Prof. Harald Schenk Profile

Prof. Harald Schenk

Director Fraunhofer IPMS at Fraunhofer-Institut für Photonische Mikrosysteme

SPIE Involvement:

Editorial Board Member: Journal of Optical Microsystems | Author | Editor

Area of Expertise:

MEMS , optical MEMS , MOEMS , micro machining , light modulators , actuators

Websites:

Company Website

Profile Summary

Application focused Research and Development of MEMS and MEMS based systems including design, simulation, process integration and pilot fabrication. Special Know-how and experience in micro scanning mirrors (e. g. for projection, metrology and imaging) light modulators (e. g. for lithography, adaptive optics), electrostatic micro and nano actuators, MEMS process technology incl. CMOS integration, MEMS reliability and product qualification, project management.
More than 140 publications and more than 20 patents/patent applications.
Professor for Micro- and Nanosystems at Brandenburg Technical University, Cottbus. Director of Fraunhofer IPMS, Dresden. Co-founder of HiperScan (NIR micro spectrometers and spectroscopic solutions)

Publications (101)

Proceedings Article | 11 March 2024 Presentation + Paper

Presentation + Paper

Design, fabrication, and characterization of integrated optical through-silicon waveguides for 3D photonic interconnections

Francesco Villasmunta, Patrick Steglich, Claus Villringer, Sigurd Schrader, Harald Schenk, Andreas Mai, Martin Regehly

Proceedings Volume 12892, 128920I (2024) https://doi.org/10.1117/12.3003146

KEYWORDS: Waveguides, Etching, Cryogenics, Silicon, Fabrication, Design, Semiconducting wafers, Deep reactive ion etching, Optical interconnects, 3D microstructuring, Integrated photonics, Silicon photonics, Electromagnetic simulation

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SPIE Journal Paper | 10 August 2022 Open Access

Open Access

Characterization of two-photon-polymerization lithography structures via Raman spectroscopy and nanoindentation

Severin Schweiger, Tim Schulze, Simon Schlipf, Peter Reinig, Harald Schenk

JOM, Vol. 2, Issue 03, 033501, (August 2022) https://doi.org/10.1117/12.10.1117/1.JOM.2.3.033501

KEYWORDS: Raman spectroscopy, Photoresist materials, Lithography, Polymers, Optical microsystems, Additive manufacturing, Two photon polymerization, Laser scattering, Polymerization, Photomicroscopy

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Proceedings Article | 28 February 2020 Paper

Paper

Minimization of nonlinearities in nano electrostatic drive actuators using validated coupled-field simulation

Anton Melnikov, Hermann A. G. Schenk, Franziska Wall, Barbara Spitz, Lutz Ehrig, Sergiu Langa, Michael Stolz, Bert Kaiser, Holger Conrad, Harald Schenk

Proceedings Volume 11293, 112930D (2020) https://doi.org/10.1117/12.2551271

KEYWORDS: Actuators, Finite element methods, Silicon, Microelectromechanical systems, Solids, Capacitors, Differential equations, Complex systems, Acoustics

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Proceedings Article | 20 March 2018 Open Access

Open Access

Paper

Advances in MOEMS technologies for high quality imaging systems

Harald Schenk, Michael Wagner, Jan Grahmann, André Merten

Proceedings Volume 10587, 1058703 (2018) https://doi.org/10.1117/12.2297399

KEYWORDS: Mirrors, Micromirrors, Scanners, Microopto electromechanical systems, Phased array optics, Coating, Analog electronics, Beam steering, Imaging systems, Laser marking

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Proceedings Article | 20 February 2017 Presentation + Paper

Presentation + Paper

A contribution to the expansion of the applicability of electrostatic forces in micro transducers

Harald Schenk, Holger Conrad, Matthieu Gaudet, Sebastian Uhlig, Bert Kaiser, Sergiu Langa, Michael Stolz, Klaus Schimmanz

Proceedings Volume 10116, 1011603 (2017) https://doi.org/10.1117/12.2249575

KEYWORDS: Actuators, Transducers, Microelectromechanical systems, Electrodes, Semiconducting wafers, Surface micromachining, Field emission displays, Silicon, Etching, Aluminum

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Proceedings Article | 27 February 2015 Paper

Paper

Spatially resolved contrast measurement of diffractive micromirror arrays

Cornelius Sicker, Jörg Heber, Dirk Berndt, Florian Rückerl, Jean-Yves Tinevez, Spencer Shorte, Michael Wagner, Harald Schenk

Proceedings Volume 9375, 93750D (2015) https://doi.org/10.1117/12.2076921

KEYWORDS: Micromirrors, Diffraction, Scatter measurement, Mirrors, Light scattering, Cameras, Sensors, Interferometry, CCD cameras, Stray light

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Proceedings Article | 8 February 2015 Paper

Paper

Widely tunable quantum cascade lasers for spectroscopic sensing

J. Wagner, R. Ostendorf, J. Grahmann, A. Merten, S. Hugger, Jan Philip Jarvis, F. Fuchs, D. Boskovic, H. Schenk

Proceedings Volume 9370, 937012 (2015) https://doi.org/10.1117/12.2082794

KEYWORDS: Microopto electromechanical systems, Spectroscopy, Imaging spectroscopy, Quantum cascade lasers, Explosives, Backscatter, Chemical analysis, Mirrors, Diffraction gratings, Scanners

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Proceedings Article | 21 May 2014 Paper

Paper

Development, characterization and application of compact spectrometers based on MEMS with in-plane capacitive drives

A. Kenda, M. Kraft, A. Tortschanoff, Werner Scherf, T. Sandner, Harald Schenk, Stephan Luettjohann, A. Simon

Proceedings Volume 9101, 910102 (2014) https://doi.org/10.1117/12.2053347

KEYWORDS: Microelectromechanical systems, Spectrometers, Mirrors, Signal to noise ratio, Sensors, FT-IR spectroscopy, Spectral resolution, Near infrared, Packaging, System integration

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SPIE Journal Paper | 20 March 2014

Translatory MOEMS actuator and system integration for miniaturized Fourier transform spectrometers

Thilo Sandner, Thomas Grasshoff, Eric Gaumont, Harald Schenk, Andreas Kenda

JM3, Vol. 13, Issue 01, 011115, (March 2014) https://doi.org/10.1117/12.10.1117/1.JMM.13.1.011115

KEYWORDS: Microelectromechanical systems, Mirrors, Protactinium, Fourier transforms, Microopto electromechanical systems, Actuators, System integration, Spectrometers, FT-IR spectroscopy, Prototyping

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Proceedings Article | 8 March 2014 Paper

Paper

Micro-scanning mirrors for high-power laser applications in laser surgery

Thilo Sandner, Simon Kimme, Thomas Grasshoff, Ulrich Todt, Alexander Graf, Cristian Tulea, Achim Lenenbach, Harald Schenk

Proceedings Volume 8977, 897705 (2014) https://doi.org/10.1117/12.2042671

KEYWORDS: Mirrors, Microelectromechanical systems, Scanners, Laser cutting, Magnetism, Laser scanners, 3D scanning, Reflectivity, Optical coatings, Dielectrics

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Proceedings Article | 8 March 2014 Paper

Paper

Quasi-static microscanner with linearized scanning for an adaptive 3D laser camera

Thilo Sandner, Thomas Grasshoff, Markus Schwarzenberg, Richard Schroedter, Harald Schenk

Proceedings Volume 8977, 897717 (2014) https://doi.org/10.1117/12.2064898

KEYWORDS: Mirrors, Microelectromechanical systems, Stereoscopic cameras, Sensors, 3D-TOF imaging, Laser scanners, Distance measurement, Cameras, 3D metrology, Raster graphics

