Mr. Wei Gan Profile

Wei Gan

at New Ray Mask Technology Corp

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Publications (1)

Proceedings Article | 20 November 2024 Poster + Paper

Innovative Cr shrinking to improve tritone mask process and inspectability

Decai Liao, Wei Gan, Zhengzhou Tian, Zijun Zhong, Ren Bao, Haiming Ge, Shizhang Zhuang, Tianguo Deng, Yanghui Liu

Proceedings Volume 13216, 132162A (2024) https://doi.org/10.1117/12.3034582

KEYWORDS: Chromium, Design, Inspection, Scanning electron microscopy, Manufacturing, Neodymium, Particles, Defect inspection, Defect detection, Semiconducting wafers

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