Mr. Taisir Marzook Profile

Taisir Marzook

Process Engineer - Lithography at Intel Corp

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Publications (2)

Proceedings Article | 28 March 2016 Paper

Toward sub-20nm pitch Fin patterning and integration with DSA

Safak Sayan, Taisir Marzook, BT Chan, Nadia Vandenbroeck, Arjun Singh, David Laidler, Efrain Sanchez, Philippe Leray, Paulina R. Delgadillo, Roel Gronheid, Geert Vandenberghe, William Clark, Aurelie Juncker

Proceedings Volume 9779, 97790R (2016) https://doi.org/10.1117/12.2220120

KEYWORDS: Directed self assembly, Optical lithography, Optical alignment, Semiconducting wafers, Etching, Photomasks, Image processing, Scanners, Wafer-level optics

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Proceedings Article | 20 March 2015 Paper

Directed self-assembly process integration: fin patterning approaches and challenges

Safak Sayan, B. T. Chan, Taisir Marzook, Nadia Vandenbroeck, Efrain Sanchez, Roel Gronheid, Arjun Singh, Paulina Delgadillo

Proceedings Volume 9425, 94250R (2015) https://doi.org/10.1117/12.2087318

KEYWORDS: Semiconducting wafers, Optical lithography, Etching, Photomasks, Optical alignment, Scanning electron microscopy, System on a chip, Silicon, Image processing, Directed self assembly

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