Prof. Ya Cheng Profile

Prof. Ya Cheng

Professor at Shanghai Institute of Optics and Fine Mechanics CAS

SPIE Involvement:

Conference Program Committee | Editorial Board Member: Photonics Insights | Author

Publications (42)

Proceedings Article | 13 March 2024 Presentation

Ultrafast laser-assisted manufacture of UV photochemical fused silica microchannel reactors for continuous-flow synthesis of vitamin D3

Jian Xu, Aodong Zhang, Ming Hu, Lingling Xia, Ya Cheng

Proceedings Volume PC12873, PC1287301 (2024) https://doi.org/10.1117/12.3001235

KEYWORDS: Silica, Ultrafast phenomena, Manufacturing, Glasses, Ultraviolet radiation, Laser manufacturing, Etching, Fabrication, Wet etching, Ultraviolet light emitting diodes

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Proceedings Article | 12 March 2024 Presentation + Paper

Soliton optical frequency comb generation from polygon modes in weakly perturbed lithium niobate microdisks

Botao Fu, Jintian Lin, Renhong Gao, Ni Yao, Jianglin Guan, Chuntao Li, Guanghui Zhao, Minghui Li, Ya Cheng

Proceedings Volume 12873, 128730Y (2024) https://doi.org/10.1117/12.3002086

KEYWORDS: Dispersion, Solitons, Whispering gallery modes, Microresonators, Stars, Raman scattering, Optical microcavities, Lithium niobate, Quantum numbers, Frequency combs

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Proceedings Article | 26 November 2023 Paper

The formation of high-Q polygon modes in weakly perturbed microdisks on thin-film lithium niobate and its applications

Jintian Lin, Renhong Gao, Botao Fu, Ni Yao, Jianglin Guan, Chuntao Li, Minghui Li, Guanghui Zhao, Ya Cheng

Proceedings Volume 12775, 1277507 (2023) https://doi.org/10.1117/12.2691722

KEYWORDS: Whispering gallery modes, Solitons, Microresonators, Dispersion, Thin films, Lithium niobate, Raman scattering

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Proceedings Article | 26 November 2023 Poster

Integrated microlasers and optical frequency comb generated from weakly pertubed microdisks on thin-film lithium niobate

Renhong Gao, Jianglin Guan, Chuntao Li, Botao Fu, Jintian Lin, Ya Cheng

Proceedings Volume 12775, 127751O (2023) https://doi.org/10.1117/12.2689823

KEYWORDS: Lithium niobate, Frequency combs, Thin films, Integrated optics, Whispering gallery modes, Solitons, Optical metrology, Optical lithography, Optical communications, Optical coherence

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Proceedings Article | 17 March 2023 Presentation + Paper

Ultra-high-speed high-resolution laser lithography for lithium niobate integrated photonics

Jinming Chen, Zhaoxiang Liu, Lvbin Song, Chao Sun, Guanhua Wang, Ya Cheng

Proceedings Volume 12411, 1241109 (2023) https://doi.org/10.1117/12.2657586

KEYWORDS: Fabrication, Waveguides, Diffraction gratings, Lithography, Diffraction, Photonic integrated circuits, Optical lithography

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Proceedings Article | 17 March 2023 Poster + Paper

Hybrid laser microfabrication of three-dimensional large-scale fused silica microfluidic chips

Aodong Zhang, Jian Xu, Ming Hu, Xin Li, Xiaolong Li, Jia Qi, Ya Cheng

Proceedings Volume 12409, 124091F (2023) https://doi.org/10.1117/12.2649497

KEYWORDS: Femtosecond laser micromachining, Ultrafast lasers, Glass processing, 3D microstructuring, Picosecond lasers, Microfluidics, Laser irradiation, Carbon dioxide lasers, Glasses, Etching

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Proceedings Article | 4 January 2023 Presentation + Paper

Electro-optically tunable narrow-linewidth single-frequency microlasers and low-phase-noise microwave signal synthesizer on single active lithium niobate microdisks

Jintian Lin, Renhong Gao, Botao Fu, Ni Yao, Jianglin Guan, Ya Cheng

Proceedings Volume 12323, 1232306 (2023) https://doi.org/10.1117/12.2648022

KEYWORDS: Microwave radiation, Lithium niobate, Fabrication, Electro optics, Microrings, Microresonators

