Hybrid Device Process Using A Focused Ion Beam And An Optical Stepper

Yukinori Ochiai; Yoshikatsu Kojima; Shinji Matsui; Akira Mochizuki; Masamitsu Yamauchi

doi:10.1117/12.945639

14 June 1988 Hybrid Device Process Using A Focused Ion Beam And An Optical Stepper

Yukinori Ochiai, Yoshikatsu Kojima, Shinji Matsui, Akira Mochizuki, Masamitsu Yamauchi

Proceedings Volume 0923, Electron-Beam, X-Ray, and Ion Beam Technology: Submicrometer Lithographies VII; (1988) https://doi.org/10.1117/12.945639
Event: Medical Imaging II, 1988, Newport Beach, CA, United States

Abstract

The focused ion beam (FIB) process has been examined for device production with an optical stepper. The FIB system developed performs and alignment procedure with a precise controlled stage. The registration accuracy attained by FIB lithography using Be and Si ions with the same or different ion energies showed good values with alignment marks covered with resists. The hybrid process with fine pattern delineation depending on FIB and with high throughput depending on an optical stepper indicated a promising tool for submicron devices.

Citation Download Citation

Yukinori Ochiai, Yoshikatsu Kojima, Shinji Matsui, Akira Mochizuki, and Masamitsu Yamauchi "Hybrid Device Process Using A Focused Ion Beam And An Optical Stepper", Proc. SPIE 0923, Electron-Beam, X-Ray, and Ion Beam Technology: Submicrometer Lithographies VII, (14 June 1988); https://doi.org/10.1117/12.945639

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available