Dr. Jerzy R. Hoffman
Scientist at Cymer LLC
SPIE Involvement:
Author
Publications (13)

SPIE Journal Paper | 1 October 2009
Norbert Böwering, Igor Fomenkov, David Brandt, Alexander Bykanov, Alexander Ershov, William Partlo, Dave Myers, Nigel Farrar, Georgiy Vaschenko, Oleh Khodykin, Jerzy Hoffman, Christopher Chrobak, Shailendra Srivastava, Imtiaz Ahmad, Chirag Rajyaguru, Daniel Golich, David Vidusek, Silvia De Dea, Richard Hou
JM3, Vol. 8, Issue 04, 041504, (October 2009) https://doi.org/10.1117/12.10.1117/1.3224942
KEYWORDS: Extreme ultraviolet, Ions, Plasma, Gas lasers, Extreme ultraviolet lithography, Tin, Carbon monoxide, Mirrors, Prototyping, Light sources

Proceedings Article | 18 March 2009 Paper
Proceedings Volume 7271, 727138 (2009) https://doi.org/10.1117/12.814272
KEYWORDS: Extreme ultraviolet, Ions, Plasma, Extreme ultraviolet lithography, Sensors, Carbon dioxide lasers, Mirrors, Tin, Coating, Light sources

Proceedings Article | 18 March 2009 Open Access Paper
David Brandt, Igor Fomenkov, Alex Ershov, William Partlo, David Myers, Norbert Böwering, Nigel Farrar, Georgiy Vaschenko, Oleh Khodykin, Alexander Bykanov, Jerzy Hoffman, Christopher Chrobak, Shailendra Srivastava, Imtiaz Ahmad, Chirag Rajyaguru, Daniel Golich, David Vidusek, Silvia De Dea, Richard Hou
Proceedings Volume 7271, 727103 (2009) https://doi.org/10.1117/12.814228
KEYWORDS: Extreme ultraviolet, Reflectivity, Extreme ultraviolet lithography, Mirrors, Tin, Plasma, Coating, Scanners, Manufacturing, Light sources

Proceedings Article | 4 December 2008 Paper
Proceedings Volume 7140, 71401E (2008) https://doi.org/10.1117/12.806648
KEYWORDS: Extreme ultraviolet, Plasma, Reflectivity, Mirrors, Extreme ultraviolet lithography, Tin, Plasma systems, Manufacturing, Light sources, Carbon dioxide lasers

Proceedings Article | 21 March 2007 Paper
Igor Fomenkov, David Brandt, Alexander Bykanov, Alexander Ershov, William Partlo, David Myers, Norbert Böwering, Georgiy Vaschenko, Oleh Khodykin, Jerzy Hoffman, Ernesto Vargas L., Rodney Simmons, Juan Chavez, Christopher Chrobak
Proceedings Volume 6517, 65173J (2007) https://doi.org/10.1117/12.713454
KEYWORDS: Extreme ultraviolet, Ions, Gas lasers, Plasma, Tin, Spectroscopy, Carbon monoxide, Extreme ultraviolet lithography, Calibration, Sensors

Showing 5 of 13 publications
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