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Proceedings Article | 7 March 2014 Paper

Paper

Tunable External Cavity Quantum Cascade Lasers (EC-QCL): an application field for MOEMS based scanning gratings

Jan Grahmann, André Merten, Ralf Ostendorf, Michael Fontenot, Daniela Bleh, Harald Schenk, Hans-Joachim Wagner

Proceedings Volume 8977, 897708 (2014) https://doi.org/10.1117/12.2039950

KEYWORDS: Mirrors, Quantum cascade lasers, Microopto electromechanical systems, Silicon, Etching, Chemical analysis, Micromirrors, Collimation, Tolerancing, Spectrometers

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SPIE Journal Paper | 20 February 2014

Quasistatic microscanner with linearized scanning for an adaptive three-dimensional laser camera

Thilo Sandner, Thomas Grasshoff, Markus Schwarzenberg, Richard Schroedter, Harald Schenk

JM3, Vol. 13, Issue 01, 011114, (February 2014) https://doi.org/10.1117/12.10.1117/1.JMM.13.1.011114

KEYWORDS: Mirrors, Microelectromechanical systems, Cameras, Stereoscopic cameras, 3D scanning, 3D-TOF imaging, Sensors, 3D acquisition, Distance measurement, Raster graphics

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Proceedings Article | 29 May 2013 Paper

Paper

First application close measurements applying the new hybrid integrated MEMS spectrometer

Heinrich Grüger, Tino Pügner, Jens Knobbe, Harald Schenk

Proceedings Volume 8726, 872609 (2013) https://doi.org/10.1117/12.2016085

KEYWORDS: Spectroscopy, Microelectromechanical systems, Optical design, Sensors, Mirrors, Optical benches, Reflectivity, Near infrared, Spectral resolution, Electronics

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Proceedings Article | 13 March 2013 Paper

Paper

Design and characterization of a hybrid-integrated MEMS scanning grating spectrometer

Heinrich Grüger, Jens Knobbe, Tino Pügner, Harald Schenk

Proceedings Volume 8616, 86160L (2013) https://doi.org/10.1117/12.2004215

KEYWORDS: Microelectromechanical systems, Spectroscopy, Mirrors, Sensors, Optical design, Silicon, Near infrared, Etching, Position sensors, Semiconducting wafers

Read Abstract +

Grating spectrometer, like the well-established Czerny-Turner, are based on an optical design consisting of several components. Typically at least two slits, two mirrors, the grating stage and a detector are required. There has been much work to reduce this effort, setups using only one mirror (Ebert - Fastie) or the replacement of the entrance slit through the use of thin optical fibers as well as integrated electronic detector arrays instead of a moving grating and an exit slit and single detector device have been applied. Reduced effort comes along with performance limitations: Either the optical resolution or throughput is affected or the use of the system is limited to the availability of detectors arrays with reasonable price. Components in micro opto electro mechanical systems (MOEMS-) technology and spectroscopic systems based thereon have been developed to improve this situation. Miniaturized scanning gratings fabricated on bonded silicon on insulator (BSOI-) wafers were used to design grating spectrometer for the near infrared requiring single detectors only. Discrete components offer flexibility but also need for adjustment of two mirrors, grating stage, fiber mount and the detector with its slit and optionally a second slit in the entrance area. Further development leads towards the integration of the slits into the MOEMS chip, thus less effort for adjustment. Flexibility might be reduced as adjustments of the optical design or grating spacing would require a new chip with own set of masks. Nevertheless if extreme miniaturization is desired this approach seems to be promising. Besides this, high volume production might be able for a comparable low price. A new chip was developed offering grating, two slits and a cavity for the detector chip. The optical design was adjusted to a planar arrangement of grating and slits. A detector buried in a chip cavity required a new mounting strategy. Other optical components were optimized and fabricated then the systems was assembled with electronics and software adjusted to the new design including some new features like integrated position sensors. A first test of systems to grant function of all components is presented. Further work will be aimed at improved performance like higher resolution and lower SNR.

Proceedings Article | 9 March 2013 Paper

Paper

Wafer level vacuum packaging of scanning micro-mirrors using glass-frit and anodic bonding methods

S. Langa, C. Drabe, C. Kunath, A. Dreyhaupt, H. Schenk

Proceedings Volume 8614, 86140F (2013) https://doi.org/10.1117/12.2003525

KEYWORDS: Semiconducting wafers, Glasses, Micromirrors, Wafer bonding, Packaging, Interfaces, Silicon, Actuators, Laser bonding, Microelectromechanical systems

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Proceedings Article | 18 May 2012 Paper

Paper

Realization of a hybrid-integrated MEMS scanning grating spectrometer

Tino Pügner, Jens Knobbe, Heinrich Grüger, Harald Schenk

Proceedings Volume 8374, 83740W (2012) https://doi.org/10.1117/12.919068

KEYWORDS: Microelectromechanical systems, Spectroscopy, Mirrors, Optics manufacturing, Near infrared, Manufacturing, Spectroscopes, Sensors, Adhesives, Monochromators

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Proceedings Article | 18 February 2012 Paper

Paper

Translatory MEMS actuator and their system integration for miniaturized Fourier transform spectrometers

Thilo Sandner, Thomas Grasshoff, Harald Schenk, Andreas Kenda

Proceedings Volume 8252, 82520C (2012) https://doi.org/10.1117/12.909817

KEYWORDS: Microelectromechanical systems, Mirrors, Microopto electromechanical systems, Actuators, Prototyping, Spectrometers, FT-IR spectroscopy, Fourier transforms, Protactinium, System integration

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Proceedings Article | 16 February 2012 Paper

Paper

Vertical comb drive microscanners for beam steering, linear scanning, and laser projection applications

Denis Jung, Thilo Sandner, David Kallweit, Harald Schenk

Proceedings Volume 8252, 82520U (2012) https://doi.org/10.1117/12.906690

KEYWORDS: Mirrors, Semiconducting wafers, Electrodes, Wafer bonding, Scalable video coding, Scanners, Beam steering, Micromirrors, Laser applications, Instrument modeling

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Proceedings Article | 16 February 2012 Paper

Paper

Optical position feedback for electrostatically driven MOEMS scanners

A. Tortschanoff, M. Baumgart, A. Frank, M. Wildenhain, T. Sandner, H. Schenk, A. Kenda

Proceedings Volume 8252, 82520S (2012) https://doi.org/10.1117/12.907761

KEYWORDS: Mirrors, Microopto electromechanical systems, Diodes, Scanners, Sensors, Photodiodes, Microelectromechanical systems, Photodetectors, Error analysis, Motion measurement

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Proceedings Article | 16 February 2012 Paper

Paper

Laser projector solution based on two 1D resonant scanning micromirrors assembled in a low vertical distortion scan head

Jan Grahmann, Michael Wildenhain, Thomas Grasshoff, Christian Gerwig, Hans-Georg Dallmann, Alexander Wolter, Harald Schenk

Proceedings Volume 8252, 825205 (2012) https://doi.org/10.1117/12.910671

KEYWORDS: Mirrors, Head, Distortion, Micromirrors, Scanners, Projection systems, Video processing, Manufacturing, RGB color model, Video

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Proceedings Article | 16 February 2012 Paper

Paper

Bi-resonant scanning mirror with piezoresistive position sensor for WVGA laser projection systems

Christian Drabe, David Kallweit, André Dreyhaupt, Jan Grahmann, Harald Schenk, Wyatt Davis

Proceedings Volume 8252, 825209 (2012) https://doi.org/10.1117/12.910203

KEYWORDS: Mirrors, Sensors, Etching, Silicon, Boron, Projection systems, Microelectromechanical systems, Semiconducting wafers, Crystals, Scanning electron microscopy

