Mr. Galen P. Miley Profile

Galen P. Miley

at Northwestern Univ.

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Author

Publications (3)

Proceedings Article | 26 March 2019 Presentation

Variable-wavelength tabletop-scale EUV ptychographic complex imaging reflectometry for 3D composition determination (Conference Presentation)

Michael Tanksalvala, Christina Porter, Yuka Esashi, Galen Miley, Robert Karl, Peter Johnsen, Nicholas Jenkins, Charles Bevis, Bin Wang, Jeremy Thurston, Xiaoshi Zhang, Seth Cousin, Daniel Adams, Michael Gerrity, Henry Kapteyn, Margaret Murnane.

Proceedings Volume 10959, 109590G (2019) https://doi.org/10.1117/12.2516827

KEYWORDS: Extreme ultraviolet, Stereoscopy, Reflectometry, 3D image processing

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Proceedings Article | 13 March 2018 Paper

Complex EUV imaging reflectometry: spatially resolved 3D composition determination and dopant profiling with a tabletop 13nm source

Christina Porter, Michael Tanksalvala, Michael Gerrity, Galen Miley, Yuka Esashi, Naoto Horiguchi, Xiaoshi Zhang, Charles Bevis, Robert Karl, Peter Johnsen, Daniel Adams, Henry Kapteyn, Margaret Murnane

Proceedings Volume 10585, 105850M (2018) https://doi.org/10.1117/12.2297464

KEYWORDS: Reflectometry, Reflectivity, Extreme ultraviolet, Silicon, Coherence imaging, Cameras, Stereoscopy, 3D image processing, 3D metrology, Profiling

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Proceedings Article | 28 March 2017 Paper

Sub-wavelength transmission and reflection mode tabletop imaging with 13nm illumination via ptychography CDI

Michael Tanksalvala, Christina Porter, Dennis Gardner, Michael Gerrity, Giulia Mancini, Xiaoshi Zhang, Galen Miley, Elisabeth Shanblatt, Benjamin Galloway, Charles Bevis, Robert Karl, Daniel Adams, Henry Kapteyn, Margaret Murnane

Proceedings Volume 10145, 101450L (2017) https://doi.org/10.1117/12.2271386

KEYWORDS: Diffraction, Sensors, Extreme ultraviolet, Reconstruction algorithms, Image resolution, Mirrors, Spatial resolution, Image transmission, Microscopes, Detection and tracking algorithms

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