Diffractive solid immersion lenses: characterization and manufacturing

Robert Brunner; Joerg Bischoff; Klaus Rudolf; Margit Ferstl

doi:10.1117/12.450099

10 December 2001 Diffractive solid immersion lenses: characterization and manufacturing

Robert Brunner, Joerg Bischoff, Klaus Rudolf, Margit Ferstl

Proceedings Volume 4449, Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries II; (2001) https://doi.org/10.1117/12.450099
Event: International Symposium on Optical Science and Technology, 2001, San Diego, CA, United States

Abstract

Solid Immersion Lenses (SILs) have an outstanding potential for applications in future generations of optical data storage systems. We report the realization of a diffractive Solid Immersion Lens (dSIL) which is the diffractive analog of the refractive hemispherical SIL. Here, inside the medium the propagation angles of the first order diffracted waves point in the same direction as the incident angles from outside the SIL. We realized two types of dSILs: binary phase elements were fabricated in a highly refracting glass (LaSF35) by direct 3-beam writing and successive reactive ion etching, and dSILs with a blazed profile were manufactured in photoresist by holographic lithography. The minimum distance between adjacent zones in the diffracting structure is in the range of one wavelength. Polarization dependencies and phase impacts have to be consideration in the design of an optical element with features this small. In comparison to the lithographically realized binary phase grating, the holographic elements have the advantage of high diffraction efficiency.

Citation Download Citation

Robert Brunner, Joerg Bischoff, Klaus Rudolf, and Margit Ferstl "Diffractive solid immersion lenses: characterization and manufacturing", Proc. SPIE 4449, Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries II, (10 December 2001); https://doi.org/10.1117/12.450099

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