Mr. Tadashi Hatanaka Profile

Tadashi Hatanaka

at Nissan Chemical Industries Ltd

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Publications (2)

Proceedings Article | 14 May 2004 Paper

Wet developable bottom anti-reflective coatings

Tadashi Hatanaka, Shigeo Kimura, Tomoyuki Enomoto, Yasuyuki Nakajima

Proceedings Volume 5376, (2004) https://doi.org/10.1117/12.534654

KEYWORDS: Photoresist materials, Reflectivity, Silicon, Photoresist developing, Ions, Doping, Coating, Semiconducting wafers, Photomasks, Bottom antireflective coatings

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Proceedings Article | 14 May 2004 Paper

Thin film and high-etch-rate type 248-nm bottom antireflective coatings

Tomoyuki Enomoto, Satoshi Takei, Takahiro Kishioka, Tadashi Hatanaka, Rikimaru Sakamoto, Yasuyuki Nakajima

Proceedings Volume 5376, (2004) https://doi.org/10.1117/12.534653

KEYWORDS: Reflectivity, Photoresist materials, Etching, Silicon, Semiconducting wafers, Plasma etching, Oxides, Bottom antireflective coatings, Thin films, Reflection

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