Dr. Reinhard März Profile

Dr. Reinhard März

at JCMwave GmbH

SPIE Involvement:

Author

Proceedings Article | 5 April 2011 Paper

Rerouting and guided-repair strategies to resolve lithography hotspots

Reinhard März, Kai Peter, Kay Engelhardt

Proceedings Volume 7974, 79740R (2011) https://doi.org/10.1117/12.879237

KEYWORDS: Lithography, Metals, Design for manufacturing, Analog electronics, Polishing, Multilayers, Pollution control, Manufacturing, Americium, Design for manufacturability

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Proceedings Article | 4 March 2008 Paper

A routing clean-up methodology for improvement of defect and lithography related yield

Jacques Herry, Reinhard März, Hanno Melzner, Kai Peter, Olivier Rizzo

Proceedings Volume 6925, 69250J (2008) https://doi.org/10.1117/12.770292

KEYWORDS: Metals, Lithography, Connectors, Virtual colonoscopy, Design for manufacturing, Yield improvement, Optics manufacturing, Manufacturing, Antennas, Particles

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Proceedings Article | 4 March 2008 Paper

ACLV- and process-window-aware extraction of transistor parameters using litho-friendly design (LfD) methodologies

Reinhard März, Kai Peter, Monika Gschöderer, Eduard Ratai, Alexander Nielsen, Sascha Siegler, Rosi Deppe, Anton Huber

Proceedings Volume 6925, 692510 (2008) https://doi.org/10.1117/12.771885

KEYWORDS: Transistors, Field effect transistors, Calibration, Lithography, Chemical mechanical planarization, Resolution enhancement technologies, Doping, Analog electronics, Cadmium, Silicon

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Proceedings Article | 21 March 2007 Paper

Hardware verification of litho-friendly design (LfD) methodologies

Reinhard März, Kai Peter, Sonja Gröndahl, Klaus Keiner, Byoung Il Choi, Shyue Fong Quek, Mei Chun Yeo, Nan Shu Chen, Soo Muay Goh

Proceedings Volume 6521, 65210M (2007) https://doi.org/10.1117/12.713995

KEYWORDS: Calibration, Process modeling, Lithography, Resolution enhancement technologies, Design for manufacturing, Semiconducting wafers, Prototyping, 3D modeling, Scanning electron microscopy, Printing

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Proceedings Article | 20 October 2006 Paper

Litho-friendly design (LfD) methodologies applied to library cells

Kai Peter, Reinhard März, Sonja Gröndahl, Wilhelm Maurer

Proceedings Volume 6349, 63490E (2006) https://doi.org/10.1117/12.687546

KEYWORDS: Photovoltaics, Process modeling, Lithography, Optical proximity correction, Design for manufacturing, Databases, Resolution enhancement technologies, Silicon, Solar cells, Model-based design

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Proceedings Article | 20 October 2006 Paper

Rigorous simulation of 3D masks

Sven Burger, Roderick Köhle, Lin Zschiedrich, Hoa Nguyen, Frank Schmidt, Reinhard März, Christoph Nölscher

Proceedings Volume 6349, 63494Z (2006) https://doi.org/10.1117/12.687816

KEYWORDS: Finite element methods, Chemical elements, Photomasks, Computer simulations, Lithography, Image processing, Diffraction, Polarization, Airborne remote sensing, Photoresist processing

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Proceedings Article | 21 June 2006 Paper

ORC and LfD as first steps towards DfM

Reinhard März, Kai Peter, Wilhelm Maurer

Proceedings Volume 6281, 62810I (2006) https://doi.org/10.1117/12.692641

KEYWORDS: Lithography, Photomasks, Process modeling, SRAF, Optical proximity correction, Design for manufacturing, Polishing, Design for manufacturability, Cadmium sulfide, Mask making

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Proceedings Article | 2 March 2006 Paper

Photonic crystal waveguide-based dispersion compensators

M. Kamp, J. Zimmermann, S. Anand, R. März, A. W. Forchel

Proceedings Volume 6123, 61230Y (2006) https://doi.org/10.1117/12.646172

KEYWORDS: Waveguides, Dispersion, Resonators, Mirrors, Photonic crystals, Etching, Phase shifts, Modulation, Network security, Picosecond phenomena

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Proceedings Article | 5 November 2005 Paper

