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Dr. Gurpreet Singh
Post Doctoral Researcher at IBM Research - Almaden
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Publications (1)
Proceedings Article | 19 March 2015 Paper
Customization and design of directed self-assembly using hybrid prepatterns
Joy Cheng, Gregory Doerk, Charles Rettner, Gurpreet Singh, Melia Tjio, Hoa Truong, Noel Arellano, Srinivasan Balakrishnan, Markus Brink, Hsinyu Tsai, Chi-Chun Liu, Michael Guillorn, Daniel Sanders
Proceedings Volume 9423, 942307 (2015) https://doi.org/10.1117/12.2086973
KEYWORDS: Picosecond phenomena, Polymethylmethacrylate, System on a chip, Scanning electron microscopy, Image segmentation, Photomasks, Etching, Electron beam lithography, Composites, Directed self assembly
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