Mr. Hemant Vats Profile

Hemant Vats

at imec

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Publications (2)

Proceedings Article | 12 November 2024 Presentation + Paper

Logic and memory patterning breakthrough using High-NA lithography

V. Blanco Carballo, S. Roy, B. Chowrira, T. Pham, J. Wouters, S. Das, S. Decoster, P. Leray, R. Liu, K. Ronse, G. Vandenberghe, A. Niroomand, P. Foubert, V. Rutigliani, H. Suh, M. Gupta, D. de Simone, M. Dusa, C. Beral, V. Philipsen, V. Wiaux, J. Franke, J. Bekaert, B. Baskaran, W. Gillijns, R. Kim, Y. Sherazi, H. Vats, M. Cupak, C. Chang, Y.-J. Lin, J. Lee, S. Hwang, K. Yang, K. Miyaguchi

Proceedings Volume 13216, 1321604 (2024) https://doi.org/10.1117/12.3047176

KEYWORDS: Metals, Optical lithography, Logic, Semiconducting wafers, Extreme ultraviolet lithography, Etching, Scanning electron microscopy, Lithography, Tin

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Proceedings Article | 4 June 2019 Paper

Electrically measurable test structures to capture and classify EUV stochastics

Hemant Vats, Ryan Ryoung Han Kim, Yasser Sherazi, Youssef Drissi, Kurt Ronse

Proceedings Volume 10957, 109571M (2019) https://doi.org/10.1117/12.2515418

KEYWORDS: Transistors, Logic, Extreme ultraviolet, Stochastic processes, Metals, Printing, Bridges, Semiconducting wafers, Optical lithography, Lithography

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