In this course we explore the science of miniaturization providing an in-depth understanding of applications, knowledge of different manufacturing options, familiarity with all materials choices, and an understanding of scaling laws. Miniaturization techniques surveyed are both top-down methods, in which one builds down from the large to the small, and bottom-up methods, in which one builds up from the small to the large. Top-down miniaturization methods and materials surveyed include micro-machining with single crystal and polycrystalline Si and other micromachining methods and materials based on lithography as well as nonlithographic miniaturization. In dealing with micromachining techniques borrowed from the electronics industry, we emphasize those that differ most from standard processes and materials used in regular integrated circuit (IC) and hybrid manufacturing. Although miniaturization and IC fabrication methods are intertwined, in miniaturization science a much wider variety of processes, more and different materials, and other applications are considered.