Dr. Cecilia Dupre Profile

Dr. Cecilia Dupre

at CEA-LETI

SPIE Involvement:

Author

Publications (6)

Proceedings Article | 5 March 2022 Presentation

Multi-purpose 300mm silicon photonics platform for R&D and product prototyping

Bertrand Szelag, Stéphanie Garcia, Jonathan Faugier-Tovar, Laetitia Adelmini, Munique Kazar Mendes, Sylvain Guerber, Léopold Virot, Daivid Fowler, André Myko, Cecilia Dupre, Quentin Wilmart

Proceedings Volume PC12004, PC1200406 (2022) https://doi.org/10.1117/12.2616166

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Proceedings Article | 6 October 2021 Presentation + Paper

Wide-wavelength range AlGaInAs laser array achieved by selective area growth on heterogenerous InP-on-Si wafer

C. Besancon, D. Néel, G. Cerulo, D. Make, N. Vaissiere, F. Pommereau, F. Fournel, L. Sanchez, C. Dupré, V. Muffato, J. Decobert

Proceedings Volume 11880, 118800I (2021) https://doi.org/10.1117/12.2602126

KEYWORDS: Semiconducting wafers, Silicon, Wafer bonding, Coarse wavelength division multiplexing, Photonic integrated circuits

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Proceedings Article | 5 March 2021 Presentation

Advanced roughness characterization for 300mm Si photonics patterning and optimization

Remi Le Tiec, Shimon Levi, Angela Kravtsov, Olga Novak, Cecilia Dupre, Cyril Vannuffel, Tristan Dewolf, Stephanie Garcia, Quentin Wilmart, Jonathan Faugier-Tovar

Proceedings Volume 11690, 116900K (2021) https://doi.org/10.1117/12.2578550

KEYWORDS: Silicon photonics, Silicon, Photonics, Optical lithography, Line edge roughness, Wafer-level optics, Metrology, Line width roughness, Semiconducting wafers

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Proceedings Article | 2 April 2020 Presentation

Hybrid III–V/silicon CMOS-compatible technology for laser integration on 200mm and 300mm platforms (Conference Presentation)

Karim Hassan, Bertrand Szelag, Laetitia Adelmini, Cécilia Dupré, Elodie Ghegin, Philippe Rodriguez, Fabrice Nemouchi, Pierre Brianceau, Antoine Schembri, David Carrara, Pierrick Cavalie, Florent Franchin, Marie-Christine Roure, Loic Sanchez, Christophe Jany, Segolène Olivier

Proceedings Volume 11364, 113640Y (2020) https://doi.org/10.1117/12.2558532

KEYWORDS: Laser applications, Silicon photonics, Wafer bonding, Semiconducting wafers, Optical lithography, Resistance, Back end of line, Transceivers, Data communications, Molecular beam epitaxy

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Proceedings Article | 26 February 2020 Paper

Silicon chip-integrated fiber couplers with sub-decibel loss

Daniel Benedikovic, Carlos Alonso-Ramos, Sylvain Guerber, Cecilia Dupre, Bertrand Szelag, Xavier Le Roux, Pavel Cheben, Daivid Fowler, Guillaume Marcaud, Vladyslav Vakarin, Diego Perez-Galacho, Delphine Marris-Morini, Eric Cassan, Charles Baudot, Frederic Boeuf, Laurent Vivien

Proceedings Volume 11284, 112840L (2020) https://doi.org/10.1117/12.2543489

KEYWORDS: Silicon, Fiber couplers, Waveguides, Optical design, Nanophotonics, Diffraction gratings, Metamaterials, Lithography, Interfaces, Deep ultraviolet

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Proceedings Article | 3 April 2008 Paper

Paving the way for multiple applications for the 3D-AFM technique in the semiconductor industry

J. Foucher, E. Pargon, M. Martin, S. Reyne, C. Dupré

Proceedings Volume 6922, 69220F (2008) https://doi.org/10.1117/12.772675

KEYWORDS: Photoresist processing, Silicon, Line width roughness, FT-IR spectroscopy, Plasma, Semiconductors, Chemical analysis, Plasma etching, Process control, Optical lithography

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Showing 5 of 6 publications

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