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Proceedings Article | 22 September 2011 Paper

Paper

Design of a hybrid-integrated MEMS scanning grating spectrometer

Tino Pügner, Jens Knobbe, Heinrich Grüger, Harald Schenk

Proceedings Volume 8167, 816718 (2011) https://doi.org/10.1117/12.896872

KEYWORDS: Spectroscopy, Microelectromechanical systems, Mirrors, Sensors, Optical design, Near infrared, Diffraction gratings, Stray light, Monochromators, Optical fibers

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Proceedings Article | 14 February 2011 Paper

Paper

In situ surface topography measurement of MOEMS structures under laser exposure

Alexander Mai, Mathias Krellmann, Steffen Sinning, Steffen Wolschke, Ulrike Dauderstädt, Harald Schenk, Dieter Schmeißer, Michael Wagner

Proceedings Volume 7930, 793010 (2011) https://doi.org/10.1117/12.877062

KEYWORDS: Mirrors, Micromirrors, Interferometers, Spatial light modulators, In situ metrology, Microopto electromechanical systems, Error analysis, Interferometry, Objectives, Phase shifts

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Proceedings Article | 14 February 2011 Paper

Paper

Out-of-plane translatory MEMS actuator with extraordinary large stroke for optical path length modulation

Thilo Sandner, Thomas Grasshoff, Harald Schenk, Andreas Kenda

Proceedings Volume 7930, 79300I (2011) https://doi.org/10.1117/12.879069

KEYWORDS: Microelectromechanical systems, Mirrors, Prototyping, Actuators, FT-IR spectroscopy, Microopto electromechanical systems, Protactinium, Modulation, Spectrometers, Packaging

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Proceedings Article | 14 February 2011 Paper

Paper

Integrated piezoresistive position detection for electrostatic driven micro scanning mirrors

Jan Grahmann, Thomas Graßhoff, Holger Conrad, Thilo Sandner, Harald Schenk

Proceedings Volume 7930, 79300V (2011) https://doi.org/10.1117/12.874979

KEYWORDS: Sensors, Mirrors, Resistance, Bridges, Micromirrors, Piezoresistive sensors, Silicon, Resistors, Doping, Crystals

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Proceedings Article | 14 February 2011 Paper

Paper

Optical position feedback and phase control of resonant 1D and 2D MOEMS-scanners

A. Tortschanoff, A. Frank, M. Wildenhain, H. Tetikol, T. Sandner, H. Schenk, A. Kenda

Proceedings Volume 7930, 79300S (2011) https://doi.org/10.1117/12.873261

KEYWORDS: Mirrors, Microopto electromechanical systems, Electronics, Microelectromechanical systems, Scanners, Control systems, Photodiodes, Sensors, Digital signal processing, Diodes

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Proceedings Article | 18 February 2010 Paper

Paper

Miniaturized MEMS-based spectrometric sensor for process control and analysis of carbonated beverages

A. Kenda, M. Kraft, A. Tortschanoff, Ch. Wagner, B. Lendl, T. Sandner, H. Schenk

Proceedings Volume 7594, 75940U (2010) https://doi.org/10.1117/12.841957

KEYWORDS: Spectrometers, Microelectromechanical systems, Sensors, Mirrors, Carbon dioxide, Calibration, Spectral resolution, Absorption, FT-IR spectroscopy, Spectroscopy

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Proceedings Article | 18 February 2010 Paper

Paper

Large aperture MEMS scanner module for 3D distance measurement

Thilo Sandner, Michael Wildenhain, Christian Gerwig, Harald Schenk, Sfefan Schwarzer, Harald Wölfelschneider

Proceedings Volume 7594, 75940D (2010) https://doi.org/10.1117/12.844926

KEYWORDS: Scanners, Mirrors, Microelectromechanical systems, LIDAR, 3D scanning, Laser scanners, Distance measurement, Optical components, Sensors, Receivers

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Proceedings Article | 18 February 2010 Paper

Paper

Synchronized microscanner array for large aperture receiver optics of LIDAR systems

Thilo Sandner, Thomas Grasshoff, Michael Wildenhain, Harald Schenk

Proceedings Volume 7594, 75940C (2010) https://doi.org/10.1117/12.844923

KEYWORDS: Scanners, Mirrors, Microelectromechanical systems, LIDAR, 3D scanning, Laser scanners, Micromirrors, Distance measurement, Silicon, Optical components

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Proceedings Article | 17 February 2010 Paper

Paper

MEMS devices for laser camera systems for endoscopic applications

Christian Drabe, Richard James, Harald Schenk, Thilo Sandner

Proceedings Volume 7594, 759404 (2010) https://doi.org/10.1117/12.846855

KEYWORDS: Mirrors, Imaging systems, Cameras, Microelectromechanical systems, Photography, Laser applications, Video, Scanners, Laser systems engineering, Control systems

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Proceedings Article | 17 February 2010 Paper

Paper

Optical position feedback and phase control of MOEMS scanner mirrors

A. Tortschanoff, M. Lenzhofer, A. Frank, M. Wildenhain, T. Sandner, H. Schenk, A. Kenda

Proceedings Volume 7594, 75940K (2010) https://doi.org/10.1117/12.840629

KEYWORDS: Mirrors, Microopto electromechanical systems, Diodes, Temperature metrology, Electronics, Scanners, Feedback control, Control systems, Phase measurement, Optical sensing

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Proceedings Article | 5 February 2010 Paper

Paper

Optical inspection of MOEMS devices using a configurable and suitable for production image processing system

M. Scholles, M. Grafe, P. Miskowiec, V. Bock, H. Schenk

Proceedings Volume 7592, 75920L (2010) https://doi.org/10.1117/12.845075

KEYWORDS: Mirrors, Semiconducting wafers, Optical inspection, Image processing, Microopto electromechanical systems, Particles, Optical testing, Teeth, Micromirrors, Microelectromechanical systems

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Proceedings Article | 19 May 2009 Paper

Paper

Aluminium nitride: a promising and full CMOS compatible piezoelectric material for MOEMS applications

Holger Conrad, Jan Uwe Schmidt, Wolfram Pufe, Fabian Zimmer, Thilo Sandner, Harald Schenk, Hubert Lakner

Proceedings Volume 7362, 73620J (2009) https://doi.org/10.1117/12.821715

KEYWORDS: Aluminum nitride, Silicon, Semiconducting wafers, Thin films, Sputter deposition, Finite element methods, X-ray diffraction, Microopto electromechanical systems, Crystals, Diffraction

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Proceedings Article | 19 May 2009 Paper

Paper

Position encoding and closed loop control of MOEMS translatory actuators

M. Lenzhofer, A. Tortschanoff, A. Frank, T. Sandner, H. Schenk, M. Kraft, A. Kenda

Proceedings Volume 7362, 736212 (2009) https://doi.org/10.1117/12.820335

KEYWORDS: Mirrors, Microopto electromechanical systems, Signal detection, Control systems, Interferometers, FT-IR spectroscopy, Spectrometers, Modulation, Sensors, Analog electronics

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Proceedings Article | 29 April 2009 Paper

Paper

Diffractive MEMS components, systems, and applications

Heinrich Grüger, Thomas Egloff, Tino Pügner, Michael Scholles, Harald Schenk, Hubert Lakner

Proceedings Volume 7319, 73190G (2009) https://doi.org/10.1117/12.818465

KEYWORDS: Microelectromechanical systems, Spectrometers, Spectroscopy, Sensors, Near infrared, Imaging systems, Signal processing, Imaging spectroscopy, Process control, Indium gallium arsenide

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Proceedings Article | 29 April 2009 Paper

