Unspecified Konstantin Nechaev Profile

Konstantin Nechaev

at ASML Netherlands BV

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 10 April 2024 Presentation + Paper

Feature grouping to enable edge placement error-aware process control in multi-feature logic use case

Guillaume Schelcher, Marsil Athayde, Stijn Schoofs, Jeff Hsia, Zuan Khalik, Fahong Li, Konstantin Nechaev, Reza Sahraeian, Amir-Hossein Tamaddon, Victor Blanco, Stefan van der Sanden, Yichen Zhang, Roy Anunciado, Harm Dillen, Philippe Leray

Proceedings Volume 12955, 129550O (2024) https://doi.org/10.1117/12.3010421

KEYWORDS: Semiconducting wafers, Overlay metrology, Cross validation, Process control, Logic, Metrology, Simulations, Scanning electron microscopy, Lithography

Read Abstract +

Proceedings Article | 30 April 2023 Presentation

The edge placement error characterization and optimization for advanced logic and DRAM nodes

Harm Dillen, Wim Tel, Jaap Karssenberg, Jan Mulkens, Roy Anunciado, Yichen Zhang, Konstantin Nechaev, Zuan Khalik

Proceedings Volume 12496, 124960O (2023) https://doi.org/10.1117/12.2658832

KEYWORDS: Overlay metrology, Logic, Optical proximity correction, Metrology, Stochastic processes, Semiconductors, Semiconductor manufacturing, Scanners, Manufacturing, Line edge roughness

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years