and dotted linear defects. Then according to the morphology, the causes were investigated and the control techniques were proposed. The scattered superficial sand holes were caused by the large size glass powder, the diamond particles dropped from the grinding wheel and other foreign body impurities in the grinding fluid, which had been squeezed into the surface of the element by the grinding wheel. Through the clean filtration of grinding fluid, the quantity of such defects could be effectively reduced. The continuous linear defects were caused by stress concentration at the two sharp edges of the grinding wheel. Arcing the two sides of wheel could reduce the machining stress at the edges and avoid the occurrence of continuous linear defects. The dotted linear defects were caused by the stress concentration of the grooves on the surface of the wheel during grinding. After optimizing the dressing parameters to reduce the dressing force and avoid the grains of dressing wheel being embedded into the grinding wheel surface, all the grooves on the wheel surface and all the dashed line defects on the element surface disappeared practically. At the last, after integrating all the above control techniques, the grinding experiment of large scale fused silica optics was carried out. The scattered superficial sand holes, continuous linear defects and dotted linear defects on the surface of element after grinding were obviously alleviated. The crack depth of the whole aperture was between 4μm and 7μm. All the results indicated that the control techniques were efficacious.

Proceedings Article | 6 February 2019 Paper

Computer-aided NC programming system for large scale and off-axis aspheric optics in parallel grinding

L. Zhou, Q. Wei, S. Zhao, Q. Zhang, J. Wang, Q. Xu

Proceedings Volume 10842, 108420V (2019) https://doi.org/10.1117/12.2504960

KEYWORDS: Aspheric lenses, Computer programming, Computing systems, Aspheric optics, Human-machine interfaces

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Proceedings Article | 5 March 2018 Paper

Investigation on filter method for smoothing spiral phase plate

Yuanhang Zhang, Shenglin Wen, Zijian Luo, Caixue Tang, Hao Yan, Chunlin Yang, Mincai Liu, Qinghua Zhang, Jian Wang

Proceedings Volume 10710, 1071040 (2018) https://doi.org/10.1117/12.2317625

KEYWORDS: Spiral phase plates, Optical filters, Spatial filters, Gaussian filters, Optical vortices, Gaussian beams, Polishing, Systems modeling, Linear filtering, Optical design

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Proceedings Article | 5 March 2018 Paper

Research on precision grinding technology of large scale and ultra thin optics

Lian Zhou, Qiancai Wei, Jie Li, Xianhua Chen, Qinghua Zhang

Proceedings Volume 10710, 107102Y (2018) https://doi.org/10.1117/12.2317469

KEYWORDS: Adaptive optics, Optics manufacturing, Optical components, Optical testing, Sensors

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Showing 5 of 13 publications

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