Prof. Zhanjie Wang Profile

Prof. Zhanjie Wang

Associate Professor at Institute of Metal Research

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Publications (15)

Proceedings Article | 13 April 2012 Paper

Rapid crystallization of ferroelectric lead zirconate titanate thin films by microwave heating

X. Wang, Z. Wang, M. Zhu, Y. Zhang, Z. Zhang

Proceedings Volume 8409, 84091R (2012) https://doi.org/10.1117/12.923180

KEYWORDS: Ferroelectric materials, Crystals, Microwave radiation, Annealing, Thin films, Transmission electron microscopy, Diffraction, Crystallography, Dielectrics, Perovskite

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Proceedings Article | 21 October 2009 Paper

Microwave irradiation of lead zirconate titanate thin films

Z. J. Wang, M. W. Zhu

Proceedings Volume 7493, 74930A (2009) https://doi.org/10.1117/12.839949

KEYWORDS: Ferroelectric materials, Crystals, Microwave radiation, Thin films, Crystallography, Sol-gels, Magnetism, Dielectrics, Scanning electron microscopy, Perovskite

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Proceedings Article | 19 December 2008 Paper

Low-temperature processing of PZT thin films by 2.45 GHz microwave heating

Z. Wang, Y. Otsuka, Z. Cao, M. Zhu, N. Yoshikawa, H. Kokawa

Proceedings Volume 7267, 726702 (2008) https://doi.org/10.1117/12.810604

KEYWORDS: Ferroelectric materials, Microwave radiation, Crystals, Thin films, Magnetism, Annealing, Sol-gels, Silicon, Crystallography, Perovskite

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Proceedings Article | 22 December 2006 Paper

Low-temperature processing of lead zirconate titanate thin films by 28 GHz microwave irradiation for MEMS application

Z. Wang, H. Kokawa, H. Takizawa, M. Ichiki, R. Maeda

Proceedings Volume 6413, 641308 (2006) https://doi.org/10.1117/12.695608

KEYWORDS: Ferroelectric materials, Microwave radiation, Crystals, Thin films, Silicon, Sol-gels, Scanning electron microscopy, Microelectromechanical systems, Annealing, Perovskite

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Proceedings Article | 8 October 2004 Paper

Optimization of GBCD by combining laser surface melting with annealing heat treatment

Sen Yang, Zhanjie Wang, Hiroyuki Kokawa

Proceedings Volume 5662, (2004) https://doi.org/10.1117/12.596336

KEYWORDS: Annealing, Heat treatments, Corrosion, Laser processing, Resistance, Metals, Solids, Light emitting diodes, Industrial chemicals, Temperature metrology

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Proceedings Article | 2 April 2004 Paper

Preparation of PZT films derived by hybrid processing for MEMS application

Lijun Yan, Zhan Jie Wang, Hiroyuki Kokawa, Ryutaro Maeda

Proceedings Volume 5276, (2004) https://doi.org/10.1117/12.522807

KEYWORDS: Ferroelectric materials, Sol-gels, Silicon, Crystals, Pulsed laser deposition, Annealing, Transmission electron microscopy, Image processing, Dielectrics, Perovskite

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Proceedings Article | 16 February 2004 Paper

In situ deposition of epitaxial PZT films by pulsed laser deposition

Zhan Jie Wang, Li Jun Yan, Hiroyuki Kokawa, Ryutaro Maeda

Proceedings Volume 5648, (2004) https://doi.org/10.1117/12.581399

KEYWORDS: Ferroelectric materials, Sol-gels, Silicon, Crystals, Transmission electron microscopy, Image processing, Lead, Pulsed laser deposition, Thin films, Perovskite

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Proceedings Article | 13 November 2002 Paper

Resonant-type microscanners fabricated by hybrid PZT deposition process on SOI wafers

Jiunn-Jye Tsaur, Zhanjie Wang, Lulu Zhang, Masaaki Ichiki, Ryutaro Maeda, Tadatomo Suga

Proceedings Volume 4936, (2002) https://doi.org/10.1117/12.469675

KEYWORDS: Ferroelectric materials, Mirrors, Sol-gels, Silicon, Laser ablation, Semiconducting wafers, Silicon films, Polarization, Actuators, Scanning electron microscopy

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Proceedings Article | 13 November 2002 Paper

Deposition of Pb(ZrTi)O3 thin films by pulsed laser ablation for MEMS application

Zhan Jie Wang, Ryutaro Maeda, Hiroyuki Kokawa

Proceedings Volume 4934, (2002) https://doi.org/10.1117/12.469043

KEYWORDS: Ferroelectric materials, Crystals, Dielectrics, Laser ablation, Lead, Dielectric polarization, Thin films, Annealing, X-ray diffraction, Perovskite

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Proceedings Article | 13 November 2002 Paper

Electrical and mechanical properties of PZT thin films prepared by hybrid process of sol-gel technique and laser ablation

