Mr. Nick Grupido Profile

Nick Grupido

VP, Mktg and Sales at Rigaku Innovative Technologies Inc

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Author

Publications (3)

Proceedings Article | 5 June 1998 Paper

Three-aspherical-mirror system for EUV lithography

Hiroo Kinoshita, Takeo Watanabe, Masahito Niibe, Masaaki Ito, H. Oizumi, Hiromasa Yamanashi, Katsuhiko Murakami, Tetsuya Oshino, Yuriy Platonov, Nicola Grupido

Proceedings Volume 3331, (1998) https://doi.org/10.1117/12.309580

KEYWORDS: Semiconducting wafers, Wafer-level optics, Photomasks, Optical alignment, Mirrors, Extreme ultraviolet lithography, Synchrotron radiation, Tolerancing, Assembly tolerances, Optical design

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Proceedings Article | 1 November 1997 Paper

Deposition of x-ray multilayers on long-size substrates for synchrotron applications

Yuriy Platonov, David Broadway, Brian DeGroot, Boris Verman, Bonglea Kim, George Gutman, James Wood, James Rodriguez, Nicola Grupido

Proceedings Volume 3152, (1997) https://doi.org/10.1117/12.295561

KEYWORDS: Multilayers, Mirrors, Reflectivity, Coating, Silicon, X-rays, Silicon carbide, Angiography, Synchrotrons, Sputter deposition

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Proceedings Article | 4 October 1994 Paper

Development of the Water Window Imaging X-Ray Microscope

Richard Hoover, David Shealy, Arthur Walker, Phillip Baker, Nicola Grupido, George Gutman, Troy Barbee

Proceedings Volume 2270, (1994) https://doi.org/10.1117/12.188828

KEYWORDS: Microscopes, X-rays, Multilayers, X-ray imaging, Mirrors, X-ray telescopes, X-ray optics, Reflectivity, Spatial resolution, Optical coatings

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