Paper

Large stroke MOEMS actuators for optical path length modulation in miniaturized FTIR spectrometers

Thilo Sandner, Christian Drabe, Harald Schenk, Andreas Kenda

Proceedings Volume 7319, 73190H (2009) https://doi.org/10.1117/12.818605

KEYWORDS: Microopto electromechanical systems, Mirrors, FT-IR spectroscopy, Protactinium, Spectroscopy, Actuators, Spectral resolution, Infrared spectroscopy, Modulation, Packaging

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Proceedings Article | 29 April 2009 Paper

Paper

Improved MOEMS-based ultra-rapid Fourier transform infrared spectrometer

A. Tortschanoff, A. Kenda, M. Kraft, T. Sandner, H. Schenk, W. Scherf

Proceedings Volume 7319, 73190I (2009) https://doi.org/10.1117/12.818646

KEYWORDS: Mirrors, Microopto electromechanical systems, FT-IR spectroscopy, Spectroscopy, Infrared spectroscopy, Infrared sensors, Sensors, Signal to noise ratio, Actuators, Infrared radiation

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Proceedings Article | 24 February 2009 Paper

Paper

The high versatility of silicon based micro-optical modulators

Harald Schenk

Proceedings Volume 7208, 720802 (2009) https://doi.org/10.1117/12.828322

KEYWORDS: Mirrors, Micromirrors, Modulators, Silicon, Adaptive optics, Analog electronics, Scanners, Electrodes, Projection systems, Microelectromechanical systems

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Proceedings Article | 24 February 2009 Paper

Paper

Fabrication of 3D comb drive microscanners by mechanically induced permanent displacement

D. Jung, D. Kallweit, T. Sandner, H. Conrad, H. Schenk, H. Lakner

Proceedings Volume 7208, 72080A (2009) https://doi.org/10.1117/12.808210

KEYWORDS: Semiconducting wafers, Electrodes, Mirrors, Scalable video coding, Adhesives, Solids, Oxides, Silicon, Aluminum, Etching

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Proceedings Article | 24 February 2009 Paper

Paper

Scanning photon microscope based on a MEMS 2D scanner mirror

Heinrich Grüger, Jens Knobbe, Thomas Egloff, Marc Althaus, Michael Scholles, Harald Schenk

Proceedings Volume 7208, 72080O (2009) https://doi.org/10.1117/12.808139

KEYWORDS: Mirrors, Microscopes, Scanners, Sensors, Signal detection, Microelectromechanical systems, Raman spectroscopy, Luminescence, Scanning probe microscopy, Photonic microstructures

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Proceedings Article | 19 February 2009 Paper

Paper

Fabrication of large-scale monocrystalline silicon micro-mirror arrays using adhesive wafer transfer bonding

Fabian Zimmer, Frank Niklaus, Martin Lapisa, Thomas Ludewig, Martin Bring, Martin Friedrichs, Thor Bakke, Harald Schenk, Wouter van der Wijngaart

Proceedings Volume 7208, 720807 (2009) https://doi.org/10.1117/12.808694

KEYWORDS: Silicon, Semiconducting wafers, Mirrors, Micromirrors, Wafer bonding, Adhesives, Oxides, Etching, Electrodes, Metals

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Proceedings Article | 19 February 2009 Paper

Paper

Integrated position sensing for 2D microscanning mirrors using the SOI device layer as the piezoresistive mechanical-elastic transformer

Jan Grahmann, Holger Conrad, Thilo Sandner, Thomas Klose, Harald Schenk

Proceedings Volume 7208, 720808 (2009) https://doi.org/10.1117/12.808151

KEYWORDS: Mirrors, Sensors, Micromirrors, Resistance, Transformers, Piezoresistive sensors, Position sensors, Silicon, Bridges, Wheatstone bridges

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SPIE Journal Paper | 1 April 2008

Translatory MEMS actuators for optical path length modulation in miniaturized Fourier-transform infrared spectrometers

Thilo Sandner, Christian Drabe, Harald Schenk, Andreas Kenda, Werner Scherf

JM3, Vol. 7, Issue 02, 021006, (April 2008) https://doi.org/10.1117/12.10.1117/1.2945227

KEYWORDS: Mirrors, FT-IR spectroscopy, Microopto electromechanical systems, Protactinium, Spectrometers, Actuators, Infrared radiation, Microelectromechanical systems, Spectral resolution, Signal to noise ratio

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SPIE Journal Paper | 1 April 2008

Ultracompact laser projection systems based on two-dimensional resonant microscanning mirrors

Michael Scholles, Andreas Bräuer, Klaus Frommhagen, Christian Gerwig, Hubert Lakner, Harald Schenk, Markus Schwarzenberg

JM3, Vol. 7, Issue 02, 021001, (April 2008) https://doi.org/10.1117/12.10.1117/1.2911643

KEYWORDS: Mirrors, Projection systems, Modulation, Video, Laser sources, Semiconductor lasers, LCDs, Image resolution, Microopto electromechanical systems, RGB color model

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SPIE Journal Paper | 1 April 2008

Investigation and characterization of highly efficient near-infrared scanning gratings used in near-infrared microspectrometers

Fabian Zimmer, Andreas Heberer, Heinrich Grueger, Harald Schenk

JM3, Vol. 7, Issue 02, 021005, (April 2008) https://doi.org/10.1117/12.10.1117/1.2911035

KEYWORDS: Spectroscopy, Silicon, Etching, Near infrared, Diffraction gratings, Diodes, Semiconducting wafers, Signal processing, Mirrors, Monochromators

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SPIE Journal Paper | 1 April 2008 Open Access

Open Access

Silicon-Based MOEMS and Their Applications

Harald Schenk, Wibool Piyawattanametha

JM3, Vol. 7, Issue 02, 020901, (April 2008) https://doi.org/10.1117/12.10.1117/1.2913329

Proceedings Article | 8 February 2008 Paper

Paper

New approach for MEMS scanning mirror for laser projection systems

Heinrich Grüger, Jens Knobbe, Michael Scholles, Harald Schenk, Hubert Lakner

Proceedings Volume 6887, 68870L (2008) https://doi.org/10.1117/12.761531

KEYWORDS: Mirrors, Projection systems, Scanners, Microelectromechanical systems, Actuators, Modulation, Magnetism, CMOS technology, Teeth, Light sources

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Proceedings Article | 8 February 2008 Paper

Paper

Two dimensional microscanners with large horizontal-vertical scanning frequency ratio for high-resolution laser projectors

Shu-Ting Hsu, Thomas Klose, Christian Drabe, Harald Schenk

Proceedings Volume 6887, 688703 (2008) https://doi.org/10.1117/12.761617

KEYWORDS: Mirrors, Scanners, Projection systems, Etching, Prototyping, Silica, Photomasks, Semiconducting wafers, Actuators, Laser scanners

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Proceedings Article | 8 February 2008 Paper

Paper

Pushbroom NIR hyperspectral imager using MOEMS scanning grating chips

Heinrich Grüger, Thomas Egloff, Michael Scholles, Fabian Zimmer, Michael Müller, Harald Schenk

Proceedings Volume 6887, 68870E (2008) https://doi.org/10.1117/12.762904

KEYWORDS: Hyperspectral imaging, Near infrared, Imaging systems, Spectroscopy, Mirrors, Diffraction gratings, Microopto electromechanical systems, Detector arrays, Collimators, Imaging spectroscopy

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Proceedings Article | 2 October 2007 Paper

Paper

NIR hyperspectral imaging using MOEMS scanning grating chips and linear detector array

Thomas Egloff, Heinrich Grüger, Fabian Zimmer, Harald Schenk, Michael Scholles, Hubert Lakner

