Prof. Zhenhua Ye Profile

Prof. Zhenhua Ye

at Shanghai Institute of Technical Physics CAS

SPIE Involvement:

Author

Publications (18)

Proceedings Article | 18 June 2018 Paper

A study on ALD ZnS passivation of HgCdTe IRFPAs detectors

A. L. Cui, Z. H. Ye, C. H. Sun, L. F. Liu, X. N. Hu, R. J. Ding, L. He

Proceedings Volume 10624, 106241Z (2018) https://doi.org/10.1117/12.2304578

KEYWORDS: Atomic layer deposition, Zinc, Mercury cadmium telluride, Sensors, Etching, Infrared detectors, Hydrogen, Scanning electron microscopy, Image processing, Infrared imaging

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Proceedings Article | 18 June 2018 Paper

A FEA study on thermal stress of HgCdTe infrared focal plane arrays detector

W. T. Zhang, Z. H. Ye, X. Chen

Proceedings Volume 10624, 106241X (2018) https://doi.org/10.1117/12.2304576

KEYWORDS: Sensors, Mercury cadmium telluride, Thermography, Infrared radiation, Finite element methods, Infrared sensors, Sapphire, Thermal effects, Infrared detectors, Staring arrays

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Proceedings Article | 25 May 2017 Paper

A study on inductively coupled plasma etch rate of HgCdTe at cryogenic temperature

F. Liu, Y. Chen, Z. Ye, R. Ding, L. He

Proceedings Volume 10177, 101772H (2017) https://doi.org/10.1117/12.2262537

KEYWORDS: Zinc, Scanning electron microscopy, Surface roughness, Ions, Etching, Mercury cadmium telluride, Cryogenics, Plasma, Plasma etching, Assembly equipment, Infrared detectors, Infrared radiation, Staring arrays, Infrared sensors

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Proceedings Article | 1 November 2016 Paper

Optimization of plasma etching of SiO2 as hard mask for HgCdTe dry etching

Yiyu Chen, Zhenhua Ye, Changhong Sun, Shan Zhang, Wen Xin, Xiaoning Hu, Ruijun Ding, Li He

Proceedings Volume 10157, 101573L (2016) https://doi.org/10.1117/12.2247502

KEYWORDS: Etching, Silica, Mercury cadmium telluride, Plasma etching, Dry etching

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Proceedings Article | 20 May 2016 Paper

Inductively coupled plasma etching of HgCdTe IRFPAs detectors at cryogenic temperature

Y. Y. Chen, Z. H. Ye, C. H. Sun, S. Zhang, X. N. Hu, R. J. Ding, L. He

Proceedings Volume 9819, 981922 (2016) https://doi.org/10.1117/12.2222825

KEYWORDS: Etching, Mercury cadmium telluride, Cryogenics, Mercury, Plasma etching, Plasma, Reactive ion etching, Diffusion, Scanning electron microscopy, Argon

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Proceedings Article | 20 May 2016 Paper

Recent progress on dark current characterization of very long-wavelength HgCdTe infrared photodetectors and HgCdTe APDs in SITP

Weida Hu, Jiale He, Weicheng Qiu, Zhenhua Ye, Lu Chen, Chun Lin, Li He, Xiaoshuang Chen, Wei Lu

Proceedings Volume 9819, 981921 (2016) https://doi.org/10.1117/12.2222161

KEYWORDS: Mercury cadmium telluride, Long wavelength infrared, Infrared radiation, Infrared photography, Photodetectors, Infrared detectors, Photodiodes, Avalanche photodetectors, Doping, Lutetium

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Proceedings Article | 20 May 2016 Paper

Influences of thicknesses and structures of barrier cap layers on As ion profiles and implant damages in HgCdTe epilayers

Changzhi Shi, Chun Lin, Yanfeng Wei, Lu Chen, Zhenhua Ye

Proceedings Volume 9819, 981923 (2016) https://doi.org/10.1117/12.2224943

KEYWORDS: Mercury cadmium telluride, Arsenic, Ion implantation, Annealing, Liquid phase epitaxy, Diffusion, Ions, Zinc, Transmission electron microscopy, Electron beams

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Proceedings Article | 22 June 2015 Paper

Thermal stability of atomic layer deposition Al2O3 film on HgCdTe

P. Zhang, C. H. Sun, Y. Zhang, X. Chen, K. He, Y. Chen, Z. H. Ye

Proceedings Volume 9451, 94512A (2015) https://doi.org/10.1117/12.2180414

KEYWORDS: Mercury cadmium telluride, Atomic layer deposition, Annealing, Capacitance, Semiconducting wafers, Mercury, Aluminum, Physics, Dielectrics, Interfaces

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Proceedings Article | 24 June 2014 Paper

Modeling of LWIR nBn HgCdTe photodetector

Z. Ye, Y. Chen, P. Zhang, C. Lin, X. Hu, R. Ding, L. He

Proceedings Volume 9070, 90701L (2014) https://doi.org/10.1117/12.2053288

KEYWORDS: Doping, Mercury cadmium telluride, Long wavelength infrared, Sensors, Cadmium, Photodetectors, Neodymium, Heterojunctions, Numerical analysis, Sensor performance

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Proceedings Article | 24 June 2014 Paper

