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Dr. Richard D. Jones
Senior Principal Dev Engineer at Broadcom Inc
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Publications (4)
Proceedings Article | 13 June 2023 Presentation + Paper
Diffractive optical elements as optical calibration references for LIDAR systems
Jeff Gardner, Jared Stack, Richard Jones, Paolo Batoni, Kevin Welch, John Childers
Proceedings Volume 12540, 1254004 (2023) https://doi.org/10.1117/12.2663405
KEYWORDS: Diffractive optical elements, LIDAR, Silica, Micro optics, Calibration, Diffraction gratings, Optics manufacturing, Diffraction, Optical calibration
Proceedings Article | 16 August 2010 Paper
Performance improvements of binary diffractive structures via optimization of the photolithography and dry etch processes
Proceedings Volume 7789, 778906 (2010) https://doi.org/10.1117/12.859893
KEYWORDS: Etching, Reflectivity, Semiconducting wafers, Photoresist materials, Photoresist processing, Diffractive optical elements, Optical lithography, Silica, Thin film coatings, Binary data
Proceedings Article | 7 March 2008 Paper
An improved process for manufacturing diffractive optical elements (DOEs) for off-axis illumination systems
Proceedings Volume 6924, 69242O (2008) https://doi.org/10.1117/12.774666
KEYWORDS: Diffractive optical elements, Diffusers, Lithography, Lithographic illumination, Critical dimension metrology, Optics manufacturing, Semiconductors, Photomasks, Custom fabrication, Etching
SPIE Journal Paper | 1 March 2007
Wafer-based diffractive polarizer design for low-reflectivity applications
OE, Vol. 46, Issue 03, 038001, (March 2007) https://doi.org/10.1117/12.10.1117/1.2716378
KEYWORDS: Polarizers, Diffraction gratings, Silicon, Polarization, Antireflective coatings, Diffraction, Prototyping, Reflection, Optical design, Etching
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