Mr. Makoto Yoshikawa Profile

Makoto Yoshikawa

at Advantest Corp

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Publications (2)

Proceedings Article | 28 July 2014 Paper

Three dimensional profile measurement using multi-channel detector MVM-SEM

Makoto Yoshikawa, Sumito Harada, Keisuke Ito, Tsutomu Murakawa, Soichi Shida, Jun Matsumoto, Takayuki Nakamura

Proceedings Volume 9256, 92560G (2014) https://doi.org/10.1117/12.2064944

KEYWORDS: 3D metrology, Sensors, Atomic force microscopy, 3D image processing, Scanning electron microscopy, Algorithm development, Photomasks, Metrology, Transmission electron microscopy, Time metrology

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Proceedings Article | 2 April 2014 Paper

Novel three dimensional (3D) CD-SEM profile measurements

Wataru Ito, Benjamin Bunday, Sumito Harada, Aaron Cordes, Tsutomu Murakawa, Abraham Arceo, Makoto Yoshikawa, Toshihiko Hara, Takehito Arai, Soichi Shida, Masayuki Yamagata, Jun Matsumoto, Takayuki Nakamura

Proceedings Volume 9050, 90500D (2014) https://doi.org/10.1117/12.2047374

KEYWORDS: Atomic force microscopy, 3D image processing, 3D metrology, Sensors, Semiconducting wafers, Metrology, Reticles, Line edge roughness, Scanning electron microscopy

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