Dr. Sylwester Bargiel Profile

Dr. Sylwester Bargiel

Research eng. at FEMTO-ST

SPIE Involvement:

Author

Publications (24)

Proceedings Article | 15 March 2024 Paper

Layer transfer technique of epitaxial rutile TiO2 thin films for photonic applications

Sabina Kuprenaite, Sylwester Bargiel, Pascal Boulet, Samuel Margueron, Ausrine Bartasyte

Proceedings Volume 12887, 128870H (2024) https://doi.org/10.1117/12.3013506

KEYWORDS: Zinc oxide, Heterojunctions, Titanium dioxide, Reflection, Film thickness, Thin films, Wafer bonding, Surface roughness, Sapphire

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Proceedings Article | 1 March 2019 Presentation + Paper

Advanced microfabrication technologies for miniature caesium vapor cells for atomic clocks

C. Gorecki, V. Maurice, R. Boudot, S. Bargiel, N. Passilly, R. Chutani, R. Vicarini, S. Galliou

Proceedings Volume 10934, 109342F (2019) https://doi.org/10.1117/12.2506225

KEYWORDS: Cesium, Glasses, Clocks, Atomic clocks, Silicon, Semiconducting wafers, Microfabrication, Neon, Vertical cavity surface emitting lasers, Metrology

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Proceedings Article | 7 September 2018 Paper

MOEMS-based imaging probe with integrated Mirau micro-interferometer and MEMS microscanner for swept-source OCT endomicroscopy

C. Gorecki, P. Struk, S. Bargiel, Q. Tanguy, N. Passilly

Proceedings Volume 10834, 108340M (2018) https://doi.org/10.1117/12.2319084

KEYWORDS: Microelectromechanical systems, Optical coherence tomography, Microopto electromechanical systems, Interferometry, Mirau interferometers, Scanners, Objectives, GRIN lenses, Glasses, Endomicroscopy

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Proceedings Article | 24 May 2018 Presentation + Paper

The SS-OCT endomicroscopy probe based on MOEMS Mirau micro-interferometer for early stomach cancer detection

Przemyslaw Struk, Sylwester Bargiel, Quentin A. Tanguy, Christophe Gorecki, Huikai Xie, Ravinder Chutani, Nicolas Passilly, Alain Billard

Proceedings Volume 10678, 1067807 (2018) https://doi.org/10.1117/12.2311298

KEYWORDS: Microopto electromechanical systems, Optical coherence tomography, Scanners, Micromirrors, Stomach, Microelectromechanical systems, Glasses, Endomicroscopy, Cancer, GRIN lenses

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Proceedings Article | 24 May 2018 Paper

Micro Glass Blowing platform for microfabrication of microoptical components

C. Gorecki, J. Vincente Carrion, N. Passilly, S. Bargiel

Proceedings Volume 10678, 1067814 (2018) https://doi.org/10.1117/12.2311305

KEYWORDS: Axicons, Glasses, Bessel beams, Silicon, Semiconducting wafers, Microfabrication, Micromachining, Wafer bonding, Fabrication, Microlens

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Proceedings Article | 27 April 2016 Paper

Wafer-level fabrication of arrays of glass lens doublets

Nicolas Passilly, Stéphane Perrin, Jorge Albero, Johann Krauter, Olivier Gaiffe, Ludovic Gauthier-Manuel, Luc Froehly, Justine Lullin, Sylwester Bargiel, Wolfgang Osten, Christophe Gorecki

Proceedings Volume 9888, 98880T (2016) https://doi.org/10.1117/12.2228833

KEYWORDS: Optical components, Polishing, Micro optics, Glasses, Optical aberrations, Semiconducting wafers, Microlens

