This paper presents an overview of technologies of MEMS Cs microcells for CPT-based atomic clocks, obtained in FEMTO-ST Institute over the last decade. We discuss the challenges in microfabrication of miniature cells: the different configurations of cells, two methods for filling alkali vapor cells with Cs from a dispenser pill and from the dispensing paste, and a study on the permeability of our microcells to the buffer gas limiting the sealing performances. Finally, we report on the aging tests and resulting short-term and long-term clock stability measurements.
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