Dr. Weijie Wang Profile

Dr. Weijie Wang

at Bruker Nano Inc

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Publications (3)

Proceedings Article | 13 June 2022 Presentation

Resist shrink characterization methodology for more accurate CD metrology

Mary Breton, Karen Petrillo, Jennifer Church, Luciana Meli, Jennifer Fullam, Stuart Sieg, Romain Lallement, Nelson Felix, Shimon Levi, Susan Zollinger, Felix Levitov, Sean Hand, Jason Osborne, Weijie Wang

Proceedings Volume PC12053, PC120530C (2022) https://doi.org/10.1117/12.2614219

KEYWORDS: Critical dimension metrology, Metrology, Scanning electron microscopy, Photoresist materials, Optical proximity correction, Process modeling, Data modeling, Photomasks, Lithography, Extreme ultraviolet lithography

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Proceedings Article | 2 April 2020 Presentation + Paper

AFM characterization for Gate-All-Around (GAA) devices

Mary Breton, Jennifer Fullam, Dexin Kong, Daniel Schmidt, Andrew Greene, Julien Frougier, Sean Hand, Jason Osborne, Weijie Wang, David Fey

Proceedings Volume 11325, 1132514 (2020) https://doi.org/10.1117/12.2551931

KEYWORDS: Atomic force microscopy, Metrology, Transmission electron microscopy, Gallium arsenide, 3D metrology, Measurement devices, Scanning electron microscopy, Semiconducting wafers, Visualization, X-ray optics

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Proceedings Article | 20 March 2020 Presentation + Paper

Line top loss and line top roughness characterizations of EUV resists

D. Schmidt, K. Petrillo, M. Breton, J. Fullam, S. Hand, J. Osborne, W. Wang, D. Fey

Proceedings Volume 11325, 113250T (2020) https://doi.org/10.1117/12.2551623

KEYWORDS: Line edge roughness, Metrology, Atomic force microscopy, Extreme ultraviolet, Semiconducting wafers, Scatterometry, Critical dimension metrology, Stochastic processes, Calibration, Scanning electron microscopy

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