Mr. Masaaki Yoshida Profile

Masaaki Yoshida

at Tokyo Ohka Kogyo Co Ltd

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Author

Publications (3)

Proceedings Article | 11 April 2006 Paper

Defect studies of resist process for 193nm immersion lithography

Tomoyuki Ando, Katsumi Ohmori, Satoshi Maemori, Toshikazu Takayama, Keita Ishizuka, Masaaki Yoshida, Tomoyuki Hirano, Jiro Yokoya, Katsushi Nakano, Tomoharu Fujiwara, Soichi Owa

Proceedings Volume 6153, 615309 (2006) https://doi.org/10.1117/12.656164

KEYWORDS: Semiconducting wafers, Photoresist processing, Immersion lithography, Resonance energy transfer, Lithography, Materials processing, Bridges, 193nm lithography, Molecular bridges, Lens design

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Proceedings Article | 4 May 2005 Paper

Resist development status for immersion lithography

Hiromitsu Tsuji, Masaaki Yoshida, Keita Ishizuka, Tomoyuki Hirano, Kotaro Endo, Mitsuru Sato

Proceedings Volume 5753, (2005) https://doi.org/10.1117/12.599485

KEYWORDS: Semiconducting wafers, Immersion lithography, Photoresist processing, Manufacturing, Silicon, Ions, Silicon films, Lithography, Contamination, Scanners

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Proceedings Article | 20 May 2004 Paper

Resist outgassing in electron projection lithography

Tasuku Matsumiya, Tomoyuki Ando, Masaaki Yoshida, Kiyoshi Ishikawa, Sumito Shimizu

Proceedings Volume 5374, (2004) https://doi.org/10.1117/12.536168

KEYWORDS: Polymers, Electron beam lithography, Protactinium, Lithography, Electroluminescence, Projection lithography, Optical lithography, Semiconducting wafers, Neodymium, Electron beams

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