CONFERENCE PROCEEDINGS
Advanced Search
Shinji Ueyama
at Samsung R&D Institute Japan
SPIE Involvement:
Author
Publications (4)
Proceedings Article | 10 April 2024 Presentation + Paper
Non-contact measurement of dopant depth profile with terahertz emission spectroscopy
Kenji Suzuki, Fumikazu Murakami, Inkeun Baek, Mitsunori Numata, Ingi Kim, Ryu Sungyoon, Shinji Ueyama, Yusin Yang, Masayoshi Tonouchi
Proceedings Volume 12955, 1295506 (2024) https://doi.org/10.1117/12.3010681
KEYWORDS: Terahertz radiation, Inspection, Dopants, Transmittance, Terahertz spectroscopy, Optical simulations, Emission spectroscopy, Statistical modeling, Silicon, Pulse signals
Proceedings Article | 26 May 2022 Presentation + Paper
Sensitivity and repeatability performance on overlay and CD measurement by incorporating hologram based ellipsometry
Proceedings Volume 12053, 1205311 (2022) https://doi.org/10.1117/12.2614734
KEYWORDS: Holograms, Ellipsometry, Overlay metrology, Polarization, Critical dimension metrology, Metrology, Image sensors, Reflectivity, Objectives, Semiconducting wafers
Proceedings Article | 26 May 2022 Presentation + Paper
High-speed wafer magnetic field inspection for semiconductor manufacturing
Shinji Ueyama, Jinseob Kim, Mitsunori Numata, Wookrae Kim, Ingi Kim, Myungjun Lee
Proceedings Volume 12053, 120530G (2022) https://doi.org/10.1117/12.2614750
KEYWORDS: Magnetism, Inspection, Semiconducting wafers, Sensors, Objectives, Cameras, Wafer inspection, Light sources, Kerr effect, Image filtering
Proceedings Article | 15 March 2021 Presentation + Paper
A breakthrough on throughput and accuracy limitation in ellipsometry using self-interference holographic analysis
Proceedings Volume 11611, 116111J (2021) https://doi.org/10.1117/12.2581555
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top