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Systems for imaging require to employ high quality optical components in order to dispose of optical aberrations and thus reach sufficient resolution. However, well-known methods to get rid of optical aberrations, such as aspherical profiles or diffractive corrections are not easy to apply to micro-optics. In particular, some of these methods rely on polymers which cannot be associated when such lenses are to be used in integrated devices requiring high temperature process for their further assembly and separation. Among the different approaches, the most common is the lens splitting that consists in dividing the focusing power between two or more optical components. In here, we propose to take advantage of a wafer-level technique, devoted to the generation of glass lenses, which involves thermal reflow in silicon cavities to generate lens doublets. After the convex lens sides are generated, grinding and polishing of both stack sides allow, on the first hand, to form the planar lens backside and, on the other hand, to open the silicon cavity. Nevertheless, silicon frames are then kept and thinned down to form well-controlled and auto-aligned spacers between the lenses. Subsequent accurate vertical assembly of the glass lens arrays is performed by anodic bonding. The latter ensures a high level of alignment both laterally and axially since no additional material is required. Thanks to polishing, the generated lens doublets are then as thin as several hundreds of microns and compatible with micro-opto-electro-systems (MOEMS) technologies since they are only made of glass and silicon. The generated optical module is then robust and provide improved optical performances. Indeed, theoretically, two stacked lenses with similar features and spherical profiles can be almost diffraction limited whereas a single lens characterized by the same numerical aperture than the doublet presents five times higher wavefront error. To demonstrate such assumption, we fabricated glass lens doublets and compared them to single lenses of equivalent focusing power. For similar illumination, the optical aberrations are significantly reduced.

Proceedings Article | 26 April 2016 Paper

Vertical comb-drive microscanner with 4x4 array of micromirrors for phase-shifting Mirau microinterferometry

Sylwester Bargiel, Justine Lullin, Patrice Lemoal, Stéphane Perrin, Nicolas Passilly, Jorge Albero, Luc Froehly, Franck Lardet-Vieudrin, Christophe Gorecki

Proceedings Volume 9890, 98900D (2016) https://doi.org/10.1117/12.2230487

KEYWORDS: Micromirrors, Silicon, Interferometry, Optical coherence tomography, Phase shifts, Microopto electromechanical systems, Microactuators, Phase shifting, Mirau interferometers, Semiconducting wafers, Photomasks, Etching

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Proceedings Article | 26 April 2016 Paper

Array-type miniature interferometer as the core optical microsystem of an optical coherence tomography device for tissue inspection

Nicolas Passilly, Stéphane Perrin, Justine Lullin, Jorge Albero, Sylwester Bargiel, Luc Froehly, Christophe Gorecki, Johann Krauter, Wolfgang Osten, Wei-Shan Wang, Maik Wiemer

Proceedings Volume 9890, 98900C (2016) https://doi.org/10.1117/12.2229477

KEYWORDS: Skin, Microopto electromechanical systems, Optical coherence tomography, Microsystems, Mirrors, Silicon, Semiconducting wafers, Beam splitters

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Proceedings Article | 26 April 2016 Paper

Vertical integration of array-type miniature interferometers at wafer level by using multistack anodic bonding

Wei-Shan Wang, Maik Wiemer, Joerg Froemel, Tom Enderlein, Thomas Gessner, Justine Lullin, Sylwester Bargiel, Nicolas Passilly, Jorge Albero, Christophe Gorecki

Proceedings Volume 9890, 989011 (2016) https://doi.org/10.1117/12.2229884

KEYWORDS: Semiconducting wafers, Interferometers, Microelectromechanical systems, Microlens, Mirau interferometers, Wafer bonding, Microopto electromechanical systems, Optical coherence tomography, Scanners, Beam splitters, Laser cutting, Gold, Glasses

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Proceedings Article | 27 February 2015 Paper

Technological platform for vertical multi-wafer integration of miniature imaging instruments

S. Bargiel, M. Baranski, N. Passilly, C. Gorecki, M. Wiemer, J. Frömel, D. Wünsch, W. Wang

Proceedings Volume 9375, 93750L (2015) https://doi.org/10.1117/12.2078007

KEYWORDS: Glasses, Silicon, Microlens, Semiconducting wafers, Wafer-level optics, Confocal microscopy, Etching, Microscopes, Microopto electromechanical systems, Beam splitters

