Takanobu Okamoto
at Nikon Corp
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 22 February 2021 Poster + Presentation + Paper
Satoshi Ando, Haruki Saito, Sayuri Tanaka, Tetsuya Kawata, Takanobu Okamoto, Katsushi Makino, Yuji Shiba, Takehisa Yahiro, Jun Ishikawa, Masahiro Morita
Proceedings Volume 11611, 116112S (2021) https://doi.org/10.1117/12.2583695
KEYWORDS: Optical alignment, Metrology, Lithography, Calibration, Distortion, Semiconducting wafers, Overlay metrology, Scanners

Proceedings Article | 24 March 2017 Paper
Proceedings Volume 10147, 1014716 (2017) https://doi.org/10.1117/12.2257659
KEYWORDS: Semiconducting wafers, Optical alignment, Lithography, Manufacturing, Chemical mechanical planarization, Precision measurement, Overlay metrology, Distortion, Optical parametric oscillators, Systems modeling, 3D modeling

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