Proceedings Volume 6765, 67650I (2007) https://doi.org/10.1117/12.734016

KEYWORDS: Hyperspectral imaging, Near infrared, Spectroscopy, Detector arrays, Mirrors, Imaging systems, Diffraction gratings, Microopto electromechanical systems, Imaging spectroscopy, Collimators

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Proceedings Article | 22 January 2007 Paper

Paper

Miniaturized FTIR-spectrometer based on an optical MEMS translatory actuator

Thilo Sandner, Andreas Kenda, Christian Drabe, Harald Schenk, Werner Scherf

Proceedings Volume 6466, 646602 (2007) https://doi.org/10.1117/12.697898

KEYWORDS: Mirrors, Microopto electromechanical systems, FT-IR spectroscopy, Protactinium, Spectroscopy, Actuators, Infrared radiation, Micromirrors, Infrared spectroscopy, Signal processing

Read Abstract +

Proceedings Article | 22 January 2007 Paper

Paper

Fracture strength of SOI springs in MEMS micromirrors

Shu-Ting Hsu, Alexander Wolter, Wolf-Dietrich Owe, Harald Schenk

Proceedings Volume 6466, 64660E (2007) https://doi.org/10.1117/12.698933

KEYWORDS: Reliability, Mirrors, Micromirrors, Silicon, Scanners, Microelectromechanical systems, Failure analysis, Actuators, Photomicroscopy, Crystals

Read Abstract +

Proceedings Article | 22 January 2007 Paper

Paper

Ultra compact laser projection systems based on two-dimensional resonant micro scanning mirrors

M. Scholles, A. Bräuer, K. Frommhagen, Ch. Gerwig, H. Lakner, H. Schenk, M. Schwarzenberg

Proceedings Volume 6466, 64660A (2007) https://doi.org/10.1117/12.700093

KEYWORDS: Mirrors, Projection systems, Micromirrors, Modulation, Semiconductor lasers, Image resolution, Laser sources, Video, RGB color model, Interfaces

Read Abstract +

Proceedings Article | 22 January 2007 Paper

Paper

Investigation and characterization of high-efficient NIR-scanning gratings used in NIR micro-spectrometer

F. Zimmer, A. Heberer, Th. Sandner, H. Grueger, H. Schenk, H. Lakner, A. Kenda, W. Scherf

Proceedings Volume 6466, 646605 (2007) https://doi.org/10.1117/12.701821

KEYWORDS: Mirrors, Spectroscopy, Etching, Diffraction gratings, Diodes, Silicon, Control systems, Oxides, Scanning electron microscopy, Signal processing

Read Abstract +

Proceedings Article | 22 January 2007 Paper

Paper

A new micro laser camera

Christian Drabe, Richard James, Thomas Klose, Alexander Wolter, Harald Schenk, Hubert Lakner

Proceedings Volume 6466, 64660I (2007) https://doi.org/10.1117/12.700360

KEYWORDS: Mirrors, Cameras, Control systems, Scanners, Microelectromechanical systems, Laser development, Optical fibers, Video, Imaging systems, Semiconductor lasers

Read Abstract +

Proceedings Article | 31 August 2006 Paper

Paper

Design of miniaturized optoelectronic systems using resonant microscanning mirrors for projection of full-color images

M. Scholles, A. Braüer, K. Frommhagen, Ch. Gerwig, B. Höfer, H. Lakner, H. Schenk, M. Schwarzenberg

Proceedings Volume 6288, 628807 (2006) https://doi.org/10.1117/12.680317

KEYWORDS: Mirrors, Micromirrors, Projection systems, Semiconductor lasers, Modulation, Image resolution, Video, Laser sources, Head, Fiber lasers

Read Abstract +

Proceedings Article | 21 April 2006 Paper

Paper

A large deflection translatory actuator for optical path length modulation

Christian Drabe, Thomas Klose, Harald Schenk, Alexander Wolter, Hubert Lakner

Proceedings Volume 6186, 618604 (2006) https://doi.org/10.1117/12.662853

KEYWORDS: Protactinium, Mirrors, Actuators, Modulation, Micromirrors, Silicon, 3D modeling, Crystals, Microelectromechanical systems, Michelson interferometers

Read Abstract +

Proceedings Article | 21 April 2006 Paper

Paper

Application of a micromachined translatory actuator to an optical FTIR spectrometer

Andreas Kenda, Christian Drabe, Harald Schenk, Albert Frank, Martin Lenzhofer, Werner Scherf

Proceedings Volume 6186, 618609 (2006) https://doi.org/10.1117/12.662008

KEYWORDS: Mirrors, FT-IR spectroscopy, Microopto electromechanical systems, Protactinium, Infrared radiation, Actuators, Infrared spectroscopy, Spectroscopy, Signal processing, Micromirrors

Read Abstract +

Proceedings Article | 23 January 2006 Paper

Paper

Highly reflective optical coatings for high-power applications of micro scanning mirrors in the UV-VIS-NIR spectral region

Thilo Sandner, Jan Schmidt, Harald Schenk, Hubert Lakner, Minghong Yang, Alexandre Gatto, Norbert Kaiser, Stefan Braun, Thomas Foltyn, Andreas Leson

Proceedings Volume 6114, 61140H (2006) https://doi.org/10.1117/12.644626

KEYWORDS: Aluminum, Reflectivity, Silver, Mirrors, Optical coatings, Micromirrors, Gold, Laser damage threshold, Dielectrics, Microopto electromechanical systems

Read Abstract +

Proceedings Article | 23 January 2006 Paper

Paper

Global flatness of spatial light modulators

Michael Wagner, Ulrich Künzelmann, Harald Schenk, Hubert Lakner

Proceedings Volume 6114, 611404 (2006) https://doi.org/10.1117/12.644580

KEYWORDS: Adhesives, Spatial light modulators, Optical spheres, Photomasks, Mirrors, Packaging, Semiconducting wafers, Microsystems, Micromirrors, Micro cutting

Read Abstract +

Proceedings Article | 23 January 2006 Paper

Paper

Large-scale drift-free monocrystalline silicon micromirror arrays made by wafer bonding

Thor Bakke, Benjamin Völker, Dirk Rudloff, Martin Friedrichs, Harald Schenk, Hubert Lakner

Proceedings Volume 6114, 611402 (2006) https://doi.org/10.1117/12.646182

KEYWORDS: Mirrors, Silicon, Semiconducting wafers, Wafer bonding, Electrodes, Micromirrors, Adhesives, Oxides, Etching, Metals

Read Abstract +

Proceedings Article | 23 January 2006 Paper

Paper

MEMS analog light processing: an enabling technology for adaptive optical phase control

Andreas Gehner, Michael Wildenhain, Hannes Neumann, Jens Knobbe, Ondrej Komenda

Proceedings Volume 6113, 61130K (2006) https://doi.org/10.1117/12.651731

KEYWORDS: Mirrors, Micromirrors, Microelectromechanical systems, Adaptive optics, Spatial light modulators, Analog electronics, Computer programming, Human-machine interfaces, Phase shift keying, Modulation

Read Abstract +

Proceedings Article | 23 January 2006 Paper

Paper

Scanning 2D micromirror with enhanced flatness at high frequency

Alexander Wolter, Thomas Klose, Shu-Ting Hsu, Harald Schenk, Hubert Lakner

Proceedings Volume 6114, 61140L (2006) https://doi.org/10.1117/12.654478

KEYWORDS: Mirrors, Micromirrors, Laser based displays, Laser scanners, Crystals, Silicon, Optical resolution, Microopto electromechanical systems, Electrodes, Optical simulations

Read Abstract +

Proceedings Article | 23 January 2006 Paper

Paper

Development of high-efficient NIR-scanning gratings for spectroscopic applications

