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Youngsoo Song
Researcher at SAMSUNG Electronics Co Ltd
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Publications (4)
Proceedings Article | 20 March 2019 Paper
Optical proximity correction using bidirectional recurrent neural network (BRNN)
Yonghwi Kwon, Youngsoo Song, Youngsoo Shin
Proceedings Volume 10962, 109620D (2019) https://doi.org/10.1117/12.2515159
KEYWORDS: Optical proximity correction, Neural networks, Machine learning, Photomasks, Lithography, Fourier transforms, Neurons, Optical properties
Proceedings Article | 20 March 2018 Paper
Timing optimization in SADP process through wire widening and double via insertion
Proceedings Volume 10588, 105880R (2018) https://doi.org/10.1117/12.2297496
KEYWORDS: Metals, Photomasks, Resistance, Copper, Double patterning technology, Clocks, Lithography, Signal processing, Etching, Chemical mechanical planarization
Proceedings Article | 28 March 2017 Presentation + Paper
Redundant via insertion in self-aligned double patterning
Youngsoo Song, Jinwook Jung, Youngsoo Shin
Proceedings Volume 10148, 1014806 (2017) https://doi.org/10.1117/12.2258036
KEYWORDS: Manufacturing, Double patterning technology, Metals, Reliability, Source mask optimization, Photomasks, Signal processing, Optical lithography, 3D modeling, Etching, Electrical engineering
Proceedings Article | 16 March 2016 Paper
Integrated routing and fill for self-aligned double patterning (SADP) using grid-based design
Youngsoo Song, Jeemyung Lee, Youngsoo Shin, Seongmin Lee
Proceedings Volume 9781, 978105 (2016) https://doi.org/10.1117/12.2219142
KEYWORDS: Metals, Capacitance, Photomasks, Double patterning technology, Optical lithography, Lithography, 193nm lithography, Manufacturing, Integrated circuits, Etching
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