Ms. Iona Binnie Profile

Iona Binnie

at Univ of Colorado Boulder

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Publications (2)

Proceedings Article | 30 April 2023 Presentation

High-fidelity actinic ptychographic imaging of EUV photomasks enabled by illumination engineering

Bin Wang, Nathan Brooks, Iona Binnie, Michael Tanksalvala, Yuka Esashi, Nicholas Jenkins, Margaret Murnane, Henry Kapteyn

Proceedings Volume 12496, 124960A (2023) https://doi.org/10.1117/12.2670528

KEYWORDS: Metrology, Light sources, Extreme ultraviolet, Photomasks, Illumination engineering, Diffraction, Signal processing, Phase shift keying, Light sources and illumination, Beam divergence

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Proceedings Article | 1 December 2022 Presentation + Paper

Robust and reliable actinic ptychographic imaging of highly periodic structures in EUV photomasks

Bin Wang, Nathan Brooks, Michael Tanksalvala, Yuka Esashi, Nicolas Jenkins, Peter Johnsen, Iona Binnie, Guan Gui, YunZhe Shao, Margaret Murnane, Henry Kapteyn

Proceedings Volume 12293, 122930D (2022) https://doi.org/10.1117/12.2641726

KEYWORDS: Extreme ultraviolet, Photomasks, Diffraction, Imaging systems, Microscopes, High harmonic generation, Phase retrieval, Reticles

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