F. Zimmer, H. Grueger, A. Heberer, Th. Sandner, H. Schenk, H. Lakner, A. Kenda, W. Scherf

Proceedings Volume 6114, 611407 (2006) https://doi.org/10.1117/12.644481

KEYWORDS: Mirrors, Etching, Silicon, Diffraction gratings, Spectroscopy, Micromirrors, Anisotropic etching, Wet etching, Aluminum, Diffraction

Read Abstract +

Proceedings Article | 23 January 2006 Paper

Paper

Extended damping model for out-of-plane comb driven micromirrors

Thomas Klose, Thilo Sandner, Harald Schenk, Hubert Lakner

Proceedings Volume 6114, 61140J (2006) https://doi.org/10.1117/12.645981

KEYWORDS: Electrodes, Finite element methods, Micromirrors, 3D modeling, Capacitance, Mirrors, Electroluminescence, Data modeling, Microsystems, Microelectromechanical systems

Read Abstract +

Proceedings Article | 8 November 2005 Paper

Paper

New MOEMS based systems appropriate for spectroscopic investigations on agricultural growth and perishable food conditions

Heinrich Grueger, Harald Schenk, Andreas Heberer, Fabian Zimmer, Werner Scherff, Andreas Kenda, Albert Frank

Proceedings Volume 5996, 599610 (2005) https://doi.org/10.1117/12.630143

KEYWORDS: Spectrometers, Microopto electromechanical systems, Mirrors, Signal processing, Digital signal processing, Agriculture, Sensors, Silicon, Spectroscopy, Optical components

Read Abstract +

Proceedings Article | 15 October 2005 Paper

Paper

Signal processing for a single detector MOEMS based NIR micro spectrometer

Andreas Heberer, Heinrich Grüger, Fabian Zimmer, Harald Schenk, Andreas Kenda, Albert Frank, Werner Scherf

Proceedings Volume 5964, 59640I (2005) https://doi.org/10.1117/12.624990

KEYWORDS: Sensors, Signal processing, Mirrors, Near infrared, Spectroscopy, Digital signal processing, Microopto electromechanical systems, Infrared sensors, Light emitting diodes, LED displays

Read Abstract +

Proceedings Article | 5 October 2005 Paper

Paper

VUV optical coatings for the next-generation micro-mechanical mirrors

Minghong Yang, Alexandre Gatto, Norbert Kaiser, Jan Uwe Schmidt, Thilo Sandner, Jörg Heber, Harald Schenk, Hubert Lakner

Proceedings Volume 5963, 596322 (2005) https://doi.org/10.1117/12.625138

KEYWORDS: Aluminum, Mirrors, Vacuum ultraviolet, Coating, Reflectivity, Micromirrors, Optical coatings, Spatial light modulators, Oxides, Dielectrics

Read Abstract +

Proceedings Article | 5 October 2005 Paper

Paper

Highly reflective thin film coatings for high power applications of micro scanning mirrors in the NIR-VIS-UV spectral region

Thilo Sandner, Jan Uwe Schmidt, Harald Schenk, Hubert Lakner, Minghong Yang, Alexandre Gatto, Norbert Kaiser, Stefan Braun, Thomas Foltyn, Andreas Leson

Proceedings Volume 5963, 596314 (2005) https://doi.org/10.1117/12.625246

KEYWORDS: Reflectivity, Aluminum, Mirrors, Silver, Micromirrors, Thin film coatings, Optical coatings, Laser damage threshold, Radium, Dielectrics

Read Abstract +

SPIE Journal Paper | 1 October 2005

Micro-opto-electro-mechanical systems technology and its impact on photonic applications

Harald Schenk, Alexander Wolter, Ulrike Dauderstädt, Andreas Gehner, Hubert Lakner

JM3, Vol. 4, Issue 04, 041501, (October 2005) https://doi.org/10.1117/12.10.1117/1.2131824

KEYWORDS: Mirrors, Micromirrors, Microopto electromechanical systems, Electrodes, Microelectromechanical systems, Silicon, Semiconducting wafers, Aluminum, Photomicroscopy, Spatial light modulators

Read Abstract +

Proceedings Article | 13 September 2005 Paper

Paper

Miniaturized MOEMS spectrometer for NIR applications

Heinrich Grueger, Andreas Heberer, Fabian Zimmer, Alexander Wolter, Harald Schenk

Proceedings Volume 5877, 58770J (2005) https://doi.org/10.1117/12.614750

KEYWORDS: Spectroscopy, Sensors, Mirrors, Signal processing, Silicon, Digital signal processing, Microopto electromechanical systems, Near infrared, Indium gallium arsenide, Infrared radiation

Read Abstract +

Proceedings Article | 18 August 2005 Paper

Paper

MEMS phase former kit for high-resolution wavefront control

Andreas Gehner, Michael Wildenhain, Hannes Neumann, Andreas Elgner, Harald Schenk

Proceedings Volume 5894, 58940H (2005) https://doi.org/10.1117/12.618326

KEYWORDS: Mirrors, Micromirrors, Wavefronts, Microelectromechanical systems, Adaptive optics, Computer programming, Phase shift keying, Control systems, Analog electronics, Human-machine interfaces

Read Abstract +

Proceedings Article | 1 August 2005 Paper

Paper

Miniaturized optical module for projection of arbitrary images based on two-dimensional resonant micro scanning mirrors

M. Scholles, A. Brauer, K. Frommhagen, C. Gerwig, B. Hoefer, E. Jung, H. Lakner, H. Schenk, B. Schneider, P. Schreiber, A. Wolter

Proceedings Volume 5873, (2005) https://doi.org/10.1117/12.616779

KEYWORDS: Mirrors, Micromirrors, Projection systems, Electronics, Modulation, Image resolution, Laser sources, Semiconductor lasers, Collimators, Light sources

Read Abstract +

Proceedings Article | 1 August 2005 Paper

Paper

Scanning micro-mirrors: from bar-code scanning to spectroscopy

F. Zimmer, H. Grueger, A. Heberer, T. Sandner, A. Wolter, H. Schenk

Proceedings Volume 5873, (2005) https://doi.org/10.1117/12.614895

KEYWORDS: Mirrors, Micromirrors, Silicon, Aluminum, Spectroscopy, Reflectivity, Oxides, Etching, Diffraction, Diffraction gratings

Read Abstract +

Proceedings Article | 22 January 2005 Paper

Paper

Applications and requirements for MEMS scanner mirrors

Alexander Wolter, Shu-Ting Hsu, Harald Schenk, Hubert Lakner

Proceedings Volume 5719, (2005) https://doi.org/10.1117/12.600076

KEYWORDS: Mirrors, Scanners, Micromirrors, Reflectivity, Imaging systems, Microelectromechanical systems, Laser marking, Modulation transfer functions, Sensors, Laser scanners

Read Abstract +

Proceedings Article | 22 January 2005 Paper

Paper

Mechanical stability of spatial light modulators in microlithography

Ulrike Dauderstadt, Peter Duerr, Ulric Ljungblad, Tord Karlin, Harald Schenk, Hubert Lakner

Proceedings Volume 5721, (2005) https://doi.org/10.1117/12.590082

KEYWORDS: Mirrors, Electrodes, Spatial light modulators, Micromirrors, Optical lithography, Laser development, Metals, Microopto electromechanical systems, Photomasks, Titanium

Read Abstract +

Proceedings Article | 22 January 2005 Paper

Paper

Highly reflective coatings for micromechanical mirror arrays operating in the DUV and VUV spectral range

Thilo Sandner, Jan Schmidt, Harald Schenk, Hubert Lakner, Alexandre Gatto, Minghong Yang, Norbert Kaiser, Stefan Braun, Thomas Foltyn, Andreas Leson