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SPIE Journal Paper | 3 May 2022 Open Access

Electro-optic tuning of a single-frequency ultranarrow linewidth microdisk laser

Jintian Lin, Saeed Farajollahi, Zhiwei Fang, Ni Yao, Renhong Gao, Jianglin Guan, Li Deng, Tao Lu, Min Wang, Haisu Zhang, Wei Fang, Ya Cheng, Lingling Qiao

AP, Vol. 4, Issue 03, 036001, (May 2022) https://doi.org/10.1117/12.10.1117/1.AP.4.3.036001

KEYWORDS: Electro optics, Erbium, Photonics, Photomicroscopy, Chromium, Upconversion, Thin films, Silica, Signal detection, Optical microcavities

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Proceedings Article | 5 March 2021 Presentation + Paper

Advancing integrated photonics and microreactor technologies with ultrafast laser processing

Min Wang, Zhiwei Fang, Jia Qi, Junxia Zhou, Zhe Wang, Rongbo Wu, Renhong Gao, Ni Yao, Sanaul Haque, Saeed Farajollahi, Jintian Lin, Wei Fang, Tao Lu, Wei Chu, Ya Cheng

Proceedings Volume 11673, 116730W (2021) https://doi.org/10.1117/12.2585248

KEYWORDS: Ultrafast lasers, Integrated photonics, Laser applications, Molecular photonics, Thin films, Nonlinear dynamics, Molecules, Lithium niobate, Ion beams

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Proceedings Article | 2 March 2020 Presentation + Paper

High-precision measurement of a propagation loss of low-loss single-mode optical waveguides on lithium niobate on insulator

Jintian Lin, Junxia Zhou, Renhong Gao, Min Wang, Rongbo Wu, Zhiwei Fang, Jianhao Zhang, Ya Cheng

Proceedings Volume 11266, 1126607 (2020) https://doi.org/10.1117/12.2542143

KEYWORDS: Waveguides, Wave propagation, Beam splitters, Chromium, Scanning electron microscopy, Lithium niobate, Directional couplers, Cladding, Phase shifts, Tantalum

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Proceedings Article | 2 March 2020 Presentation + Paper

Three-dimensional laser printing of macro-scale glass objects at a micro-scale resolution

Peng Wang, Wei Chu, Xiaolong Li, Zijie Lin, Jian Xu, Haisu Zhang, Ya Cheng

Proceedings Volume 11268, 1126808 (2020) https://doi.org/10.1117/12.2542020

KEYWORDS: Glasses, Etching, Silica, 3D printing, Femtosecond phenomena, Wet etching

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Proceedings Article | 2 March 2020 Presentation + Paper

Ultra-low loss lithium niobate photonics

Ya Cheng

Proceedings Volume 11266, 112660A (2020) https://doi.org/10.1117/12.2543321

KEYWORDS: Waveguides, Microresonators, Photonics, Beam splitters, Femtosecond phenomena, Scanning electron microscopy, Chromium, Photonic integrated circuits, Integrated optics, Polishing

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Proceedings Article | 4 March 2019 Presentation + Paper

High-resolution femtosecond laser 3D micromachining using low-NA focusing systems

Wei Chu, Peng Wang, Lingling Qiao, Wenbo Li, Yuanxin Tan, Ya Cheng

Proceedings Volume 10908, 109080B (2019) https://doi.org/10.1117/12.2516203

KEYWORDS: Glasses, Micromachining, 3D printing, Spatial resolution

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Proceedings Article | 4 March 2019 Presentation

Femtosecond laser fabrication of ultrahigh Q lithium niobate microresonators (Conference Presentation)

Rongbo Wu, Jianhao Zhang, Jintian Lin, Ya Cheng

Proceedings Volume 10906, 1090613 (2019) https://doi.org/10.1117/12.2506072

KEYWORDS: Lithium niobate, Femtosecond phenomena, Microresonators, Chromium, Surface finishing, Curium, Polishing, Resonators, Nanophotonics, Electro optics

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Proceedings Article | 4 March 2019 Presentation

Three-dimensional microfabrication using spatiotemporal shaped femtosecond laser pulses (Conference Presentation)

