Mr. Balarka Gupta Profile

Balarka Gupta

at KLA Corp

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Publications (1)

Proceedings Article | 8 October 2020 Presentation + Paper

High sensitivity repeater detection with broadband plasma optical wafer inspection for mask defect qualification

Andrew Cross, Kaushik Sah, Vidyasagar Anantha, Balarka Gupta, Ramon Ynzunza, Neil Troy, Kenong Wu, Raghav Babulnath, Meghna Rajendran, Dieter Van den Heuvel, Philippe Leray

Proceedings Volume 11517, 115170U (2020) https://doi.org/10.1117/12.2572912

KEYWORDS: Reticles, Inspection, Wafer inspection, Wafer-level optics, Photomasks, Plasma, Semiconducting wafers, Signal to noise ratio, Algorithm development, Optics manufacturing

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