Dr. Sungyoon Ryu
at SAMSUNG Electronics Co Ltd
SPIE Involvement:
Author
Publications (11)

SPIE Journal Paper | 10 October 2024 Open Access
JM3, Vol. 23, Issue 04, 044002, (October 2024) https://doi.org/10.1117/12.10.1117/1.JMM.23.4.044002
KEYWORDS: Intelligence systems, Semiconducting wafers, Etching, Defect detection, Deep learning, Scanning electron microscopy, Nanostructures, Inspection, Hyperspectral imaging, Metrology

Proceedings Article | 10 April 2024 Presentation + Paper
Kenji Suzuki, Fumikazu Murakami, Inkeun Baek, Mitsunori Numata, Ingi Kim, Ryu Sungyoon, Shinji Ueyama, Yusin Yang, Masayoshi Tonouchi
Proceedings Volume 12955, 1295506 (2024) https://doi.org/10.1117/12.3010681
KEYWORDS: Terahertz radiation, Inspection, Dopants, Transmittance, Terahertz spectroscopy, Optical simulations, Emission spectroscopy, Statistical modeling, Silicon, Pulse signals

Proceedings Article | 5 June 2023 Presentation + Paper
Proceedings Volume 12569, 1256904 (2023) https://doi.org/10.1117/12.2657070
KEYWORDS: Oxides, Second harmonic generation, Interfaces, Annealing, Silicon, Electric fields, Electrical properties, Dielectrics, Silicon films, Wafer inspection

Proceedings Article | 27 April 2023 Presentation + Paper
Proceedings Volume 12496, 124961F (2023) https://doi.org/10.1117/12.2657062
KEYWORDS: Intelligence systems, Semiconducting wafers, Deep learning, 3D metrology, Hyperspectral imaging, Etching, Metrology, 3D modeling, Imaging spectroscopy, Defect detection

Proceedings Article | 27 April 2023 Presentation + Paper
Proceedings Volume 12496, 124961Y (2023) https://doi.org/10.1117/12.2657064
KEYWORDS: Semiconducting wafers, Signal detection, Defect detection, Metrology, Signal processing, Semiconductors, Semiconductor manufacturing, Fourier transforms, Fabrication

Showing 5 of 11 publications
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