Wei Chu, Ya Cheng

Proceedings Volume 10906, 1090618 (2019) https://doi.org/10.1117/12.2505724

KEYWORDS: Femtosecond phenomena, Microfabrication, Spatial resolution, 3D printing, Microelectromechanical systems, Two photon polymerization, Glasses, Aberration correction, Infrared imaging, Infrared photography

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Proceedings Article | 19 February 2018 Presentation + Paper

Direct laser writing of 3D microfluidic structures in glass for lab-on-a-chip applications

Jian Xu, Yang Liao, Jintian Lin, Yi Zhong, Xiaolong Li, Chengbin Jing, Ya Cheng

Proceedings Volume 10520, 1052007 (2018) https://doi.org/10.1117/12.2286564

KEYWORDS: Microfluidics, Glasses, Femtosecond phenomena, Silica, Lab on a chip, Fabrication, Optofluidics, Microfabrication, Luminescence, Laser ablation

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Proceedings Article | 22 April 2016 Paper

Efficient second harmonic generation in an on-chip high-Q crystalline microresonator fabricated by femtosecond laser

Jintian Lin, Yingxin Xu, Zhiwei Fang, Min Wang, Wei Fang, Ya Cheng

Proceedings Volume 9727, 972710 (2016) https://doi.org/10.1117/12.2211895

KEYWORDS: Second-harmonic generation, Phase matching, Microresonators, Harmonic generation, Lithium niobate, Nonlinear frequency conversion, Crystals, Refractive index, Resonators, Nonlinear crystals, Polarization

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Proceedings Article | 14 March 2016 Paper

Tailored femtosecond Bessel beams for high-throughput, taper-free through-silicon vias (TSVs) fabrication

Fei He, Junjie Yu, Wei Chu, Zhaohui Wang, Yuanxin Tan, Ya Cheng, Koji Sugioka

Proceedings Volume 9735, 973506 (2016) https://doi.org/10.1117/12.2214694

KEYWORDS: Bessel beams, Silicon, Femtosecond phenomena, Axicons, Gaussian beams, Absorption, Etching, Objectives, Pulsed laser operation, Photomicroscopy

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Proceedings Article | 4 March 2015 Paper

Formation of nanogratings in a porous glass immersed in water by femtosecond laser irradiation

Yang Liao, Jielei Ni, Lingling Qiao, Min Huang, Yves Bellouard, Koji Sugioka, Ya Cheng

Proceedings Volume 9350, 93500G (2015) https://doi.org/10.1117/12.2076905

KEYWORDS: Glasses, Plasma, Interfaces, Femtosecond phenomena, Scanning electron microscopy, Dielectrics, Objectives, Light scattering, Ultrafast lasers, Polarization

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Proceedings Article | 3 March 2015 Paper

Femtosecond laser direct writing of high-Q microresonators in glass and crystals

Jintian Lin, Yingxin Xu, Jiangxin Song, Jialei Tang, Zhiwei Fang, Min Wang, Wei Fang, Ya Cheng

Proceedings Volume 9343, 934310 (2015) https://doi.org/10.1117/12.2071737

KEYWORDS: Microresonators, Femtosecond phenomena, Glasses, Silica, Crystals, Resonators, Sensors, Carbon dioxide lasers, Microfluidics, Second-harmonic generation

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Proceedings Article | 31 October 2014 Paper

Three-dimensional patterning in transparent materials with spatiotemporally-focused femtosecond laser pulses

Fei He, Zhaohui Wang, Bin Zeng, Jielei Ni, Wei Chu, Koji Sugioka, Ya Cheng

Proceedings Volume 9273, 927316 (2014) https://doi.org/10.1117/12.2071039

KEYWORDS: Femtosecond phenomena, Optical lithography, Beam shaping, Pulmonary function tests, Glasses, Micromachining, Point spread functions, Femtosecond laser micromachining, Objectives, Luminescence

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Proceedings Article | 6 March 2014 Paper

Femtosecond laser 3D nanofabrication in glass: enabling direct write of integrated micro/nanofluidic chips

Ya Cheng, Yang Liao, Koji Sugioka

Proceedings Volume 8967, 896708 (2014) https://doi.org/10.1117/12.2042742

KEYWORDS: Glasses, Microfluidics, Femtosecond phenomena, Nanolithography, Laser ablation, Photomicroscopy, Fabrication, Laser damage threshold, Nanofabrication, Capillaries

