Dr. Andriy Hikavyy Profile

Dr. Andriy Hikavyy

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Publications (2)

Proceedings Article | 30 April 2023 Presentation

Foundry compatible 300 mm process flows for Si spin and superconducting qubits

Danny Wan, Stefan Kubicek, Tsvetan Ivanov, Shana Massar, Massimo Mongillo, Anton Potocnik, Ruoyu Li, Clement Godfrin, Daniel Perez Lozano, Xiaoyu Piao, Julien Jussot, Yann Canvel, Antoine Pacco, Andriy Hikavyy, Henri Jansen, Asser Elsayed, Mohamed Shehata, Jeroen Verjauw, Rohith Acharya, Jacques Van Damme, George Simion, Kristiaan De Greve

Proceedings Volume PC12499, PC1249908 (2023) https://doi.org/10.1117/12.2662652

KEYWORDS: Quantum communications, Superconductors, Silicon, Quantum computing, Transistors, Optical lithography, Interfaces, Etching, Electron transport

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Proceedings Article | 27 April 2023 Presentation + Paper

Small target compatible dimensional and analytical metrology for semiconductor nanostructures using x-ray fluorescence techniques

Philipp Hönicke, Yves Kayser, Victor Soltwisch, Andre Wählisch, Nils Wauschkuhn, Jeroen Scheerder, Claudia Fleischmann, Janusz Bogdanowicz, Anne-Laure Charley, Anabela Veloso, Roger Loo, Hans Mertens, Andriy Hikavyy, Thomas Siefke, Anna Andrle, Grzegorz Gwalt, Frank Siewert, Richard Ciesielski, Burkhard Beckhoff

Proceedings Volume 12496, 124961J (2023) https://doi.org/10.1117/12.2657963

KEYWORDS: Nanostructures, X-ray fluorescence spectroscopy, Metrology, Semiconductors, Fluorescence intensity, Data modeling, Transmission electron microscopy, Small targets

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