Dr. Inho Shin Profile

Dr. Inho Shin

at SAMSUNG Electronics Co Ltd

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Author

Publications (3)

Proceedings Article | 15 August 2023 Presentation + Paper

Improving the accuracy and precision of OCD measurement by systematic error correction in self-interference pupil ellipsometry

Seungwoo Lee, Yeeun Park, Seungryeol Lee, Hoonchul Chang, Jaehwang Jung, Inho Shin, Seoyeon Jeong, Sooyeong Lee, Jinwoo Ahn, Taejoong Kim, Taeyong Jo, Myungjun Lee

Proceedings Volume 12618, 126180B (2023) https://doi.org/10.1117/12.2677195

KEYWORDS: Objectives, Beam splitters, Polarization, Temperature metrology, Ellipsometry, Error analysis, Optical components

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Proceedings Article | 13 June 2022 Presentation

Interferometric ellipsometry for massive angular spectra to overcome sensitivity limitation in device metrology

Jaehwang Jung, Jinseob Kim, Jinyong Kim, Seungwoo Lee, Seoyeon Jeong, Inho Shin, Wookrae Kim, Changhoon Choi, Myungjun Lee

Proceedings Volume 12053, 120530R (2022) https://doi.org/10.1117/12.2607442

KEYWORDS: Ellipsometry, Metrology, Interferometry, Semiconducting wafers, Wafer-level optics, Spectroscopic ellipsometry, Silica, Optical metrology, Microscopy, Mathematical modeling

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Proceedings Article | 1 August 2021 Presentation + Paper

A new approach in optical metrology with multi-angle information through self-interferometric ellipsometry

Wookrae Kim, Jaehwang Jung, Jinseob Kim, Inho Shin, Namyoon Kim, Myungjun Lee

Proceedings Volume 11817, 1181707 (2021) https://doi.org/10.1117/12.2593375

KEYWORDS: Ellipsometry, Metrology, Semiconducting wafers, Reconstruction algorithms, Semiconductors, Polarization, Objectives, Image sensors, Optical metrology, Linear polarizers

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