This paper develops a probe scanning AFM system for 12-inch wafer surface topography characterization. Firstly, a fast Gaussian filter convolution algorithm for 2D and 3D surface roughness is proposed, and the computation time is reduced by iterative approach. Second, the principle of AFM and the roughness measurement method are investigated. Finally, the same wafer is compared and measured using AFM and white light interferometer. The results show that the measurement error of the AFM is around 0.5% and the repeatability of the measurement is controlled in the order of picometer if the white light interferometer measurement is used as the reference value. In addition, the atomic force microscopy measurement method has the characteristics of high measurement accuracy, small measurement range, slow speed and no requirement for material, which provides technical support for process personnel how to choose the measurement scheme.
This article adopts comparative measurement means to realize the intelligent measurement of gauge blocks through micro range high-precision inductance sensor based on the principle of inductance micrometer. The gauge block intelligent measurement system mainly includes intelligent detection system and data management system. The experimental results of indication error, measurement repeatability and time drift of the measurement system show that the system can measure gauge blocks with high accuracy and efficiency.
Continuously Operating Reference Station (CORS) is an integrated service system constructed based on multi-base station network Real Time Kinematic (RTK) technology. CORS system is composed of several fixed and continuously operating GNSS reference stations which form a network automatically providing different types of GNSS observations such as carrier phase and pseudorange, various correction numbers, status information and other GNSS services through computers, data communication and Internet (LAN/WAN) technology. This article selects an appropriate location and sets up a reference station to receive Beidou, GPS, GLONASS satellite data basing on CORS system, establishes an All-Terrain inspection field, designs a set of mobile positioning terminals, and develops a set of real time inspection software for the calibration of navigation products. Experimental verification results shows that the calibration system designed by this article is applicable to calibrate navigation products and worthy of extensive promotion.
The article studies the key technical parameters such as "horizontal position deviation", "distance-counting error", "velocity measurement error", and "time-counting error" of intelligent service terminal of cruising taxi, and determines the appropriate standards for the calibration of the parameters The novel calibration procedure presented in this article has been performed on several typical types of intelligent service terminals of cruising taxis widely used in China. The experimental and the uncertainty analysis results show that the calibration method presented in this article can be adopted for the periodic calibration of the intelligent service terminal of cruising taxi, in order to establish the metrological traceability system of the instrument.
Nowadays, in industrial area, many mechanical part manufactures are applying 3D optical scanner in their production shop to do part online inspection, or in their coordinate measurement laboratory to obtain crucial part dimensions. The high demands of the 3D optical scanner make it necessary for researchers to create convenient and stable device for calibrating this kind of contact-less measurement instrument. In a former study, we introduced a plate with standard spheres as a calibration device, which showed a good test result when applied on a 3D optical scanner. However, we decide to do more research on related area. The first purpose of this paper is to present an improved calibration device based on our former study and daily work experience. The new device has a wider test range with less spheres, and it’s structure is more portable, stable and more convenient to provide spatial positions. Results showed that the new device performed well in data stability and is quite easy to practice. The second purpose of this work is to study related influence factors on the 3D optical scanner calibration process. We investigated factors such as temperature, points cloud density, reflection patch density and numbers of images stitching. The results showed that those factors should be limited in proper conditions to ensure an acceptable calibration of 3D optical scanner.
A calibration device for the optical scanner is presented in this paper for the situation that lacking of a convenient calibration method for the optical scanner in domestic industry practice. The device utilized the spherical center distance of fixed balls as standard dimensions. It can provide various dimensions in different orientations and magnitudes since it has nine fixed standard balls in different positions. When we run an actual measurement process on this device with an optical scanner, the indication error of the scanner can be obtained conveniently. The device is simple in structure and easy to operate, it can produce multiple dates in one single measurement process simultaneously, which can evaluate the performance of the optical scanner comprehensively.
Non-contact measurement techniques using 3D laser scanning have the power to deliver tremendous benefits to most notably manufacturing, and have the advantage of high speed and high detail output. However, procedures for evaluation and verification of non-contact laser line scanner have not been well-established because of many influencing factors like scan depth, incident angle, probe head orientation and surface properties. A truncated pyramid artifact representation of five- planar with different included angles was designed and used to straightforwardly identify the influence of in-plane and out-of-plane angle, as well as scan depth on dimensional measurement accuracy of the laser scanner. Then, a series of easy, fast and representative experiments, based on this simple artifact, were performed on a commercial laser line scanner, and found that the output of this scanner can be improved for metrology applications after calibration.
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