Dr. Luigi Scaccabarozzi Profile

Dr. Luigi Scaccabarozzi

Research Assistent at ASML Netherlands BV

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Author

Publications (6)

Proceedings Article | 9 July 2015 Paper

Grid-supported EUV pellicles: A theoretical investigation for added value

Florian Dhalluin, Laurens de Winter, Luigi Scaccabarozzi, Jack Van der Sanden, Sven Lentzen, Rob Van Gils, Maurice Bogers, Erik Ruinemans, Derk Brouns, Juan Diego Arias Espinoza, Mária Péter, Daniel Smith, Wim Van der Zande, Hans Vermeulen

Proceedings Volume 9658, 96580J (2015) https://doi.org/10.1117/12.2197454

KEYWORDS: Pellicles, Reticles, Finite element methods, Scanners, Extreme ultraviolet, Extreme ultraviolet lithography, Particles, Resistance, Semiconducting wafers, Protactinium

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Proceedings Article | 17 April 2014 Paper

Progress on EUV pellicle development

Carmen Zoldesi, Kursat Bal, Brian Blum, Guus Bock, Derk Brouns, Florian Dhalluin, Nina Dziomkina, Juan Diego Arias Espinoza, Joost de Hoogh, Silvester Houweling, Maarten Jansen, Mohammad Kamali, Alain Kempa, Ronald Kox, Robert de Kruif, Jorge Lima, Yang Liu, Henk Meijer, Hans Meiling, Ijen van Mil, Marco Reijnen, Luigi Scaccabarozzi, Daniel Smith, Beatrijs Verbrugge, Laurens de Winters, Xugang Xiong, John Zimmerman

Proceedings Volume 9048, 90481N (2014) https://doi.org/10.1117/12.2049276

KEYWORDS: Pellicles, Extreme ultraviolet, Semiconducting wafers, Reticles, Prototyping, Silicon, Manufacturing, Particles, Critical dimension metrology, Protactinium

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Proceedings Article | 1 April 2013 Paper

Investigation of EUV pellicle feasibility

Luigi Scaccabarozzi, Dan Smith, Pedro Rizo Diago, Eric Casimiri, Nina Dziomkina, Henk Meijer

Proceedings Volume 8679, 867904 (2013) https://doi.org/10.1117/12.2015833

KEYWORDS: Pellicles, Extreme ultraviolet, Particles, Reticles, Extreme ultraviolet lithography, Neodymium, Semiconducting wafers, Scanners, Manufacturing, Ultraviolet radiation

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Proceedings Article | 10 February 2006 Paper

Low loss orientation-patterned AlGaAs waveguides for quasi phase matched second harmonic generation

Xiaojun Yu, Luigi Scaccabarozzi, Angie Lin, Jun-xian Fu, Paulina Kuo, Martin Fejer, James Harris

Proceedings Volume 6103, 61030N (2006) https://doi.org/10.1117/12.647241

KEYWORDS: Waveguides, Second-harmonic generation, Gallium arsenide, Harmonic generation, Germanium, Gallium, Semiconducting wafers, Aluminum, Fabry–Perot interferometers, Phase matching

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Proceedings Article | 31 March 2005 Paper

Fabrication and characterization of tightly confining AlGaAs waveguides and microcavities for nonlinear optical applications

Luigi Scaccabarozzi, Zheng Wang, Xiaojun Yu, Meredith Lee, Wah Lau, Mehmet Yanik, Shanhui Fan, Martin Fejer, James Harris

Proceedings Volume 5728, (2005) https://doi.org/10.1117/12.591174

KEYWORDS: Waveguides, Optical microcavities, Chromium, Fabry–Perot interferometers, Nonlinear optics, Etching, Cladding, Aluminum, Wave propagation, Photonic crystals

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Proceedings Article | 28 May 2004 Paper

Tightly confining AlGaAs waveguides and microcavities for optical frequency conversion

Luigi Scaccabarozzi, Zheng Wang, Xiaojun Yu, Wah Lau, Mehemet Yanik, Shanhui Fan, Martin Fejer, James Harris

Proceedings Volume 5355, (2004) https://doi.org/10.1117/12.532124

KEYWORDS: Waveguides, Optical microcavities, Photomasks, Etching, Aluminum, Frequency conversion, Nonlinear optics, Gallium arsenide, Photonic crystals, Electron beam lithography

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Showing 5 of 6 publications

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