Dr. John H. Burnett Profile

Dr. John H. Burnett

Physicist

SPIE Involvement:

Author

Publications (15)

Proceedings Article | 20 September 2016 Presentation + Paper

Refractive index measurements of Ge

John Burnett, Simon Kaplan, Eric Stover, Adam Phenis

Proceedings Volume 9974, 99740X (2016) https://doi.org/10.1117/12.2237978

KEYWORDS: Germanium, Temperature metrology, Refractive index, Refraction, Refractometry, Prisms, Mirrors, Monochromators, Optical design, Calibration

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SPIE Journal Paper | 1 April 2009

Index of refraction of high-index lithographic immersion fluids and its variability

Min Yang, Simon Kaplan, Roger French, John Burnett

JM3, Vol. 8, Issue 02, 023005, (April 2009) https://doi.org/10.1117/12.10.1117/1.3124189

KEYWORDS: Refraction, Water, Refractive index, Prisms, Thermal optics, Lithography, Microfluidics, Absorbance, Temperature metrology, Immersion lithography

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Proceedings Article | 16 March 2009 Paper

Birefringence issues with uniaxial crystals as last lens elements for high-index immersion lithography

Simon Kaplan, Chris Mack, Eric Benck, Gabriel Sirat, John Burnett

Proceedings Volume 7274, 727421 (2009) https://doi.org/10.1117/12.814324

KEYWORDS: Sapphire, Crystals, Birefringence, Polarization, Lithography, Absorption, Anisotropy, Immersion lithography, Lithographic illumination, Double patterning technology

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Proceedings Article | 27 March 2007 Paper

Immersion lithography with numerical apertures above 2.0 using high index optical materials

Neal Lafferty, Bruce Smith, John Burnett, Jianming Zhou

Proceedings Volume 6520, 65204T (2007) https://doi.org/10.1117/12.712429

KEYWORDS: Photoresist materials, Refractive index, Absorbance, Sapphire, Optical lithography, Aluminum, Interfaces, Birefringence, Lutetium, Prisms

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Proceedings Article | 15 March 2006 Paper

High-index optical materials for 193nm immersion lithography

John Burnett, Wilfried Clauss, Chris Van Peski, Deane Horowitz, Simon Kaplan, Andrew Grenville, Eric Shirley

Proceedings Volume 6154, 615418 (2006) https://doi.org/10.1117/12.656901

KEYWORDS: Garnet, Spinel, Crystals, Ceramics, Aluminum, Germanium, Oxides, Lutetium, Magnesium, Optical properties

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Proceedings Article | 12 May 2005 Paper

High refractive index immersion fluids for 193 nm immersion lithography

Peng Zhang, Xiaoping Gao, Bridgette Budhlall, Zarka Zarkov, Simon Kaplan, Brenda Ross, John Burnett, Gene Parris

Proceedings Volume 5754, (2005) https://doi.org/10.1117/12.600025

KEYWORDS: Refractive index, Absorbance, Water, Photoresist materials, Immersion lithography, Absorption, Microfluidics, Ultraviolet radiation, Semiconducting wafers, Fluid dynamics

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Proceedings Article | 12 May 2005 Paper

High-index materials for 193 nm immersion lithography

Simon Kaplan, James Webb, John Burnett, Paul Tompkins, Eric Shirley

Proceedings Volume 5754, (2005) https://doi.org/10.1117/12.600109

KEYWORDS: Birefringence, Spinel, Crystals, Transmittance, Oxides, Absorption, Immersion lithography, Water, Ultraviolet radiation, Ceramics

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Proceedings Article | 28 May 2004 Paper

Immersion fluid refractive indices using prism minimum deviation techniques

Gerald Cooney, Simon Kaplan, Ron Synowicki, Greg Pribil, John Burnett, Roger French, Steven Green, Craig Herzinger, Min Yang, Michael Lemon

Proceedings Volume 5377, (2004) https://doi.org/10.1117/12.537727

KEYWORDS: Prisms, Refractive index, Liquids, Vacuum ultraviolet, Water, Thermal optics, Refraction, Immersion lithography, Nitrogen, Environmental sensing

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SPIE Journal Paper | 1 January 2004

Measurement of the refractive index and thermo-optic coefficient of water near 193 nm

John Burnett, Simon Kaplan

JM3, Vol. 3, Issue 01, (January 2004) https://doi.org/10.1117/12.10.1117/1.1632501

KEYWORDS: Water, Prisms, Refractive index, Thermal optics, Interferometry, Ultraviolet radiation, Refraction, Silica, Fabry–Perot interferometers, Immersion lithography

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Proceedings Article | 26 June 2003 Paper

Measurement of the refractive index and thermo-optic coefficient of water near 193 nm

John Burnett, Simon Kaplan

Proceedings Volume 5040, (2003) https://doi.org/10.1117/12.504601

KEYWORDS: Water, Prisms, Thermal optics, Refractive index, Microfluidics, Refraction, Fabry–Perot interferometers, Mirrors, Temperature metrology, Ultraviolet radiation

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SPIE Journal Paper | 1 October 2002

Symmetry of spatial-dispersion-induced birefringence and its implications for CaF₂ ultraviolet optics

John Burnett, Zachary Levine, Eric Shirley, John Bruning

JM3, Vol. 1, Issue 03, (October 2002) https://doi.org/10.1117/12.10.1117/1.1503350

KEYWORDS: Birefringence, Crystals, Anisotropy, Polarization, Dielectrics, Wave propagation, Lithography, Ultraviolet radiation, UV optics, Refraction

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Proceedings Article | 5 July 2000 Paper

Absolute index of refraction and its temperature dependence of calcium fluoride, barium fluoride, and strontium fluoride near 157 nm

Rajeev Gupta, John Burnett, Ulf Griesmann

Proceedings Volume 4000, (2000) https://doi.org/10.1117/12.388989

KEYWORDS: Calcium, Refraction, Temperature metrology, Spectroscopy, Barium, Prisms, Visible radiation, Strontium, Refractive index, Vacuum ultraviolet

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Proceedings Article | 28 September 1999 Paper

NIST FT700 Vacuum Ultraviolet Fourier Transform Spectrometer: applications in ultraviolet spectrometry and radiometry

John Burnett, Lukasz Bratasz, Rainier Kling, Ulf Griesmann

Proceedings Volume 3818, (1999) https://doi.org/10.1117/12.364153

KEYWORDS: Spectroscopy, Fourier transforms, Lamps, Ultraviolet radiation, Vacuum ultraviolet, Argon, Spectral resolution, Interferometers, Data acquisition, Calibration

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Proceedings Article | 26 July 1999 Paper

Index of refraction and its temperature dependence of calcium fluoride near 157 nm

John Burnett, Rajeev Gupta, Ted Jou, Ulf Griesmann

Proceedings Volume 3679, (1999) https://doi.org/10.1117/12.354324

KEYWORDS: Temperature metrology, Calcium, Refraction, Prisms, Spectroscopy, Lamps, Refractive index, Vacuum ultraviolet, Lens design, Optical lithography

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Proceedings Article | 8 October 1998 Paper

Measurements of index of refraction in the deep and vacuum ultraviolet using the minimum-deviation method

John Burnett, Rajeev Gupta, Ulf Griesmann

Proceedings Volume 3425, (1998) https://doi.org/10.1117/12.326665

KEYWORDS: Refractive index, Silica, Calcium, Spectrometers, Temperature metrology, Vacuum ultraviolet, Deep ultraviolet, Prisms, Refraction, Oxygen

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Showing 5 of 15 publications

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