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Proceedings Article | 4 March 2014 Paper

Fabrication of optical cavities with femtosecond laser pulses

Jintian Lin, Jiangxin Song, Jialei Tang, Wei Fang, Koji Sugioka, Ya Cheng

Proceedings Volume 8960, 89601A (2014) https://doi.org/10.1117/12.2041353

KEYWORDS: Optical microcavities, Femtosecond phenomena, Carbon dioxide lasers, Glasses, Crystals, Laser crystals, Silica, Laser damage threshold, Femtosecond laser micromachining, Nonlinear crystals

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Proceedings Article | 21 December 2013 Paper

Laser alchemy: direct writing of multifunctional components in a glass chip with femtosecond laser pulses

Yang Liao, Jintian Lin, Ya Cheng

Proceedings Volume 9047, 904708 (2013) https://doi.org/10.1117/12.2044740

KEYWORDS: Glasses, Femtosecond phenomena, Optical microcavities, Microfluidics, Laser damage threshold, Laser ablation, Pulsed laser operation, Photomicroscopy, Nanolithography, Luminescence

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Proceedings Article | 9 July 2013 Paper

Laser-induced damage in porous glass: a pathway to 3D fabrication of micro-/nanofluidics

Ya Cheng, Yang Liao, Koji Sugioka

Proceedings Volume 8786, 87860C (2013) https://doi.org/10.1117/12.2020480

KEYWORDS: Glasses, Femtosecond phenomena, Nanolithography, Laser damage threshold, Polarization, Molecules, Microfluidics, Laser induced damage, Nanostructures, Scanning electron microscopy

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Proceedings Article | 24 August 2010 Paper

Fabrication of Raman biochip prototype by femtosecond laser micromachining

Zenghui Zhou, Jian Xu, Fei He, Yang Liao, Ya Cheng, Zhizhan Xu, Koji Sugioka, Katsumi Midorikawa

Proceedings Volume 7759, 775915 (2010) https://doi.org/10.1117/12.864428

KEYWORDS: Raman spectroscopy, Femtosecond phenomena, Silver, Glasses, Microfluidics, Molecules, Prototyping, Microelectronics, Sensors, Nanoparticles

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Proceedings Article | 23 February 2010 Paper

Integration of electronics and photonics in active material by femtosecond laser for functional microdevice fabrication

Ya Cheng, Zhizhan Xu, Koji Sugioka, Katsumi Midorikawa

Proceedings Volume 7585, 75850D (2010) https://doi.org/10.1117/12.838655

KEYWORDS: Femtosecond phenomena, Copper, Silver, Glasses, Waveguides, Electroless plating, Electrodes, Modulators, Dielectrics, Laser ablation

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Proceedings Article | 18 February 2010 Paper

Centimeter-long microfluidic channel with an aspect ratio above 1,000 directly fabricated in fused silica by femtosecond laser micromachining

Fei He, Ya Cheng, Zhizhan Xu, Koji Sugioka, Katsumi Midorikawa

Proceedings Volume 7584, 75841A (2010) https://doi.org/10.1117/12.853030

KEYWORDS: Microfluidics, Glasses, Silica, Femtosecond phenomena, Wet etching, Femtosecond laser micromachining, Lab on a chip, Photomicroscopy, 3D microstructuring, Surface finishing

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Proceedings Article | 4 January 2008 Paper

Selective deposition of conductive copper films on glass surfaces using femtosecond laser surface modification and electroless plating

Jian Xu, Yang Liao, Huidan Zeng, Zenghui Zhou, Haiyi Sun, Juan Song, Xinshun Wang, Ya Cheng, Zhizhan Xu, Koji Sugioka, Katsumi Midorikawa

Proceedings Volume 6825, 68250L (2008) https://doi.org/10.1117/12.754877

KEYWORDS: Copper, Glasses, Silver, Femtosecond phenomena, Electroless plating, Plating, Particles, Microfluidics, Femtosecond laser micromachining, Scanning electron microscopy

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Proceedings Article | 29 September 2006 Paper

Femtosecond laser microfabrication of 3D structures in Foturan glass

Ya Cheng, Zhizhan Xu, Koji Sugioka, Katsumi Midorikawa

Proceedings Volume 6400, 640001 (2006) https://doi.org/10.1117/12.688375

KEYWORDS: Glasses, Microfluidics, Femtosecond phenomena, Micromirrors, Annealing, Objectives, Micro optics, Liquids, Lab on a chip, Light scattering