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Proceedings Article | 27 February 2015 Paper

Multi-wafer bonding technology for the integration of a micromachined Mirau interferometer

Wei-Shan Wang, Justine Lullin, Joerg Froemel, Maik Wiemer, Sylwester Bargiel, Nicolas Passilly, Christophe Gorecki, Thomas Gessner

Proceedings Volume 9375, 93750P (2015) https://doi.org/10.1117/12.2077641

KEYWORDS: Semiconducting wafers, Wafer bonding, Interfaces, Mirau interferometers, Microopto electromechanical systems, Microlens, Glasses, Silicon, Optical coherence tomography, Wafer-level optics

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Proceedings Article | 18 August 2014 Paper

Simple setup for optical characterization of microlenses

Stephane Perrin, Maciej Baranski, Nicolas Passilly, Luc Froehly, Jorge Albero, Sylwester Bargiel, Christophe Gorecki

Proceedings Volume 9204, 92040D (2014) https://doi.org/10.1117/12.2061299

KEYWORDS: Microlens, Modulation transfer functions, Imaging systems, Optical components, Microscopes, Objectives, Molybdenum, Wavefronts, 3D metrology, Etching

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Proceedings Article | 2 May 2014 Paper

Arrays of millimeter-sized glass lenses for miniature inspection systems

J. Albero, S. Perrin, S. Bargiel, M. Baranski, N. Passilly, L. Gauthier-Manuel, C. Gorecki

Proceedings Volume 9130, 91300U (2014) https://doi.org/10.1117/12.2051043

KEYWORDS: Glasses, Microlens, Silicon, Lenses, Inspection, Semiconducting wafers, Fabrication, Matrices, Microlens array, Deep reactive ion etching

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Proceedings Article | 1 May 2014 Paper

Optical design of a vertically integrated array-type Mirau-based OCT system

J. Krauter, T. Boettcher, W. Lyda, W. Osten, N. Passilly, L. Froehly, S. Bargiel, J. Albero, S. Perrin, J. Lullin, C. Gorecki

Proceedings Volume 9132, 91320L (2014) https://doi.org/10.1117/12.2054573

KEYWORDS: Optical coherence tomography, Interferometers, Optical design, Skin, Beam splitters, Sensors, Cameras, Imaging systems, Electroluminescent displays, Tissue optics

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Proceedings Article | 1 May 2014 Paper

Metrology of micro-optical components quality using direct measurement of 3D intensity point spread function

Maciej Baranski, Stephane Perrin, Nicolas Passilly, Luc Froehly, Sylwester Bargiel, Jorge Albero, Christophe Gorecki

Proceedings Volume 9132, 913216 (2014) https://doi.org/10.1117/12.2051122

KEYWORDS: 3D metrology, Optical components, Objectives, Imaging systems, Point spread functions, Microscopes, Cameras, Microlens, CMOS cameras, High dynamic range imaging

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Proceedings Article | 13 March 2013 Paper

3D micro-optical lens scanner made by multi-wafer bonding technology

S. Bargiel, C. Gorecki, M. Barański, N. Passilly, M. Wiemer, C. Jia, J. Frömel

Proceedings Volume 8616, 861605 (2013) https://doi.org/10.1117/12.2002422

KEYWORDS: Microlens, Glasses, Silicon, Semiconducting wafers, 3D scanning, Wafer bonding, Scanners, Microactuators, Microscopes, Ceramics

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Proceedings Article | 13 September 2012 Paper

Micromachined array-type Mirau interferometer for MEMS metrology

C. Gorecki, S. Bargiel, J. Albero, N. Passilly, M. Kujawinska, U. Zeitner

Proceedings Volume 8494, 849403 (2012) https://doi.org/10.1117/12.932226

KEYWORDS: Semiconducting wafers, Microelectromechanical systems, Mirau interferometers, Interferometry, Glasses, Microlens, Interferometers, Micromirrors, Beam splitters, Inspection

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Proceedings Article | 14 May 2010 Paper