Mercury cadmium telluride implanted junction profile measurement and depth control

Songmin Zhou, Chun Lin, Haibin Li, Yanfeng Wei, Zhenhua Ye, Ruijun Ding, Li He

Proceedings Volume 9070, 907031 (2014) https://doi.org/10.1117/12.2050100

KEYWORDS: Mercury cadmium telluride, Etching, Annealing, Ions, Chemical species, Resistance, Mercury, Ion implantation, 3D metrology, Infrared radiation

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Proceedings Article | 28 May 2014 Paper

Design of HgCdTe heterojunction photodiodes on Si substrate

P. Zhang, Z. Ye, Y. Chen, C. Lin, X. Hu, R. Ding, L. He

Proceedings Volume 9100, 91000R (2014) https://doi.org/10.1117/12.2050089

KEYWORDS: Photodiodes, Heterojunctions, Sensors, Mercury cadmium telluride, Interfaces, Silicon, Quantum efficiency, Resistance, Absorption, Optical filters

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Proceedings Article | 15 October 2012 Paper

N2 atmosphere annealing effect on HgCdTe electrical damage induced by ICP etching process

Jian Huang, Zhenhua Ye, Wenting Yin, Hanjie Hu, Chun Lin, Xiaoning Hu, Ruijun Ding, Li He

Proceedings Volume 8419, 84192I (2012) https://doi.org/10.1117/12.977400

KEYWORDS: Annealing, Etching, Mercury cadmium telluride, Mercury, Photodiodes, Sensors, Plasma etching, Array processing, Infrared imaging, Image sensors

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Proceedings Article | 31 May 2012 Paper

Laser power and temperature dependence on laser beam induced current signal in As-doped p-type HgCdTe

Yongguo Chen, Weida Hu, Xiaoshuang Chen, Zhenhua Ye, Jun Wang, Chun Lin, Xiaoning Hu, Wei Lu

Proceedings Volume 8353, 83532S (2012) https://doi.org/10.1117/12.918806

KEYWORDS: Mercury cadmium telluride, Temperature metrology, Thermography, Liquid phase epitaxy, Infrared radiation, Diffusion, Diodes, Physics, Laser irradiation, Infrared detectors

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Proceedings Article | 31 May 2012 Paper

Studies on a novel mask technique with high selectivity and aspect-ratio patterns for HgCdTe trenches ICP etching

Z. Ye, W. Hu, Y. Li, J. Huang, W. Yin, C. Lin, X. Hu, R. Ding, X. Chen, W. Lu, L. He

Proceedings Volume 8353, 83532T (2012) https://doi.org/10.1117/12.918824

KEYWORDS: Mercury cadmium telluride, Etching, Silicon films, Silica, Plasma, Optical lithography, Scanning electron microscopy, Plasma etching, Standards development, Infrared radiation

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SPIE Journal Paper | 29 March 2012

Temperature dependence on photosensitive area extension in mercury cadmium telluride photodiodes using laser beam induced current

Yongguo Chen, Weida Hu, Xiaoshuang Chen, Zhenhua Ye, Jun Wang, Xiaofang Wang, Chenhui Yu, Wei Lu

OE, Vol. 51, Issue 03, 036401, (March 2012) https://doi.org/10.1117/12.10.1117/1.OE.51.3.036401

KEYWORDS: Mercury cadmium telluride, Mercury, Cadmium, Photodiodes, Tellurium, Diffusion, Temperature metrology, Ion implantation, Liquid phase epitaxy, Ionization

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Proceedings Article | 9 February 2009 Paper

A study of Hg1-xCdxTe surfaces processed using inductively coupled plasma with CH4/H2/N2/Ar mixture

Wenhong Zhou, Zhenhua Ye, Xiaoning Hu, Ruijun Ding, Li He

Proceedings Volume 7158, 71581B (2009) https://doi.org/10.1117/12.807068

KEYWORDS: Plasma, Etching, Mercury cadmium telluride, Plasma etching, Dry etching, Atomic force microscopy, Scanning probe microscopy, Reactive ion etching, Chemical analysis, Argon

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Proceedings Article | 14 October 2005 Paper

Low energy inductively coupled plasma etching of HgCdTe

Xiaoning Hu, Zhenhua Ye, Ruijun Ding, Li He, Glenn Tan, Ligang Deng

Proceedings Volume 5964, 596408 (2005) https://doi.org/10.1117/12.625143

KEYWORDS: Etching, Mercury cadmium telluride, Plasma, Plasma etching, Argon, Anisotropic etching, Ions, Electrodes, Dry etching, Silica

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Proceedings Article | 10 January 2005 Paper

A preliminary study on MBE-grown HgCdTe two-color FPAs

Zhenhua Ye, Jun Wu, Xiaoning Hu, Yan Wu, Qingjun Liao, Haiyan Zhang, Jianxin Wang, Ruijun Ding, Li He

Proceedings Volume 5640, (2005) https://doi.org/10.1117/12.572167

KEYWORDS: Short wave infrared radiation, Photodiodes, Sensors, Mid-IR, Mercury cadmium telluride, Cadmium, Indium, Detector arrays, Doping, Heterojunctions

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Showing 5 of 18 publications

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