Proceedings Volume 5721, (2005) https://doi.org/10.1117/12.590522

KEYWORDS: Mirrors, Aluminum, Micromirrors, Deep ultraviolet, Reflectivity, Coating, Spatial light modulators, Vacuum ultraviolet, Multilayers, Silicon

Read Abstract +

Proceedings Article | 22 January 2005 Paper

Paper

Micromechanical scanning mirrors with highly reflective NIR coatings for high-power applications

Thilo Sandner, Jan Schmidt, Harald Schenk, Hubert Lakner, Stefan Braun, Thomas Foltyn, Andreas Leson, Alexandre Gatto, Minghong Yang, Norbert Kaiser

Proceedings Volume 5721, (2005) https://doi.org/10.1117/12.590448

KEYWORDS: Reflectivity, Aluminum, Near infrared, Mirrors, Optical coatings, Silver, Absorption, Dielectrics, Multilayers, Microopto electromechanical systems

Read Abstract +

Proceedings Article | 22 January 2005 Paper

Paper

Spatial light modulators with monocrystalline silicon micromirrors made by wafer bonding

Thor Bakke, Martin Friedrichs, Benjamin Voelker, Manfred Reiche, Lars Leonardsson, Harald Schenk, Hubert Lakner

Proceedings Volume 5715, (2005) https://doi.org/10.1117/12.590567

KEYWORDS: Semiconducting wafers, Wafer bonding, Mirrors, Silicon, Adhesives, Electrodes, Polymers, Oxides, Micromirrors, Aluminum

Read Abstract +

Proceedings Article | 25 October 2004 Paper

Paper

Designing MEMS for manufacturing

Alexander Wolter, Andreas Herrmann, Goekhan Yildiz, Harald Schenk, Hubert Lakner

Proceedings Volume 5604, (2004) https://doi.org/10.1117/12.580902

KEYWORDS: Microsystems, Micromirrors, Mirrors, Semiconducting wafers, Packaging, Microelectronics, Process modeling, Microelectromechanical systems, Manufacturing, Etching

Read Abstract +

Proceedings Article | 16 August 2004 Paper

Paper

Fabrication end-test of the micro scanning mirror

Alexander Wolter, Eric Gaumont, Hilmar Korth, Harald Schenk, Hubert Lakner

Proceedings Volume 5455, (2004) https://doi.org/10.1117/12.545247

KEYWORDS: Mirrors, Micromirrors, Reliability, Semiconducting wafers, Microelectromechanical systems, Electrodes, Diodes, Sensors, Silicon, Wafer testing

Read Abstract +

Proceedings Article | 16 August 2004 Paper

Paper

Damping analysis and measurement for a comb-drive scanning mirror

Thilo Sandner, Thomas Klose, Alexander Wolter, Harald Schenk, Hubert Lakner, Wyatt Davis

Proceedings Volume 5455, (2004) https://doi.org/10.1117/12.550529

KEYWORDS: Mirrors, Electrodes, Micromirrors, Scanners, Microelectromechanical systems, Motion models, Microfluidics, Crystals, Silicon, Capacitance

Read Abstract +

Proceedings Article | 16 August 2004 Paper

Paper

Development of a NIR microspectrometer based on a MOEMS scanning grating

Fabian Zimmer, Heinrich Grueger, Andreas Heberer, Alexander Wolter, Harald Schenk

Proceedings Volume 5455, (2004) https://doi.org/10.1117/12.544638

KEYWORDS: Spectroscopy, Mirrors, Diodes, Near infrared, Digital signal processing, Microopto electromechanical systems, Diffraction gratings, Light emitting diodes, Data processing, Signal processing

Read Abstract +

Proceedings Article | 21 July 2004 Paper

Paper

Improved mechanical properties of metallic micro-structures

Juergen Schreiber, Stefan Braun, Alexandre Gatto, Harald Schenk

Proceedings Volume 5392, (2004) https://doi.org/10.1117/12.541312

KEYWORDS: Aluminum, Micromirrors, Mirrors, X-rays, Atomic force microscopy, Coating, Silicon, Stress analysis, Reliability, Surface roughness

Read Abstract +

Proceedings Article | 24 January 2004 Paper

Paper

Photonic microsystems: an enabling technology for light deflection and modulation

Harald Schenk, Alexander Wolter, Ulrike Dauderstadt, Andreas Gehner, Heinrich Grueger, Christian Drabe, Hubert Lakner

Proceedings Volume 5348, (2004) https://doi.org/10.1117/12.523948

KEYWORDS: Mirrors, Photonic microstructures, Microsystems, Modulation, Micromirrors, Microelectromechanical systems, Promethium, Metals, Optical filters, Image filtering

Read Abstract +

Proceedings Article | 24 January 2004 Paper

Paper

Accelerometer by means of a resonant microactuator

Christian Drabe, Harald Schenk, Kai-Uwe Roscher, Detlef Kunze, Hubert Lakner

Proceedings Volume 5344, (2004) https://doi.org/10.1117/12.524130

KEYWORDS: Capacitance, Protactinium, Electrodes, Smoothing, Actuators, Silicon, Astatine, Instrument modeling, Oxides, Etching

Read Abstract +

Proceedings Article | 24 January 2004 Paper

Paper

Application of spatial light modulators for microlithography

Ulrike Dauderstaedt, Peter Duerr, Tord Karlin, Harald Schenk, Hubert Lakner

Proceedings Volume 5348, (2004) https://doi.org/10.1117/12.528798

KEYWORDS: Mirrors, Spatial light modulators, Deep ultraviolet, Laser development, Electrodes, Optical lithography, Micromirrors, Microopto electromechanical systems, Metals, Laser systems engineering

Read Abstract +

Proceedings Article | 24 January 2004 Paper

Paper

Low-cost projection device with a 2D resonant microscanning mirror

Kai-Uwe Roscher, Hagen Graetz, Harald Schenk, Alexander Wolter, Hubert Lakner

Proceedings Volume 5348, (2004) https://doi.org/10.1117/12.530860

KEYWORDS: Mirrors, Micromirrors, Projection devices, Modulation, Control systems, Clocks, Image resolution, Phase shifts, Photonic microstructures, Microsystems

Read Abstract +

Proceedings Article | 24 January 2004 Paper

Paper

MEMS microscanning mirror for barcode reading: from development to production

Alexander Wolter, Harald Schenk, Eric Gaumont, Hubert Lakner

Proceedings Volume 5348, (2004) https://doi.org/10.1117/12.530795

KEYWORDS: Mirrors, Microelectromechanical systems, Micromirrors, Reliability, Packaging, Oxides, Etching, Electrodes, Silicon, Semiconducting wafers

Read Abstract +

Proceedings Article | 24 January 2004 Paper

Paper

Bulk micromachined quasistatic torsional micromirror

Torsten Kiessling, Alexander Wolter, Harald Schenk, Hubert Lakner

Proceedings Volume 5346, (2004) https://doi.org/10.1117/12.530717

KEYWORDS: Mirrors, Micromirrors, Electrodes, Etching, Silicon, Semiconducting wafers, Oxides, Beam splitters, Electroluminescence, Adhesives

Read Abstract +

Proceedings Article | 23 December 2003 Paper

Paper

Torsional stress, fatigue and fracture strength in silicon hinges of a micro scanning mirror

Alexander Wolter, Harald Schenk, Hilmar Korth, Hubert Lakner

Proceedings Volume 5343, (2003) https://doi.org/10.1117/12.524872

KEYWORDS: Mirrors, Micromirrors, Silicon, Sensors, Protactinium, Reliability, Diodes, Electrodes, Microelectromechanical systems, Crystals