Simulation and in-plane movement characterization of 2D MEMS platform

Jerzy Krężel, Karolina Laszczyk, Sylwester Bargiel, Christophe Gorecki, Małgorzata Kujawińska, Olivier Parriaux, Svetlen Tonchev

Proceedings Volume 7718, 77180H (2010) https://doi.org/10.1117/12.855747

KEYWORDS: Microelectromechanical systems, Diffraction gratings, Phase shifts, Optical design, Interferometry, Picosecond phenomena, Actuators, Silicon, Sensors, Phase shifting

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Proceedings Article | 14 May 2010 Paper

Next-generation test equipment for micro-production

Kay Gastinger, Lars Johnsen, Malgorzata Kujawinska, Michal Jozwik, Uwe Zeitner, Peter Dannberg, Jorge Albero, Sylwester Bargiel, Christoph Schaeffel, Stephan Beer, Rudolf Moosburger, Patrick Lambelet, Marco Pizzi

Proceedings Volume 7718, 77180F (2010) https://doi.org/10.1117/12.855087

KEYWORDS: Semiconducting wafers, Interferometers, Inspection, Imaging systems, Cameras, Mirrors, Lithium, Glasses, Wafer-level optics, Diffraction gratings

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Proceedings Article | 14 May 2010 Paper

Integrated glass lenses fabrication for parallel interferometric inspection systems of MEMS and MOEMS

Jorge Albero, Sylwester Bargiel, Christophe Gorecki, Kay Gastinger

Proceedings Volume 7716, 771621 (2010) https://doi.org/10.1117/12.853907

KEYWORDS: Silicon, Glasses, Etching, Microlens, Inspection, Semiconducting wafers, Interferometers, Interferometry, Anisotropic etching, Spherical lenses

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Proceedings Article | 19 May 2009 Paper

Silicon comb-drive X-Y microstage with frame-in-the-frame architecture for MOEMS applications

Karolina Laszczyk, Sylwester Bargiel, Jerzy Krężel, Christophe Gorecki, Małgorzata Kujawińska

Proceedings Volume 7362, 736210 (2009) https://doi.org/10.1117/12.821460

KEYWORDS: Silicon, Electrodes, Actuators, Deep reactive ion etching, Bridges, Photoresist materials, Chromium, Microopto electromechanical systems, Microlens, Microscopes

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Proceedings Article | 21 April 2006 Paper

New generation of fully integrated optical microscopes on-chip: application to confocal microscope

Sylwester Bargiel, Lukasz Nieradko, Michal Józwik, Christophe Gorecki, Jan Dziuban

Proceedings Volume 6186, 618602 (2006) https://doi.org/10.1117/12.663770

KEYWORDS: Microlens, Silicon, Microscopes, Glasses, Confocal microscopy, Vertical cavity surface emitting lasers, 3D scanning, Etching, Actuators, Microopto electromechanical systems

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Proceedings Article | 22 September 2003 Paper

Microfluidic detectors for u-TAS

Anna Gorecka-Drzazga, Jan Dziuban, Sylwester Bargiel

Proceedings Volume 5124, (2003) https://doi.org/10.1117/12.517115

KEYWORDS: Sensors, Silicon, Luminescence, Electrodes, Microfluidics, Glasses, Electronics, Standards development, Wheatstone bridges, Microsystems

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Proceedings Article | 13 December 2001 Paper

Electro-optical circuit boards with four-channel butt-coupled optical transmitter and receiver modules

Andreas Himmler, S. Bargiel, F. Ebling, Henning Schroeder, H. Franke, G. Spickermann, Elmar Griese, C. Lehnberger, L. Oberender, Andre Koske, Gerd Mrozynski, D. Steck, E. Strake, Walter Suellau

Proceedings Volume 4455, (2001) https://doi.org/10.1117/12.450442

KEYWORDS: Waveguides, Receivers, Transmitters, Diodes, Optics manufacturing, Manufacturing, Polymers, Channel waveguides, Optical interconnects, Hybrid circuits

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Showing 5 of 24 publications

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