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Romain Alestra
at STMicroelectronics SA
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Author
Publications (1)
Proceedings Article | 28 April 2023 Poster + Paper
Robust and automated methodology for scanner matching using contour-based analysis
Proceedings Volume 12494, 1249412 (2023) https://doi.org/10.1117/12.2657686
KEYWORDS: Scanners, Light sources and illumination, Semiconducting wafers, Contour extraction, Image filtering, Lithography, Automation, Scanning electron microscopy
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