Lulu Zhang, Masaaki Ichiki, Zhanjie Wang, Ryutaro Maeda

Proceedings Volume 4934, (2002) https://doi.org/10.1117/12.469049

KEYWORDS: Ferroelectric materials, Sol-gels, Laser ablation, Thin films, Dielectric polarization, Dielectrics, Fabrication, Excimer lasers, Crystals, Perovskite

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Proceedings Article | 9 July 2001 Paper

Structural formation of the lead zirconate titanate formed in pulsed-laser ablation deposition

Masaaki Ichiki, Lulu Zhang, Zhanjie Wang, Yasushi Morikawa, Makoto Tanaka, Ryutaro Maeda

Proceedings Volume 4467, (2001) https://doi.org/10.1117/12.432952

KEYWORDS: Ferroelectric materials, Scanning electron microscopy, Lead, Annealing, Crystals, Heat treatments, X-ray diffraction, Laser ablation, Deposition processes, Perovskite

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Proceedings Article | 5 April 2001 Paper

Preparation and characterization of excimer-laser-ablation-derived lead zirconate titanate thin films for microactuators

Zhanjie Wang, Ryutaro Maeda, Hiroyuki Kokawa

Proceedings Volume 4408, (2001) https://doi.org/10.1117/12.425390

KEYWORDS: Ferroelectric materials, Lead, Thin films, Annealing, Laser ablation, Dielectric polarization, Dielectrics, Crystals, Scanning electron microscopy, Perovskite

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Proceedings Article | 21 March 2001 Paper

Ferroelectric Pb(Zr0.53, Ti0.47)O3 thin films for smart MEMS

Ryutaro Maeda, Zhanjie Wang, Jiaru Chu, Wenmei Lin

Proceedings Volume 4235, (2001) https://doi.org/10.1117/12.420846

KEYWORDS: Ferroelectric materials, Thin films, Silicon, Sol-gels, Electrodes, Microelectromechanical systems, Actuators, Lead, Data storage, Scanning electron microscopy

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Ferroelectric thin film is the target of the interest in micro electromechanical system, memory etc. Smart MEMS is to be developed with such smart materials thin films. In spite of the success in commercialization of FRAM application, MEMS application is still under R&D state. Despite to their promising properties, there are only few reports on the use of such layers as MEMS devices. Problems for application are mainly caused by the necessary very small dimension of such devices, in contrast to limitations and tolerances of the used micro-technologies. Although deposition of piezoelectric PZTlayer using different thin-film technologies has reached an advanced state, the layers of more than 1 micron thickness needed for MEMS applications is still difficult to deposit. To deal with these problems, the structure or the function of the devices has to be coped with such technologically caused constraints, like thickness deviation and deformation by residual stress, as well as optimization of materials processing parameters. As an application of the thin films, Piezoelectric SFM and scanning mirror device are designed and fabricated as examples of the target MEMS devices with special emphases placed on materials, processing and device structure optimization. Sol gel deposited as well as Pulsed Laser Ablation Deposited PZT layers have been developed and applied for the devices. To compensate the deformation of the devices, bimorph PZT actuator is also presented. A piezoelectric SPM is expected to provide a promising answer to High density data storage devices, as the piezoelectric layer serves as a actuator for the cantilever as well as a force sensor. This paper describes a novel probe arrays integrated with micro-heaters for the AFM thermal mechanical data storage. The probes have cantilevers 3um thick, 100-200um long, and 30-70um wide, and have micro-heater integrated on the triangle end of the cantilever. The cantilever consists of a piezoelectric layer on a silicon base for the heater actuation and force sensing. The Lead-Titanate-Zirconate (PZT) is selected as the piezoelectric material for its high piezoelectric coefficients comparing to crystal materials (for example, ZnO2). We design the heater on the triangle end of the cantilever, and shape the apex part as the narrowest to get the biggest power dissipation. The prototype of the device has been fabricated and characterized.

Proceedings Article | 10 March 1999 Paper

Microfabrication technique for thick structure of metals and PZT

Toru Shimizu, Yoichi Murakoshi, Zhanjie Wang, Ryutaro Maeda, Toshio Sano

Proceedings Volume 3680, (1999) https://doi.org/10.1117/12.341236

KEYWORDS: Ferroelectric materials, Coating, Metals, Photography, Thin film coatings, Silicon, Semiconducting wafers, Ceramics, Laser ablation, Microfabrication

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Proceedings Article | 10 March 1999 Paper

Preparation and characterization of sol-gel-derived PZT thin films for microactuators

Zhanjie Wang, Ryutaro Maeda, Kaoru Kikuchi

Proceedings Volume 3680, (1999) https://doi.org/10.1117/12.341162

KEYWORDS: Ferroelectric materials, Thin films, Dielectrics, Dielectric polarization, Sol-gels, Scanning electron microscopy, Lead, Crystals, Heat treatments, Actuators

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Showing 5 of 15 publications

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