Mr. Steven N. Wong Profile

Steven N. Wong

Optical Engineer at Coherent Integrated Optical Systems

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Publications (2)

Proceedings Article | 6 May 2005 Paper

Characterization of prototype optical surfaces and coatings for the EUV reticle imaging microscope

H. Glatzel, J. Daniel, K. Khajehnouri, T. Roff, S. Sporer, S. Wong, M. Kriese, Y. Platonov, J. Rodriguez

Proceedings Volume 5751, (2005) https://doi.org/10.1117/12.619290

KEYWORDS: Optical coatings, Reflectivity, Photovoltaics, Extreme ultraviolet, Microscopes, Reticles, Light scattering, Mirrors, Atomic force microscopy, Prototyping

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Proceedings Article | 21 January 1993 Paper

Compensation for 6.5-K cryogenic distortion of a fused quartz mirror by refiguring

Gordon Augason, Jeffrey Young, Ramsey Melugin, Dana Clarke, Steven Howard, Michael Scanlan, Steven Wong, Kenneth Lawton

Proceedings Volume 1765, (1993) https://doi.org/10.1117/12.140885

KEYWORDS: Mirrors, Distortion, Cryogenics, Copper, Interferometers, Sensors, Temperature sensors, Spherical lenses, Fused quartz, Optical testing

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