Variable-wavelength tabletop-scale EUV ptychographic complex imaging reflectometry for 3D composition determination (Conference Presentation)

Michael Tanksalvala; Christina L. Porter; Yuka Esashi; Galen P. Miley; Robert Karl Jr.; Peter Johnsen; Nicholas W. Jenkins; Charles S Bevis; Bin Wang; Jeremy Thurston; Xiaoshi Zhang; Seth L. Cousin; Daniel E. Adams; Michael Gerrity; Henry C. Kapteyn; Margaret Murnane.

doi:10.1117/12.2516827

26 March 2019 Variable-wavelength tabletop-scale EUV ptychographic complex imaging reflectometry for 3D composition determination (Conference Presentation)

Michael Tanksalvala, Christina L. Porter, Yuka Esashi, Galen P. Miley, Robert Karl Jr., Peter Johnsen, Nicholas W. Jenkins, Charles S Bevis, Bin Wang, Jeremy Thurston, Xiaoshi Zhang, Seth L. Cousin, Daniel E. Adams, Michael Gerrity, Henry C. Kapteyn, Margaret Murnane.

Author Affiliations +

Proceedings Volume 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII; 109590G (2019) https://doi.org/10.1117/12.2516827
Event: SPIE Advanced Lithography, 2019, San Jose, California, United States

Abstract

Full abstract not available at present - I will submit it this week or early next week.

Conference Presentation

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Michael Tanksalvala, Christina L. Porter, Yuka Esashi, Galen P. Miley, Robert Karl Jr., Peter Johnsen, Nicholas W. Jenkins, Charles S Bevis, Bin Wang, Jeremy Thurston, Xiaoshi Zhang, Seth L. Cousin, Daniel E. Adams, Michael Gerrity, Henry C. Kapteyn, and Margaret Murnane. "Variable-wavelength tabletop-scale EUV ptychographic complex imaging reflectometry for 3D composition determination (Conference Presentation)", Proc. SPIE 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII, 109590G (26 March 2019); https://doi.org/10.1117/12.2516827

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