Mr. Xianyu Wu Profile

Xianyu Wu

at Univ of Shanghai for Science and Technology

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Publications (3)

Proceedings Article | 19 December 2022 Poster + Paper

Simulation verification for the cause of overlapped interference fringes in homogeneity measurement of quartz substrate

Xianyu Wu, Sen Han, Xianhao Qi, Jun Cheng, Bo Zhang, Xuefeng Zeng, Xiao Luo

Proceedings Volume 12319, 123191D (2022) https://doi.org/10.1117/12.2643369

KEYWORDS: Quartz, Beam expanders, Beam splitters, Wavefronts, Interferometers, Photomasks, Optical components, Fizeau interferometers, Collimation, Zemax

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Proceedings Article | 19 December 2022 Poster + Paper

Research on interferometric inspection of surface topography of ring elements

Jun Cheng, Sen Han, Xiaoyue Bian, Xianyu Wu, Xianhao Qi, Linghua Zhang, Qiang Cheng

Proceedings Volume 12319, 123191F (2022) https://doi.org/10.1117/12.2643403

KEYWORDS: Inspection, Interferometers, Interferometry, Technology, Spherical lenses, Design and modelling, Optical components, Equipment, Mirrors, Metals

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Proceedings Article | 19 December 2022 Poster + Paper

Simulation research of illumination system with coherent noise suppression

Xianhao Qi, Sen Han, Linghua Zhang, Xianyu Wu, Jun Cheng, Erhui Qi, Haixiang Hu

Proceedings Volume 12319, 123191A (2022) https://doi.org/10.1117/12.2642907

KEYWORDS: Light sources, Scattering, Interferometry, Interferometers, Light scattering, Fizeau interferometers, Light, Beam splitters, Laser scattering, Sensors

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