Read Abstract +

Proceedings Article | 19 June 2003 Paper

Paper

Performance and applications of a spectrometer with micromachined scanning grating

Heinrich Gruger, Alexander Wolter, Tobias Schuster, Harald Schenk, Hubert Lakner

Proceedings Volume 4987, (2003) https://doi.org/10.1117/12.478317

KEYWORDS: Spectroscopy, Sensors, Microopto electromechanical systems, Integrated optics, Optical actuators, Silicon, Mirrors

Read Abstract +

Proceedings Article | 25 March 2003 Paper

Paper

Realization of a spectrometer with micromachined scanning grating

Heinrich Grueger, Alexander Wolter, Tobias Schuster, Harald Schenk, Hubert Lakner

Proceedings Volume 4945, (2003) https://doi.org/10.1117/12.471993

KEYWORDS: Spectroscopy, Mirrors, Sensors, Microopto electromechanical systems, Silicon, Signal detection, Signal processing, Micromirrors, Monochromators, Aluminum

Read Abstract +

Proceedings Article | 20 January 2003 Paper

Paper

Characterization of spatial light modulators for microlithography

Peter Duerr, Ulrike Dauderstaedt, Detlef Kunze, Marine Auvert, Thor Bakke, Harald Schenk, Hubert Lakner

Proceedings Volume 4985, (2003) https://doi.org/10.1117/12.477803

KEYWORDS: Spatial light modulators, Cameras, Lithography, Mirrors, Calibration, Deep ultraviolet, Electrodes, Analog modulation, Reflectivity, Spatial filters

Read Abstract +

Proceedings Article | 20 January 2003 Paper

Paper

Improved vision by eye aberration correction using an active-matrix-addressed micromirror array

Andreas Gehner, Michael Wildenhain, Wolfgang Doleschal, Andreas Elgner, Harald Schenk, Hubert Lakner

Proceedings Volume 4983, (2003) https://doi.org/10.1117/12.472902

KEYWORDS: Mirrors, Eye, Micromirrors, Adaptive optics, Wavefronts, Monochromatic aberrations, Analog electronics, Microopto electromechanical systems, Transistors, Capacitors

Read Abstract +

Proceedings Article | 20 January 2003 Paper

Paper

Improved layout for a resonant 2D micro scanning mirror with low operation voltages

Alexander Wolter, Harald Schenk, Eric Gaumont, Hubert Lakner

Proceedings Volume 4985, (2003) https://doi.org/10.1117/12.472863

KEYWORDS: Mirrors, Capacitance, Electrodes, Micromirrors, Silicon, Oxides, Semiconducting wafers, Reliability, Metals, Dielectrics

Read Abstract +

Proceedings Article | 20 January 2003 Paper

Paper

Driver ASIC for synchronized excitation of resonant micromirrors

Kai-Uwe Roscher, Uwe Fakesch, Harald Schenk, Hubert Lakner, Dirk Schlebusch

Proceedings Volume 4985, (2003) https://doi.org/10.1117/12.477810

KEYWORDS: Capacitance, Mirrors, Micromirrors, Signal processing, Amplifiers, Electrodes, Digital signal processing, Switching, Clocks, Switches

Read Abstract +

Proceedings Article | 2 October 2001 Paper

Paper

Design optimization of an electrostatically driven micro scanning mirror

Harald Schenk, Alexander Wolter, Hubert Lakner

Proceedings Volume 4561, (2001) https://doi.org/10.1117/12.443106

KEYWORDS: Mirrors, Electrodes, Micromirrors, Stars, Scanners, Solids, Mirror structures, Mechanical engineering, Microopto electromechanical systems, Micromachining

Read Abstract +

Proceedings Article | 22 August 2000 Paper

Paper

Design and modeling of large deflection micromechanical 1D and 2D scanning mirrors

Harald Schenk, Peter Duerr, Detlef Kunze, Hubert Lakner, Heinz Kueck

Proceedings Volume 4178, (2000) https://doi.org/10.1117/12.396479

KEYWORDS: Mirrors, Scanners, Silicon, Micromirrors, Crystals, Measurement devices, Design and modelling, Finite element methods, Modal analysis, Cerium

Read Abstract +

Proceedings Article | 2 September 1999 Paper

Paper

Micromirrors for direct writing systems and scanners

Hubert Lakner, Wolfgang Doleschal, Peter Duerr, Andreas Gehner, Harald Schenk, Alexander Wolter, Guenter Zimmer

Proceedings Volume 3878, (1999) https://doi.org/10.1117/12.361264

KEYWORDS: Mirrors, Electrodes, Spatial light modulators, Micromirrors, Actuators, Silicon, Scanners, Diffraction gratings, Liquids, Diffraction

Read Abstract +

Showing 5 of 101 publications

Proceedings Volume Editor (6)

SPIE Conference Volume | 16 March 2012

MOEMS and Miniaturized Systems XI

SPIE Conference Volume | 10 February 2011

MOEMS and Miniaturized Systems X

SPIE Conference Volume | 16 February 2010

MOEMS and Miniaturized Systems IX

SPIE Conference Volume | 6 February 2009

MOEMS and Miniaturized Systems VIII

SPIE Conference Volume | 7 February 2008

MOEMS and Miniaturized Systems VII

Showing 5 of 6 publications

Conference Committee Involvement (26)

MOEMS and Miniaturized Systems XVIII

2 February 2019 | San Francisco, California, United States

MOEMS and Miniaturized Systems XVII

30 January 2018 | San Francisco, California, United States

MOEMS and Miniaturized Systems XVI

30 January 2017 | San Francisco, California, United States

MOEMS and Miniaturized Systems XV

15 February 2016 | San Francisco, California, United States

MOEMS and Miniaturized Systems XIV

9 February 2015 | San Francisco, California, United States

MOEMS and Miniaturized Systems XIII

3 February 2014 | San Francisco, California, United States

SPIE MOEMS-MEMS

1 February 2014 | San Francisco, United States

MOEMS and Miniaturized Systems XII

4 February 2013 | San Francisco, California, United States

SPIE MOEMS-MEMS

2 February 2013 | San Francisco, United States

Optical MEMS and Nanophotonics

6 August 2012 |

MOEMS and Miniaturized Systems XI

24 January 2012 | San Francisco, California, United States

SPIE MOEMS-MEMS

21 January 2012 | San Francisco, United States

MOEMS and Miniaturized Systems X

24 January 2011 | San Francisco, California, United States

SPIE MOEMS-MEMS

22 January 2011 | San Francisco, United States

MOEMS and Miniaturized Systems IX

25 January 2010 | San Francisco, California, United States

SPIE MOEMS-MEMS

23 January 2010 | San Francisco, United States

MOEMS and Miniaturized Systems VIII

27 January 2009 | San Jose, California, United States

MEMS, MOEMS and Micromachining

9 April 2008 | Strasbourg, France

MOEMS and Miniaturized Systems VII

22 January 2008 | San Jose, California, United States

MOEMS and Miniaturized Systems VI

24 January 2007 | San Jose, California, United States

MEMS, MOEMS, and Micromachining II

3 April 2006 | Strasbourg, France

MOEMS Display, Imaging, and Miniaturized Microsystems IV

25 January 2006 | San Jose, California, United States

MOEMS Display and Imaging Systems III

24 January 2005 | San Jose, California, United States

MEMS, MOEMS, and Micromachining

29 April 2004 | Strasbourg, France

MOEMS Display and Imaging Systems II

26 January 2004 | San Jose, California, United States

MOEMS Display and Imaging Systems

28 January 2003 | San Jose, CA, United States

Showing 5 of 26 Conference Committees

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