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Proceedings Article | 12 April 2005 Paper

3D microfluidic lasers embedded in glass by femtosecond laser direct writing

Ya Cheng, Koji Sugioka, Katsumi Midorikawa

Proceedings Volume 5713, (2005) https://doi.org/10.1117/12.588935

KEYWORDS: Microfluidics, Glasses, Femtosecond phenomena, Dye lasers, Micro optics, Annealing, Optical pumping, Micromirrors, 3D microstructuring, Wet etching

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Proceedings Article | 26 January 2005 Paper

Integration of 3D micro-optics and microfluidics in a glass chip using a femtosecond laser for photonic applications

Ya Cheng, Koji Sugioka, Katsumi Midorikawa

Proceedings Volume 5627, (2005) https://doi.org/10.1117/12.566742

KEYWORDS: Microfluidics, Glasses, Femtosecond phenomena, Micro optics, Micromirrors, Dye lasers, Annealing, Optical pumping, Wet etching, Nd:YAG lasers

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Proceedings Article | 8 October 2004 Paper

3D integration of micro-optics and microfluidics in glass using femtosecond laser direct writing

Ya Cheng, Koji Sugioka, Katsumi Midorikawa

Proceedings Volume 5662, (2004) https://doi.org/10.1117/12.596285

KEYWORDS: Microfluidics, Glasses, Femtosecond phenomena, Micro optics, Optical pumping, Dye lasers, Micromirrors, Photomicroscopy, Optical resonators, Nd:YAG lasers

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Proceedings Article | 15 July 2004 Paper

Fabrication of microreactors in photostructurable glass by 3D femtosecond laser direct write

Koji Sugioka, Ya Cheng, Masashi Masuda, Katsumi Midorikawa, Kazuhiko Shihoyama

Proceedings Volume 5339, (2004) https://doi.org/10.1117/12.531630

KEYWORDS: Glasses, Femtosecond phenomena, Cerium, Absorption, Microfluidics, 3D microstructuring, Laser processing, Metals, Silver, Plating

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Proceedings Article | 2 April 2004 Paper

3D microstructuring of glass by femtosecond laser direct-writing for micro-TAS application

Koji Sugioka, Ya Cheng, Masashi Masuda, Katsumi Midorikawa, Kazuhiko Shihoyama

Proceedings Volume 5399, (2004) https://doi.org/10.1117/12.552286

KEYWORDS: Glasses, Femtosecond phenomena, Microfluidics, 3D microstructuring, Absorption, Pulsed laser operation, Annealing, Beam splitters, Etching, Micro optics

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Proceedings Article | 18 November 2003 Paper

Fabrication of 3D microreactor structures embedded in photosensitive glass by femtosecond laser

Masashi Masuda, Koji Sugioka, Ya Cheng, Masako Kawachi, Kazuhiko Shihoyama, Koichi Toyoda, Katsumi Midorikawa

Proceedings Volume 5063, (2003) https://doi.org/10.1117/12.541066

KEYWORDS: Glasses, Femtosecond phenomena, Etching, 3D microstructuring, Ultrasonics, Chemical analysis, Microfabrication, Ultraviolet radiation, Microfluidics, Heat treatments

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Proceedings Article | 18 November 2003 Paper

Three-dimensional micro-optical components embedded in Foturan glass by a femtosecond laser

Ya Cheng, Koji Sugioka, Masashi Masuda, Kazuhiko Shihoyama, Koichi Toyoda, Katsumi Midorikawa

Proceedings Volume 5063, (2003) https://doi.org/10.1117/12.540697

KEYWORDS: Glasses, Femtosecond phenomena, Beam splitters, Micromirrors, Photomicroscopy, Optical properties, Annealing, Etching, Chemical analysis, Biological research

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Proceedings Article | 17 October 2003 Paper

3D microstructuring inside photosensitive glass by use of a femtosecond laser for lab-on-chip applications

Ya Cheng, Koji Sugioka, Masashi Masuda, Katsumi Midorikawa, Masako Kawachi, Kazuhiko Shihoyama, Koichi Toyoda

