Dr. Inkeun Baek Profile

Dr. Inkeun Baek

at SAMSUNG Electronics Co Ltd

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Publications (1)

Proceedings Article | 10 April 2024 Presentation + Paper

Non-contact measurement of dopant depth profile with terahertz emission spectroscopy

Kenji Suzuki, Fumikazu Murakami, Inkeun Baek, Mitsunori Numata, Ingi Kim, Ryu Sungyoon, Shinji Ueyama, Yusin Yang, Masayoshi Tonouchi

Proceedings Volume 12955, 1295506 (2024) https://doi.org/10.1117/12.3010681

KEYWORDS: Terahertz radiation, Inspection, Dopants, Transmittance, Terahertz spectroscopy, Optical simulations, Emission spectroscopy, Statistical modeling, Silicon, Pulse signals

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