Effects of laser bandwidth on iso-dense bias and line-end shortening at sub-micron process nodes

R. C. Peng; A. K. Yang D.D.S.; L. J. Chen; Y. W. Guo; H. H. Liu; John Lin

doi:10.1117/12.713080

27 March 2007 Effects of laser bandwidth on iso-dense bias and line end shortening at sub-micron process nodes

R. C. Peng, A. K. Yang D.D.S., L. J. Chen, Y. W. Guo, H. H. Liu, John Lin

Proceedings Volume 6520, Optical Microlithography XX; 65203S (2007) https://doi.org/10.1117/12.713080
Event: SPIE Advanced Lithography, 2007, San Jose, California, United States

Abstract

Control of Isolated and Dense line Bias (IDB) and Line End Shortening (LES) in a lithographic process has become increasingly important, particularly for the 65nm node and below. The IDB depends on many factors, for example, focus, lens aberrations, partial coherence and laser spectral bandwidth. This work studies the impact to IDB and LES from changes in laser bandwidth at two sub-micron process nodes. Careful measurements of both FWHM and E95 bandwidth parameters of the laser spectral profile were carried out using two types of spectrometers. The spectral bandwidth was adjusted over a larger range than normally experienced during wafer exposures by carefully varying the laser operating conditions to provide controlled changes in bandwidth while maintaining all other laser performance parameters within specification. Measurements of both linewidth and LES on several substrates were made and correlated with laser bandwidth to determine the sensitivity of IDB and LES to bandwidth variation. The sensitivity of different structures to E95 bandwidth variation was assessed

Citation Download Citation

R. C. Peng, A. K. Yang D.D.S., L. J. Chen, Y. W. Guo, H. H. Liu, and John Lin "Effects of laser bandwidth on iso-dense bias and line end shortening at sub-micron process nodes", Proc. SPIE 6520, Optical Microlithography XX, 65203S (27 March 2007); https://doi.org/10.1117/12.713080

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available