Mr. Bo-Tak Lim Profile

Bo-Tak Lim

at Samsung Electronics Co. Ltd.

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Author

Publications (3)

Proceedings Article | 27 April 2023 Presentation + Paper

A novel method for improving yield prediction by matching layout pattern and defect inspection

Min-Chul Han, Min-Su Kim, Hyun-Woo Ryoo, Myung-Chul Shin, Do-Youn Park, Chang-Hun Ko, Cheol-Hwan Kim, Masayuki Terai, Jin-Woo Choi, Oh-Hun Kwon, Hye-Sun Kim, Jung-Hoon Park, Kyu-Sul Park, Jae-Ho Pak, Seung-Ryeol Oh, Ji-Hyun Cheon, Bo-Tak Lim, Il-Mok Park, Hyuck-Joon Kwon, Yoon-Jong Song, Jung-Yun Choi, Gwan-Hyeob Koh, Hyung-Jong Ko, Yu-Gyun Shin

Proceedings Volume 12496, 124961N (2023) https://doi.org/10.1117/12.2656206

KEYWORDS: Semiconducting wafers, Defect inspection, Inspection, Yield improvement, Failure analysis, Electrical breakdown, Semiconductors, Manufacturing, Logic, Image classification

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Proceedings Article | 26 May 2022 Poster + Paper

An automated system for detecting systematic defect in memory cell array

Seung-Eun Yu, Oh-Hun Kwon, Tae-Hyeong Ku, Chang-Hun Ko, Tae-Heon Kim, Dong-Won Lim, Bo-Tak Lim, Hyuck-Joon Kwon, Jung-Yun Choi, Hyung-Jong Ko, Ji-Seong Jeong

Proceedings Volume 12053, 120531N (2022) https://doi.org/10.1117/12.2605606

KEYWORDS: Scanning electron microscopy, Optical inspection, Defect detection, Image segmentation, Inspection, Image processing algorithms and systems, Image enhancement, Design for manufacturing, Defect inspection, Visualization

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Proceedings Article | 26 May 2022 Presentation + Paper

A machine learning based framework for correcting the interlayer misalignment of physical design in 3D-NAND flash

Cheol-Hwan Kim, Jong-Min Lee, Ji-Chang Sim, Sang-Eun Go, Hyo-Seok Woo, Dong-Yun Kim, Oh-Hun Kwon, Bo-Tak Lim, Jae-Sun Yun, Hong-Soo Kim, Hyuck-Joon Kwon, Jung-Yun Choi, Hyung-Jong Ko

Proceedings Volume 12052, 120520B (2022) https://doi.org/10.1117/12.2613625

KEYWORDS: Data modeling, Machine learning, Performance modeling, Optical proximity correction, Bridges

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