Benchmark of FEM, waveguide, and FDTD algorithms for rigorous mask simulation

Sven Burger, Roderick Köhle, Lin Zschiedrich, Weimin Gao, Frank Schmidt, Reinhard März, Christoph Nölscher

Proceedings Volume 5992, 599216 (2005) https://doi.org/10.1117/12.631696

KEYWORDS: Finite element methods, Photomasks, Computer simulations, Diffraction, Finite-difference time-domain method, Polarization, Chemical elements, Solids, Waveguides, Lithography

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Proceedings Article | 25 March 2005 Paper

Low-loss InP-based photonic crystal waveguides and resonators

Martin Kamp, Joerg Zimmermann, Reinhard Maerz, Srinivasan Anand, Alfred Forchel

Proceedings Volume 5729, (2005) https://doi.org/10.1117/12.590770

KEYWORDS: Waveguides, Resonators, Dispersion, Polarization, Mirrors, Photonic crystals, Heterojunctions, Light wave propagation, Phase shifts, Waveguide modes

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Proceedings Article | 25 October 2004 Paper

High-contrast planar photonic crystals

Reinhard Marz, Sven Burger, Alfred Forchel, Helmut Heidrich, Ortwin Hess, Dirk Michaelis, Klaus Wandel, Ralph Wehrspohn

Proceedings Volume 5597, (2004) https://doi.org/10.1117/12.580070

KEYWORDS: Photonic crystals, Nanophotonics, Waveguides, Optical networks, Instrument modeling, Systems modeling, Etching, Optimization (mathematics), Dispersion, Fiber lasers

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Proceedings Article | 9 July 2004 Paper

Integration of active and passive photonic-crystal-based optoelectronic components

Sven Mahnkopf, Martin Kamp, Reinhard Marz, Guang-Hua Duan, Veronique Colson, Alfred Forchel

Proceedings Volume 5360, (2004) https://doi.org/10.1117/12.528308

KEYWORDS: Photonic crystals, Waveguides, Tunable lasers, Diodes, Resonators, Reflectivity, Channel waveguides, Mirrors, Wavelength division multiplexing, Image segmentation

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Proceedings Article | 6 August 1998 Paper

PHOTONET: a field trial demonstrating WDM cross-connected networks

M. Bischoff, Reinhard Maerz, Michael Lehdorfer, Dieter Werner, Piet Kuindersma, Bernhard Hein, Waltraud Muellner, Teresa Almeida, Michael Rasztovits-Wiech, Bart van Canegem, Clemens von Helmolt

Proceedings Volume 3552, (1998) https://doi.org/10.1117/12.318048

KEYWORDS: Phased array optics, Wavelength division multiplexing, Networks, Optical networks, Multiplexers, Dispersion, Channel projecting optics, Optical amplifiers, Switching, Optical fibers

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Proceedings Article | 20 September 1996 Paper

Dense wavelength division multiplex: research activities at Siemens

Reinhard Maerz

Proceedings Volume 2893, (1996) https://doi.org/10.1117/12.252066

KEYWORDS: Dense wavelength division multiplexing, Phased array optics, Receivers, Optical amplifiers, Optical filters, Integrated optics, Wavelength division multiplexing, Multiplexers, Channel projecting optics, Phased arrays

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Proceedings Article | 1 May 1996 Paper

Computer-aided engineering for integrated optics

Reinhard Maerz

Proceedings Volume 2693, (1996) https://doi.org/10.1117/12.238984

KEYWORDS: Waveguides, Beam propagation method, Integrated optics, Computer aided design, Wave propagation, Dielectrics, Solid modeling, Photonic integrated circuits, Instrument modeling, Process modeling

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Proceedings Article | 25 August 1994 Paper

Results of benchmark tests for different numerical BPM algorithms

Hans Nolting, Reinhard Maerz

Proceedings Volume 2212, (1994) https://doi.org/10.1117/12.185120

KEYWORDS: Beam propagation method, Wave propagation, Waveguides, Refractive index, Modeling, Computing systems, Dispersion, Interfaces, Chemical elements, Integrated optics

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Showing 5 of 16 publications

SPIE Conference Volume | 6 August 1998

Fiber Optic Components and Optical Communication II

Conference Committee Involvement (3)

Integrated Optics: Devices, Materials, and Technologies X

23 January 2006 | San Jose, California, United States

Integrated Optics: Devices, Materials, and Technologies IX

24 January 2005 | San Jose, California, United States

Fiber Optic Components and Optical Communication II

18 September 1998 | Beijing, China

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