Dr. Peter C. Johnsen Profile

Dr. Peter C. Johnsen

at Zephyr Instruments

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Author

Publications (6)

Proceedings Article | 1 December 2022 Presentation + Paper

Robust and reliable actinic ptychographic imaging of highly periodic structures in EUV photomasks

Bin Wang, Nathan Brooks, Michael Tanksalvala, Yuka Esashi, Nicolas Jenkins, Peter Johnsen, Iona Binnie, Guan Gui, YunZhe Shao, Margaret Murnane, Henry Kapteyn

Proceedings Volume 12293, 122930D (2022) https://doi.org/10.1117/12.2641726

KEYWORDS: Extreme ultraviolet, Photomasks, Diffraction, Imaging systems, Microscopes, High harmonic generation, Phase retrieval, Reticles

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Proceedings Article | 7 March 2022 Presentation

Ultrafast magnetic spectroscopy using tabletop high harmonic sources

Peter Johnsen, Sinéad Ryan, Anna Grafov, Christian Gentry, Justin Shaw, Hans Nembach, Tom Silva, Henry Kapteyn, Margaret Murnane

Proceedings Volume PC11999, PC1199909 (2022) https://doi.org/10.1117/12.2607888

KEYWORDS: Magnetism, Extreme ultraviolet, Ultrafast laser spectroscopy, Spectroscopes, Ultrafast phenomena, Transition metals, Signal to noise ratio, Polarization control, Magneto-optics, Light sources

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Proceedings Article | 26 March 2019 Presentation

Variable-wavelength tabletop-scale EUV ptychographic complex imaging reflectometry for 3D composition determination (Conference Presentation)

Michael Tanksalvala, Christina Porter, Yuka Esashi, Galen Miley, Robert Karl, Peter Johnsen, Nicholas Jenkins, Charles Bevis, Bin Wang, Jeremy Thurston, Xiaoshi Zhang, Seth Cousin, Daniel Adams, Michael Gerrity, Henry Kapteyn, Margaret Murnane.

Proceedings Volume 10959, 109590G (2019) https://doi.org/10.1117/12.2516827

KEYWORDS: Extreme ultraviolet, Stereoscopy, Reflectometry, 3D image processing

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Proceedings Article | 26 March 2019 Presentation

Progress on sub-wavelength nanoimaging with a coherent tabletop EUV source (Conference Presentation)

Charles Bevis, Robert Karl, Bin Wang, Peter Johnsen, Michael Tanksalvala, Christina Porter, Yuka Esashi, Henry Kapteyn

Proceedings Volume 10959, 109590W (2019) https://doi.org/10.1117/12.2517026

KEYWORDS: Nanoimaging, Extreme ultraviolet

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Proceedings Article | 13 March 2018 Paper

Prototype through-pellicle coherent imaging using a 30nm tabletop EUV source

Charles Bevis, Robert Karl, Bin Wang, Yuka Esashi, Michael Tanksalvala, Christina Porter, Peter Johnsen, Daniel Adams, Margaret Murnane, Henry Kapteyn

Proceedings Volume 10585, 105852O (2018) https://doi.org/10.1117/12.2307861

KEYWORDS: Coherence imaging, Extreme ultraviolet, Extreme ultraviolet lithography, Pellicles, Photomasks, Imaging systems, Metrology, Wafer-level optics, Reflectivity, Semiconducting wafers

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Proceedings Article | 13 March 2018 Paper

Complex EUV imaging reflectometry: spatially resolved 3D composition determination and dopant profiling with a tabletop 13nm source

Christina Porter, Michael Tanksalvala, Michael Gerrity, Galen Miley, Yuka Esashi, Naoto Horiguchi, Xiaoshi Zhang, Charles Bevis, Robert Karl, Peter Johnsen, Daniel Adams, Henry Kapteyn, Margaret Murnane

Proceedings Volume 10585, 105850M (2018) https://doi.org/10.1117/12.2297464

KEYWORDS: Reflectometry, Reflectivity, Extreme ultraviolet, Silicon, Coherence imaging, Cameras, Stereoscopy, 3D image processing, 3D metrology, Profiling

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Showing 5 of 6 publications

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