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Alan Khan
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Publications (1)
Proceedings Article | 22 February 2021 Presentation + Paper
Novel diffraction-based overlay metrology utilizing phase-based overlay for improved robustness
Masazumi Matsunobu, Toshiharu Nishiyama, Michio Inoue, Richard Housley, Cornel Bozdog, Justin Lim, Brian Watson, Jason Reece, Steve McCandless, Olger Zwier, Maurits van der Schaar, Murat Bozkurt, Masudur al Arif, Elliott McNamara, Pieter Kapel, Alan Khan, Simon Strom, Paul Turner, Ping Olson, Ewoud van West
Proceedings Volume 11611, 1161126 (2021) https://doi.org/10.1117/12.2584759
KEYWORDS: Overlay metrology, Diffraction, Diffraction gratings, Semiconducting wafers
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