Mr. Jerry L. Leonard Profile

Jerry L. Leonard

Senior Process Engineer at DigitalOptics Corp

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Author

Publications (8)

Proceedings Article | 16 August 2010 Paper

Performance improvements of binary diffractive structures via optimization of the photolithography and dry etch processes

Kevin Welch, Jerry Leonard, Richard Jones

Proceedings Volume 7789, 778906 (2010) https://doi.org/10.1117/12.859893

KEYWORDS: Etching, Reflectivity, Semiconducting wafers, Photoresist materials, Photoresist processing, Diffractive optical elements, Optical lithography, Silica, Thin film coatings, Binary data

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Proceedings Article | 7 March 2008 Paper

An improved process for manufacturing diffractive optical elements (DOEs) for off-axis illumination systems

Jerry Leonard, James Carriere, Jared Stack, Rich Jones, Marc Himel, John Childers, Kevin Welch

Proceedings Volume 6924, 69242O (2008) https://doi.org/10.1117/12.774666

KEYWORDS: Diffractive optical elements, Diffusers, Lithography, Lithographic illumination, Critical dimension metrology, Optics manufacturing, Semiconductors, Photomasks, Custom fabrication, Etching

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Proceedings Article | 17 January 2003 Paper

Microfabrication of controlled angle diffusers used for resolution enhancement in microlithography

Marc Himel, Menelaos Poutous, Jared Stack, Jerry Leonard

Proceedings Volume 4984, (2003) https://doi.org/10.1117/12.477845

KEYWORDS: Diffusers, Lithographic illumination, Photomasks, Photoresist materials, Calcium, Resolution enhancement technologies, Lithography, Computer aided design, Optical lithography, Binary data

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Proceedings Article | 30 July 2002 Paper

Design and fabrication of customized illumination patterns for low-k1 lithography--a diffractive approach: II. Calcium fluoride controlled-angle diffusers

Menelaos Poutous, Marc Himel, William Delaney, Jared Stack, Alan Kathman, Adam Fedor, Robert Hutchins, Jerry Leonard

Proceedings Volume 4691, (2002) https://doi.org/10.1117/12.474543

KEYWORDS: Diffusers, Calcium, Computer aided design, Photomasks, Photoresist materials, Lithography, Binary data, Scanning electron microscopy, Lithographic illumination, Holograms

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Proceedings Article | 16 June 1995 Paper

Silica-based optical delay lines and switches for phased-array radar control

Lily Pang, Jerry Leonard, Tseng-Hwang Lin, Gregory Magel, Susan Eshelman

Proceedings Volume 2489, (1995) https://doi.org/10.1117/12.212044

KEYWORDS: Waveguides, Switches, Aluminum, Polysomnography, Cladding, Etching, Phased array optics, Mach-Zehnder interferometers, Phase shifts, Optical switching

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Proceedings Article | 17 June 1994 Paper

Integrated silica-based optical switch for radar phase control

Lily Pang, Jerry Leonard, Gregory Magel, Susan Eshelman, Tseng-Hwang Lin

Proceedings Volume 2236, (1994) https://doi.org/10.1117/12.178054

KEYWORDS: Waveguides, Cladding, Switches, Aluminum, Metals, 3D modeling, Polysomnography, Interferometers, Mach-Zehnder interferometers, Etching

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Proceedings Article | 2 March 1993 Paper

Integration of deformable mirror devices with optical fibers and waveguides

R. Mark Boysel, Terrance McDonald, Gregory Magel, G. Smith, Jerry Leonard

Proceedings Volume 1793, (1993) https://doi.org/10.1117/12.141225

KEYWORDS: Switches, Waveguides, Digital micromirror devices, Mirrors, Optical fibers, Signal attenuation, Deformable mirrors, Switching, Multimode fibers, Integrated optics

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Proceedings Article | 2 December 1992 Paper

Phosphosilicate glass waveguides for phased-array radar time delay

Gregory Magel, Jerry Leonard

Proceedings Volume 1703, (1992) https://doi.org/10.1117/12.138405

KEYWORDS: Waveguides, Switches, Silicon, Cladding, Metals, Polysomnography, Phosphosilicate glass, Radar, Integrated optics, Phased array optics

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Showing 5 of 8 publications

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