Dr. Wenmei Ming Profile

Dr. Wenmei Ming

at Onto Innovation Inc

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Author

Publications (3)

Proceedings Article | 26 May 2022 Presentation + Paper

Novel inline on-device measurement of silicon nitride lateral recess post channel hole ACI with IRCD metrology

Nick Keller, Wenmei Ming, Zhuo Chen, G. Andrew Antonelli, Troy Ribaudo, Zhuan Liu, Sadao Takabayashi, John Hauck, Joshua Frederick, Dan Engelhard

Proceedings Volume 12053, 120530T (2022) https://doi.org/10.1117/12.2618035

KEYWORDS: Silicon, Etching, Metrology, Semiconducting wafers, Mid-IR, Diffractive optical elements, Silica, Scattering, Critical dimension metrology, Absorption

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Proceedings Article | 22 February 2021 Presentation + Paper

Ellipsometric critical dimension metrology employing mid-infrared wavelengths for high-aspect-ratio channel hole module etch processes

G. Andrew Antonelli, Nick Keller, Troy Ribaudo, Franklin Wong, Wenmei Ming, Hepeng Ding, Zhuo Chen, Ross Grynko, Ahmad Fumani, Zhuan Liu, Sadao Takabayashi, John Hauck, Joshua Frederick, Dan Engelhard, Bo Hui Ng, Biow Hiem Ong, Luey Chwan Liong

Proceedings Volume 11611, 116111O (2021) https://doi.org/10.1117/12.2583786

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Proceedings Article | 22 February 2021 Presentation + Paper

Methods to overcome limited labeled data sets in machine learning-based optical critical dimension metrology

Franklin Wong, Yudong Hao, Wenmei Ming, Petar Žuvela, Peifen Teh, Jingsheng Shi, Jie Li

Proceedings Volume 11611, 116111P (2021) https://doi.org/10.1117/12.2583774

KEYWORDS: Metrology, Machine learning, Signal processing, Semiconductors, Data modeling, Time metrology, Data processing

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