Proceedings Volume 4977, (2003) https://doi.org/10.1117/12.479539

KEYWORDS: Glasses, Femtosecond phenomena, 3D microstructuring, Microfluidics, Etching, Annealing, Micro optics, Pulsed laser operation, Fabrication, Laser beam propagation

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Proceedings Article | 2 September 2003 Paper

Advanced laser processing of glass materials

Koji Sugioka, Kotaro Obata, Ya Cheng, Katsumi Midorikawa

Proceedings Volume 5121, (2003) https://doi.org/10.1117/12.515607

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Proceedings Article | 19 February 2003 Paper

Advanced irradiation methods of femtosecond laser for embedded microfabrication of transparent materials

Y. Cheng, Koji Sugioka, Masashi Masuda, Masako Kawachi, Kazuhiko Shihoyama, Koichi Toyoda, Katsumi Midorikawa

Proceedings Volume 4830, (2003) https://doi.org/10.1117/12.486586

KEYWORDS: Femtosecond phenomena, Microfabrication, Glasses, Gaussian beams, Laser energy, Laser beam propagation, Laser processing, Heat treatments, Pulsed laser operation, Microfluidics

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Proceedings Article | 19 February 2003 Paper

3D microfabrication in photosensitive glass by femtosecond laser

Masashi Masuda, Koji Sugioka, Y. Cheng, Naoko Aoki, Masako Kawachi, Kazuhiko Shihoyama, Koichi Toyoda, Katsumi Midorikawa

Proceedings Volume 4830, (2003) https://doi.org/10.1117/12.486548

KEYWORDS: Glasses, Microfabrication, Femtosecond phenomena, Etching, 3D microstructuring, Chemical analysis, Fabrication, Silver, Ultraviolet radiation, Absorption

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Proceedings Article | 1 February 2000 Paper

Focus characteristics of long-distance flying optics

Zhaogu Cheng, Ya Cheng, Jinbo Jiang, Xianqin Li, Guoliang Xu, Jin'an Xia, William Steen, G. Dearden

Proceedings Volume 3885, (2000) https://doi.org/10.1117/12.377005

KEYWORDS: Resonators, High power lasers, Distortion, Carbon dioxide lasers, Gaussian beams, Mirrors, Coating, Solids, Gas lasers, Laser resonators

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Showing 5 of 42 publications

Conference Committee Involvement (20)

Laser-based Micro- and Nanoprocessing XIX

25 January 2025 | San Francisco, California, United States

Optoelectronic Imaging and Multimedia Technology XI

12 October 2024 | Nantong, Jiangsu, China

Laser-based Micro- and Nanoprocessing XVIII

29 January 2024 | San Francisco, California, United States

Optoelectronic Imaging and Multimedia Technology X

15 October 2023 | Beijing, China

Laser-based Micro- and Nanoprocessing XVII

31 January 2023 | San Francisco, California, United States

Optoelectronic Imaging and Multimedia Technology IX

5 December 2022 | Online Only, China

Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVII

25 January 2022 | San Francisco, California, United States

Laser-based Micro- and Nanoprocessing XVI

25 January 2022 | San Francisco, California, United States

Optoelectronic Imaging and Multimedia Technology VIII

10 October 2021 | Nantong, JS, China

Laser-based Micro- and Nanoprocessing XV

6 March 2021 | Online Only, California, United States

Optoelectronic Imaging and Multimedia Technology VII

12 October 2020 | Online Only, China

Laser-based Micro- and Nanoprocessing XIV

3 February 2020 | San Francisco, California, United States

Optoelectronic Imaging and Multimedia Technology VI

21 October 2019 | Hangzhou, China

Laser-based Micro- and Nanoprocessing XIII

5 February 2019 | San Francisco, California, United States

Optoelectronic Imaging and Multimedia Technology V

11 October 2018 | Beijing, China

Pacific-Rim Laser Damage

21 May 2017 | Shanghai, China

Pacific Rim Laser Damage 2017: Optical Materials for High Power Lasers

21 May 2017 | Shanghai, China

Optoelectronic Imaging and Multimedia Technology IV

12 October 2016 | Beijing, China

Optoelectronic Imaging and Multimedia Technology III

9 October 2014 | Beijing, China

Laser Applications in Microelectronic and Optoelectronic Manufacturing IX

26 January 2004 | San Jose, Ca, United States

Showing 5 of 20 Conference Committees

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