Mr. Jonathan Grava Profile

Jonathan Grava

at Colorado State Univ

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Author

Publications (6)

Proceedings Article | 1 April 2013 Paper

CO2/Sn LPP EUV sources for device development and HVM

David Brandt, Igor Fomenkov, Nigel Farrar, Bruno La Fontaine, David Myers, Daniel Brown, Alex Ershov, Richard Sandstrom, Georgiy Vaschenko, Norbert Böwering, Palash Das, Vladimir Fleurov, Kevin Zhang, Shailendra Srivastava, Imtiaz Ahmad, Chirag Rajyaguru, Silvia De Dea, Wayne Dunstan, Peter Baumgart, Toshi Ishihara, Rod Simmons, Robert Jacques, Robert Bergstedt, Peter Porshnev, Christopher Wittak, Robert Rafac, Jonathan Grava, Alexander Schafgans, Yezheng Tao, Kay Hoffmann, Tedsuja Ishikawa, David Evans, Spencer Rich

Proceedings Volume 8679, 86791G (2013) https://doi.org/10.1117/12.2011212

KEYWORDS: Extreme ultraviolet, Extreme ultraviolet lithography, Plasma, Scanners, Carbon dioxide lasers, Mirrors, Tin, Pulsed laser operation, Plasma systems, Laser scanners

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Proceedings Article | 23 March 2012 Paper

Laser produced plasma EUV sources for device development and HVM

David Brandt, Igor Fomenkov, Michael Lercel, Bruno La Fontaine, David Myers, Daniel Brown, Alex Ershov, Richard Sandstrom, Alexander Bykanov, Georgiy Vaschenko, Norbert Böwering, Palash Das, Vladimir Fleurov, Kevin Zhang, Shailendra Srivastava, Imtiaz Ahmad, Chirag Rajyaguru, Silvia De Dea, Wayne Dunstan, Peter Baumgart, Toshi Ishihara, Rod Simmons, Robert Jacques, Robert Bergstedt, Peter Porshnev, Christian Wittak, Michael Woolston, Robert Rafac, Jonathan Grava, Alexander Schafgans, Yezheng Tao

Proceedings Volume 8322, 83221I (2012) https://doi.org/10.1117/12.916521

KEYWORDS: Extreme ultraviolet, Extreme ultraviolet lithography, Plasma, Scanners, Mirrors, Coating, Manufacturing, Tin, Semiconducting wafers, Laser scanners

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Proceedings Article | 29 September 2009 Paper

Elucidating the collimation of laboratory plasma jets using soft x-ray interferometry

M. Purvis, J. Grava, J. Filevich, D. Ryan, S. Moon, J. Dunn, V. Shlyaptsev, J. Rocca

Proceedings Volume 7451, 74510L (2009) https://doi.org/10.1117/12.826283

KEYWORDS: Plasma, Collimation, X-rays, Aluminum, Copper, Interferometry, Picosecond phenomena, Pulsed laser operation, X-ray lasers, Laser irradiation

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Proceedings Article | 15 October 2007 Paper

Plasma interactions in laser irradiated semi-cylindrical cavities studied with soft x-ray interferometry using a capillary discharge laser

M. Purvis, J. Grava, J. Filevich, M. Marconi, J. Rocca, James Dunn, Stephen Moon, Joseph Nilsen, Vyacheslav Shlyaptsev, Elizabeth Jankowska

Proceedings Volume 6702, 670204 (2007) https://doi.org/10.1117/12.734876

KEYWORDS: Plasma, Picosecond phenomena, Particles, Interferometry, Carbon, X-ray lasers, Laser beam diagnostics, Ionization, Laser irradiation, Capillaries

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Proceedings Article | 14 September 2005 Paper

Soft x-ray laser interferometry of colliding plasmas

J. Grava, M. Purvis, J. Filevich, M. Marconi, J. Rocca, J. Dunn, S. Moon, R. Smith, J. Nilsen, V. Shlyaptsev

Proceedings Volume 5919, 59190I (2005) https://doi.org/10.1117/12.617052

KEYWORDS: Plasmas, X-ray lasers, Interferometers, Interferometry, Copper, Capillaries, Diffraction gratings, Beam splitters, Laser beam diagnostics, Mirrors

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Proceedings Article | 14 September 2005 Paper

Soft x-ray laser interferometry unveils plasmas with index of refraction greater than one

J. Filevich, J. Grava, M. Purvis, J. Rocca, M. Marconi, S. Moon, J. Nilsen, J. Scofield, J. Dunn, R. Smith, R. Keenan, J. Hunter, V. Shlyaptsev

Proceedings Volume 5919, 59190O (2005) https://doi.org/10.1117/12.617229

KEYWORDS: Plasmas, Refraction, Aluminum, Interferometry, X-ray lasers, Tin, Ions, Silver, X-rays, Copper

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Showing 5 of 6 publications

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