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Stephen F. Sporer
Senior Mechanical Engineer at Coherent Integrated Optical Systems
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Publications (4)
Proceedings Article | 5 August 2010 Paper
Tinsley progress on stress mirror polishing (SMP) for the Thirty Meter Telescope (TMT) primary mirror segments II
Jay Daniel, Ulrich Mueller, Tracy Peters, Stephen Sporer, Tony Hull
Proceedings Volume 7733, 773328 (2010) https://doi.org/10.1117/12.857931
KEYWORDS: Mirrors, Telescopes, Space telescopes, Polishing, Photovoltaics, Neodymium, Optical fabrication, Aspheric lenses, Surface finishing, Thirty Meter Telescope
Proceedings Article | 26 June 2006 Paper
TMT: stressed mirror polishing fixture study
Proceedings Volume 6267, 62672R (2006) https://doi.org/10.1117/12.693114
KEYWORDS: Polishing, Mirrors, Finite element methods, Surface finishing, Monochromatic aberrations, Zerodur, Actuators, Ion beam finishing, Sensors, Thirty Meter Telescope
Proceedings Article | 24 March 2006 Paper
EUV optical system for the reticle imaging microscope (RIM)
H. Glatzel, J. Daniel, K. Khajehnouri, U. Mueller, T. Roff, J. Rosenbohm, S. Sporer
Proceedings Volume 6151, 615130 (2006) https://doi.org/10.1117/12.677199
KEYWORDS: Mirrors, Extreme ultraviolet, Imaging systems, Microscopes, Surface finishing, Atomic force microscopy, Reticles, Optical coatings, Wavefronts, Polishing
Proceedings Article | 6 May 2005 Paper
Characterization of prototype optical surfaces and coatings for the EUV reticle imaging microscope
Proceedings Volume 5751, (2005) https://doi.org/10.1117/12.619290
KEYWORDS: Optical coatings, Reflectivity, Photovoltaics, Extreme ultraviolet, Microscopes, Reticles, Light scattering, Mirrors, Atomic force microscopy, Prototyping
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