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Dr. Sang Hyun Han
VP of Strategic Marketing at Nova LTD
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Publications (1)
Proceedings Article | 8 March 2016 Paper
Metrology target design simulations for accurate and robust scatterometry overlay measurements
Guy Ben-Dov, Inna Tarshish-Shapir, David Gready, Mark Ghinovker, Mike Adel, Eitan Herzel, Soonho Oh, DongSub Choi, Sang Hyun Han, Mohamed El Kodadi, Chan Hwang, Jeongjin Lee, Seung Yoon Lee, Kuntack Lee
Proceedings Volume 9778, 97783B (2016) https://doi.org/10.1117/12.2219108
KEYWORDS: Overlay metrology, Metrology, Critical dimension metrology, Scatterometry, Optical testing, Image processing, Scatter measurement, Optical metrology, Diffraction gratings, Diffraction, Semiconducting wafers, Wafer testing, Device simulation
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